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Micromechanical optical element having a reflective surface as well as its use

  • US 7,369,288 B2
  • Filed: 07/13/2006
  • Issued: 05/06/2008
  • Est. Priority Date: 07/13/2005
  • Status: Active Grant
First Claim
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1. Micromechanical optical element having a reflective surface, which can be deflected by means of electrostatic or electromagnetic forces and is held by means of spring elements,characterized in that the element which can be deflected is held on mutually opposite sides by in each case at least two mutually independent spring elements;

  • andthat the spring elements have different spring constants taking into account the distance between their respective points of action and the rotation axis of the element which is deflectable.

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