Electrode and interconnect materials for MEMS devices
First Claim
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1. A microelectromechanical system (MEMS) device, comprising:
- a conductor comprising a metallized semiconductor; and
a movable element configured to be actuated by said conductor,wherein the MEMS device is an optical MEMS device,and wherein the conductor comprises an electrode, and the movable element moves in response to an electrical potential between the conductor and the movable element, and the conductor has an electrical resistivity from about 10 μ
Ω
cm to about 100 μ
Ω
cm and an optical reflectance from about 5% to about 40%.
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Abstract
A microelectromechanical (MEMS) device is presented which comprises a metallized semiconductor. The metallized semiconductor can be used for conductor applications because of its low resistivity, and for transistor applications because of its semiconductor properties. In addition, the metallized semiconductor can be tuned to have optical properties which allow it to be useful for optical MEMS devices.
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Citations
38 Claims
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1. A microelectromechanical system (MEMS) device, comprising:
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a conductor comprising a metallized semiconductor; and a movable element configured to be actuated by said conductor, wherein the MEMS device is an optical MEMS device, and wherein the conductor comprises an electrode, and the movable element moves in response to an electrical potential between the conductor and the movable element, and the conductor has an electrical resistivity from about 10 μ
Ω
cm to about 100 μ
Ω
cm and an optical reflectance from about 5% to about 40%. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A method of using a microelectromechanical system (MEMS) device, comprising:
applying a voltage to a conductor comprising a metallized semiconductor, wherein a movable element is actuated in response to the voltage, the conductor having an electrical resistivity from about 10 μ
Ω
cm to about 100 μ
Ω
cm and an optical reflectance from about 5% to about 40%.- View Dependent Claims (16, 17, 18, 19, 20, 21, 22)
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23. A method of manufacturing a microelectromechanical system (MEMS) device, the method comprising:
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forming a conductor comprising a metallized semiconductor;
the conductor having an electrical resistivity from about 10 μ
Ω
cm to about 100 μ
Ω
cm and an optical reflectance from about 5% to about 40%; andforming a movable element configured to be actuated by said conductor. - View Dependent Claims (24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36)
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37. A microelectromechanical system (MEMS) device, comprising:
means for actuating a MEMS element, wherein the actuating means is configured to partially transmit light and to partially reflect light, and the actuating means is configured to reflect from about 5% to about 40% of incident light. - View Dependent Claims (38)
Specification