Acoustic resonator performance enhancement using filled recessed region

• US 7,369,013 B2
• Filed: 04/06/2005
• Issued: 05/06/2008
• Est. Priority Date: 04/06/2005
• Status: Active Grant

• Current Assignee: Avago Technologies International Sales Pte Limited (Broadcom, Inc.)
• Original Assignee: Avago Technologies Wireless IP Singapore Pte Limited (Broadcom, Inc.)
• Inventors: Ruby, Richard C., Fazzio, Ronald S.
• Primary Examiner(s): Summons; Barbara
• Application Number:
  US11/100,311
• Publication Number:
  US 20060226932A1
• Time in Patent Office: 1,126 Days
• Field of Search: 333/187, 333/189, 310/312
• US Class Current: 333/187
• CPC Class Codes: H03H 9/02118 of lateral leakage between adjacent resonators
• CPC Class Codes: H03H 9/02149 of ageing changes of characteristics, e.g. electro-acousto-migration
• CPC Class Codes: H03H 9/13 for networks consisting of piezoelectric or electrostrictive materials H03H9/145 takes precedence
• CPC Class Codes: H03H 9/132 characterized by a particular shape
• CPC Class Codes: H03H 9/173 Air-gaps
• CPC Class Codes: H03H 9/175 Acoustic mirrors
• CPC Class Codes: Y10T 29/42 Piezoelectric device making
• CPC Class Codes: Y10T 29/49005 Acoustic transducer
• CPC Class Codes: Y10T 29/49155 Manufacturing circuit on or in base

Abstract

An acoustic resonator that includes a substrate, a first electrode, a layer of piezoelectric material, a second electrode, and a fill region. The first electrode is adjacent the substrate, and the first electrode has an outer perimeter. The piezoelectric layer is adjacent the first electrode. The second electrode is adjacent the piezoelectric layer and the second electrode has an outer perimeter. The fill region is in one of the first and second electrodes.

Claims

1. An acoustic resonator comprising:

a substrate;

a first electrode adjacent the substrate, wherein the first electrode has an outer perimeter;

a piezoelectric layer adjacent the first electrode;

a second electrode adjacent the piezoelectric layer, wherein the second electrode has an outer perimeter; and

a fill region in one of the first and second electrodes, wherein the fill region in one of the first and second electrodes is adjacent the outer perimeter such that no portion of the fill region is more than 10s of microns from the outer perimeter.

2. The acoustic resonator of claim 1, wherein a depression is formed in the substrate and wherein the depression has a depression perimeter.

3. The acoustic resonator of claim 1, wherein an acoustic mirror is formed in the substrate and wherein the first electrode spans the acoustic mirror.

4. The acoustic resonator of claim 1 further including a passivation layer adjacent the second electrode, the passivation layer lying in a second plane that is generally parallel to a first plane.

5. The acoustic resonator of claim 1, wherein at least one of the first and second electrodes comprise a material that is a different material than a material in the fill region.

6. The acoustic resonator of claim 5, wherein the fill material is a material selected from the group comprising dielectrics, metals, metal alloys, piezoelectrics, Mo, Pt, Al, Cu, W, Au, Ag, polyimide, BCB, SiO₂, Si₃N₄, AlN, ZnO, LiNbO₃, PZT, LiTaO₃, and Al₂O₃.

7. The acoustic resonator of claim 1, wherein the fill region extends around a substantial portion of the outer perimeter of one of the first and second electrodes.

8. The acoustic resonator of claim 1 wherein the fill region is offset from the outer perimeter of one of the first and second electrodes by zero to 10s of microns.

9. An acoustic resonator comprising:

a substrate;

a first electrode adjacent the substrate, wherein the first electrode has an outer perimeter;

a piezoelectric layer adjacent the first electrode;

a second electrode adjacent the piezoelectric layer, wherein the second electrode has an outer perimeter; and

a fill region in one of the first and second electrodes;

wherein a depression is formed in the substrate;

wherein the depression has a depression perimeter; and

wherein the fill region in one of the first and second electrodes is outside the depression perimeter.

10. An acoustic resonator comprising:

a first electrode adjacent the substrate, wherein the first electrode has an outer perimeter;

a piezoelectric layer adjacent the first electrode;

a second electrode adjacent the piezoclectric layer, wherein the second electrode has an outer perimeter; and

a fill region in one of the first and second electrodes;

wherein a depression is formed in the substrate;

wherein the depression has a depression perimeter; and

wherein the fill region in one of the first and second electrodes overlaps the depression perimeter.

11. The acoustic resonator comprising:

a substrate;

a first electrode adjacent the substrate, wherein the first electrode has an outer perimeter;

a piezoelectric layer adjacent the first electrode;

a second electrode adjacent the piezoelectric layer, wherein the second electrode has an outer perimeter; and

a fill region in one of the first and second electrodes;

wherein a depression is formed in the substrate;

wherein the depression has a depression perimeter; and

wherein the fill region has a depth in one of the first and second electrodes that is on the order of hundreds to thousands of angstroms and a width on the order of fractions of a micron to tens of microns.

12. An acoustic resonator comprising:

a substrate having a first surface;

a first electrode adjacent the first surface of the substrate;

a layer of piezoelectric material adjacent the first electrode;

a second electrode adjacent the layer of piezoelectric material, the second electrode lying in a first plane; and

a fill region configured in the second electrode, wherein the fill material is denser than the electrode material such that it increases the acoustic impedance of the fill region relative to that at the center the acoustic resonator.

13. The acoustic resonator of claim 12, wherein a depression having a depression perimeter is formed in the first surface of the substrate and wherein the first electrode spans the depression.

14. The acoustic resonator of claim 13, wherein the fill region in the second electrode is outside the depression perimeter.

15. The acoustic resonator of claim 13, wherein the fill region in the second electrode is inside the depression perimeter.

16. The acoustic resonator of claim 13, wherein the fill region in the second electrode overlaps the depression perimeter.

17. The acoustic resonator of claim 12, wherein an acoustic mirror is formed in the first surface of the substrate and wherein the first electrode spans the acoustic mirror.

18. The acoustic resonator of claim 12, wherein the second electrode comprises a material that is a different material than that in die fill region.

19. An acoustic resonator comprising:

a substrate;

a first electrode adjacent the substrate;

a layer of piezoelectric material adjacent the first electrode;

a second electrode adjacent the layer of piezoelectric material, wherein the first electrode, the layer of piezoelectric material and the second electrode together form an acoustic membrane having an outer edge and a center; and

means for increasing the acoustic impedance of the outer edge of the acoustic membrane relative to that at the center the acoustic membrane, wherein the means for increasing the acoustic impedance comprises a material having a different dispersion characteristic than a material of the second electrode.

20. The acoustic resonator of claim 19, wherein the second electrode comprises a fill region having a material that is different than the material in the second electrode.

21. The acoustic resonator of claim 19 further comprising a fill material located exclusively at the outer edge of the acoustic membrane and not in the center of the acoustic membrane.

22. The acoustic resonator of claim 19, wherein the material is different than the material of the second electrode.