Thermal expansion compensated pressure sensor
First Claim
Patent Images
1. A pressure sensor comprising:
- an electrically conductive sensor membrane exposed to fluid at a known pressure on one side, and exposed to fluid at a pressure to be sensed on its opposite side;
an electrically conductive reference membrane exposed to a first reference pressure on one side, and exposed to a second reference pressure on its opposite side;
associated circuitry connected to both the sensor membrane and the reference membrane for converting deflection of the sensor membrane into an output signal indicative of a pressure difference between the known pressure and the fluid pressure to be sensed;
wherein,the associated circuitry converts deflection of the reference membrane to a thermal expansion compensation value used to adjust the output signal in response to changes in temperature in the pressure sensor'"'"'s operating environment.
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Abstract
A pressure sensor (30) for environments with wide ranging temperatures such as vehicle tires. The sensor has a conductive sensor membrane (53) exposed to the fluid pressure to be sensed, and a similarly conductive reference membrane subject to a predetermined pressure difference. Both membranes are connected to circuitry that converts the deflection in the sensor membrane into an output signal indicative of the pressure difference across the sensor membrane, and converts the deflection of the reference membrane into a thermal expansion compensation value used to adjust the output signal in response to temperature variations in the pressure sensor'"'"'s environment.
21 Citations
20 Claims
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1. A pressure sensor comprising:
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an electrically conductive sensor membrane exposed to fluid at a known pressure on one side, and exposed to fluid at a pressure to be sensed on its opposite side; an electrically conductive reference membrane exposed to a first reference pressure on one side, and exposed to a second reference pressure on its opposite side; associated circuitry connected to both the sensor membrane and the reference membrane for converting deflection of the sensor membrane into an output signal indicative of a pressure difference between the known pressure and the fluid pressure to be sensed;
wherein,the associated circuitry converts deflection of the reference membrane to a thermal expansion compensation value used to adjust the output signal in response to changes in temperature in the pressure sensor'"'"'s operating environment. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification