Micromechanical optical element having a reflective surface as well as its use
First Claim
1. Micromechanical optical element having a reflective surface, which can be deflected by means of electrostatic or electromagnetic forces and is held by means of spring elements,characterized in that the element which can be deflected is held on mutually opposite sides by in each case at least two mutually independent spring elements;
- andthat the spring elements have different spring constants taking into account the distance between their respective points of action and the rotation axis of the element which is deflectable.
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Accused Products
Abstract
By way of example, it would also be possible to dispense in a manner which is not illustrated with the spring elements 2, and then for the element 1 to carry out an oscillating translational deflection. Micromechanical optical elements have a reflective surface which can be deflected electrostatically or electromagnetically in a known manner and which can be used for a large number of applications. The objective is to provide an element such as this at low cost and with improved dynamic deformation behaviour. The elements with a reflective surface are in this case held by spring elements, in which case the element which can be deflected is held on mutually opposite sides by in each case at least two mutually independent spring elements.
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Citations
12 Claims
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1. Micromechanical optical element having a reflective surface, which can be deflected by means of electrostatic or electromagnetic forces and is held by means of spring elements,
characterized in that the element which can be deflected is held on mutually opposite sides by in each case at least two mutually independent spring elements; - and
that the spring elements have different spring constants taking into account the distance between their respective points of action and the rotation axis of the element which is deflectable. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification