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Acoustic resonator performance enhancement using filled recessed region

  • US 7,369,013 B2
  • Filed: 04/06/2005
  • Issued: 05/06/2008
  • Est. Priority Date: 04/06/2005
  • Status: Active Grant
First Claim
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1. An acoustic resonator comprising:

  • a substrate;

    a first electrode adjacent the substrate, wherein the first electrode has an outer perimeter;

    a piezoelectric layer adjacent the first electrode;

    a second electrode adjacent the piezoelectric layer, wherein the second electrode has an outer perimeter; and

    a fill region in one of the first and second electrodes, wherein the fill region in one of the first and second electrodes is adjacent the outer perimeter such that no portion of the fill region is more than 10s of microns from the outer perimeter.

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