Acoustic resonator performance enhancement using filled recessed region
First Claim
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1. An acoustic resonator comprising:
- a substrate;
a first electrode adjacent the substrate, wherein the first electrode has an outer perimeter;
a piezoelectric layer adjacent the first electrode;
a second electrode adjacent the piezoelectric layer, wherein the second electrode has an outer perimeter; and
a fill region in one of the first and second electrodes, wherein the fill region in one of the first and second electrodes is adjacent the outer perimeter such that no portion of the fill region is more than 10s of microns from the outer perimeter.
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Abstract
An acoustic resonator that includes a substrate, a first electrode, a layer of piezoelectric material, a second electrode, and a fill region. The first electrode is adjacent the substrate, and the first electrode has an outer perimeter. The piezoelectric layer is adjacent the first electrode. The second electrode is adjacent the piezoelectric layer and the second electrode has an outer perimeter. The fill region is in one of the first and second electrodes.
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Citations
22 Claims
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1. An acoustic resonator comprising:
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a substrate; a first electrode adjacent the substrate, wherein the first electrode has an outer perimeter; a piezoelectric layer adjacent the first electrode; a second electrode adjacent the piezoelectric layer, wherein the second electrode has an outer perimeter; and a fill region in one of the first and second electrodes, wherein the fill region in one of the first and second electrodes is adjacent the outer perimeter such that no portion of the fill region is more than 10s of microns from the outer perimeter. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. An acoustic resonator comprising:
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a substrate; a first electrode adjacent the substrate, wherein the first electrode has an outer perimeter; a piezoelectric layer adjacent the first electrode; a second electrode adjacent the piezoelectric layer, wherein the second electrode has an outer perimeter; and a fill region in one of the first and second electrodes; wherein a depression is formed in the substrate; wherein the depression has a depression perimeter; and wherein the fill region in one of the first and second electrodes is outside the depression perimeter.
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10. An acoustic resonator comprising:
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a first electrode adjacent the substrate, wherein the first electrode has an outer perimeter; a piezoelectric layer adjacent the first electrode; a second electrode adjacent the piezoclectric layer, wherein the second electrode has an outer perimeter; and a fill region in one of the first and second electrodes; wherein a depression is formed in the substrate; wherein the depression has a depression perimeter; and wherein the fill region in one of the first and second electrodes overlaps the depression perimeter.
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11. The acoustic resonator comprising:
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a substrate; a first electrode adjacent the substrate, wherein the first electrode has an outer perimeter; a piezoelectric layer adjacent the first electrode; a second electrode adjacent the piezoelectric layer, wherein the second electrode has an outer perimeter; and a fill region in one of the first and second electrodes; wherein a depression is formed in the substrate; wherein the depression has a depression perimeter; and wherein the fill region has a depth in one of the first and second electrodes that is on the order of hundreds to thousands of angstroms and a width on the order of fractions of a micron to tens of microns.
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12. An acoustic resonator comprising:
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a substrate having a first surface; a first electrode adjacent the first surface of the substrate; a layer of piezoelectric material adjacent the first electrode; a second electrode adjacent the layer of piezoelectric material, the second electrode lying in a first plane; and a fill region configured in the second electrode, wherein the fill material is denser than the electrode material such that it increases the acoustic impedance of the fill region relative to that at the center the acoustic resonator. - View Dependent Claims (13, 14, 15, 16, 17, 18)
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19. An acoustic resonator comprising:
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a substrate; a first electrode adjacent the substrate; a layer of piezoelectric material adjacent the first electrode; a second electrode adjacent the layer of piezoelectric material, wherein the first electrode, the layer of piezoelectric material and the second electrode together form an acoustic membrane having an outer edge and a center; and means for increasing the acoustic impedance of the outer edge of the acoustic membrane relative to that at the center the acoustic membrane, wherein the means for increasing the acoustic impedance comprises a material having a different dispersion characteristic than a material of the second electrode. - View Dependent Claims (20, 21, 22)
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Specification