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Thermal expansion compensated pressure sensor

  • US 7,367,235 B2
  • Filed: 11/27/2006
  • Issued: 05/06/2008
  • Est. Priority Date: 10/18/2004
  • Status: Expired due to Fees
First Claim
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1. A pressure sensor comprising:

  • an electrically conductive sensor membrane exposed to fluid at a known pressure on one side, and exposed to fluid at a pressure to be sensed on its opposite side;

    an electrically conductive reference membrane exposed to a first reference pressure on one side, and exposed to a second reference pressure on its opposite side;

    associated circuitry connected to both the sensor membrane and the reference membrane for converting deflection of the sensor membrane into an output signal indicative of a pressure difference between the known pressure and the fluid pressure to be sensed;

    wherein,the associated circuitry converts deflection of the reference membrane to a thermal expansion compensation value used to adjust the output signal in response to changes in temperature in the pressure sensor'"'"'s operating environment.

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