Probe station with two platens

• US 7,368,925 B2
• Filed: 01/16/2004
• Issued: 05/06/2008
• Est. Priority Date: 01/25/2002
• Status: Expired due to Fees

• Current Assignee: Cascade Microtech Incorporated (FormFactor Incorporated)
• Original Assignee: Cascade Microtech Incorporated (FormFactor Incorporated)
• Inventors: Stewart, Craig, Spencer, Jeff, Lord, Anthony, Jones, Rod, Froemke, Brad, McCann, Pete, Navratil, Peter, Fisher, Gavin, Runbaugh, Scott
• Primary Examiner(s): TANG, MINH NHUT
• Application Number:
  US10/759,481
• Publication Number:
  US 20050156610A1
• Time in Patent Office: 1,572 Days
• Field of Search: 324/750, 324/752, 324754-755, 324761-762, 324/765, 324/158.1
• US Class Current: 324/754.23
• CPC Class Codes: G01R 1/18 Screening arrangements against electric or magnetic fields, e.g. against earth's field
• CPC Class Codes: G01R 31/2831 Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates G01R31/318511 takes precedence; testing during manufacture H01L22/00
• CPC Class Codes: G01R 31/2886 Features relating to contacting the IC under test, e.g. probe heads; chucks G01R31/2865 takes precedence, test connections, e.g. test sockets, or probes per se, G01R1/04 or G01R1/06
• CPC Class Codes: G01R 31/2887 involving moving the probe head or the IC under test; docking stations moving single probes G01R1/06705; moving individual probes in multiple probes G01R1/07392
• CPC Class Codes: G01R 31/311 of integrated circuits G01R31/31728 takes precedence

Abstract

A probe station for testing a device under test. A first platen supporting an electrical probe. A chuck supporting the device under test. A second platen supporting an optical probe. The first platen and the second platen positioned above the device under test. A percentage of the top surface of the second platen terminating into free space.

Claims

1. A probe station for testing a device under test, said probe station comprising:

(a) a first platen supporting an electrical probe engageable with a first surface of said device under test;

(b) a chuck supporting said device under test;

(c) a second platen having a top surface supporting thereon an optical probe to emit light for impingement on said device under test and, alternatively, to detect light emitted by said device under test toward said first platen and propagating on an axis not substantially normal to said first surface;

(d) said first platen positioned above said second platen and above said device under test;

(e) at least 70% of the top surface of said second platen terminating in free space when said optical probe is not supported thereon.

2. The probe station of claim 1 wherein at least 80% of the top surface of said second platen terminating in free space when said optical probe is not supported thereon.

3. The probe station of claim 1 wherein said first platen is supported for movement relative to said second platen.

4. The probe station of claim 1 wherein at least 85% of the top surface of said second platen terminating in free space when said optical probe is not supported thereon.

5. The probe station of claim 1 wherein at least 90% of the top surface of said second platen terminating in free space when said optical probe is not supported thereon.

6. The probe station of claim 1 wherein at least 95% of the top surface of said second platen terminating in free space when said optical probe is not supported thereon.

7. The probe station of claim 1 wherein said second platen has a greater top surface area than said first platen.

8. The probe station of claim 1 wherein said second platen has a smaller top surface area than said first platen.

9. The probe station of claim 1 wherein said second platen has the same surface area as said first platen.

10. The probe station of claim 1 wherein said first platen is maintained in position with respect to said second platen by gravity such that if said probe station were turned upside down said first platen would freely fall away from said second platen.