Photon sieve for optical systems in micro-lithography
First Claim
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1. A lithographic apparatus, comprising:
- an illumination system configured to condition a radiation beam; and
a patterning device configured to modulate the cross-section of the radiation beam, wherein a pupil-defining element in the illumination system comprises a photon sieve.
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Abstract
The use of photon sieves may be as a pupil defining element in an illumination system; a field of defining elements in an illumination system; a pupil lens element in a projection lens; a color correction system in the projection system; or as a transmitting diffractive element for EUV.
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Citations
27 Claims
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1. A lithographic apparatus, comprising:
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an illumination system configured to condition a radiation beam; and a patterning device configured to modulate the cross-section of the radiation beam, wherein a pupil-defining element in the illumination system comprises a photon sieve. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A lithographic apparatus, comprising:
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an illumination system configured to condition a radiation beam; a patterning device configured to modulate the cross-section of the radiation beam, wherein a field-defining element in the illumination system comprises a photon sieve. - View Dependent Claims (8, 9, 10, 11, 12)
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13. A lithographic apparatus, comprising:
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an illumination system configured to condition a radiation beam; a patterning device configured to modulate the cross-section of the radiation beam; and a projection system, comprising a pupil lens element, configured to project the modulated radiation beam onto a target portion of a substrate, wherein the pupil lens element in the projection system comprises a photon sieve. - View Dependent Claims (14, 15, 16, 17, 18, 19)
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20. A lithographic apparatus, comprising:
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an illumination system configured to condition an EUV radiation beam; a patterning device configured to modulate the cross-section of the EUV radiation beam; and a projection system, comprising a pupil lens element, configured to project the modulated radiation beam onto a target portion of a substrate, wherein the illumination system or the projection system comprises mirror optics and a photon sieve. - View Dependent Claims (21, 22, 23, 24, 25)
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26. A device manufacturing method comprising projecting a modulated beam of radiation onto a substrate, wherein the radiation is diffracted in an illumination system using a photon sieve.
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27. A device manufacturing method comprising projecting a modulated beam of radiation onto a substrate, wherein the radiation is patterned using a patterning device and focused in a projection system using a photon sieve.
Specification