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Electrode and interconnect materials for MEMS devices

  • US 7,369,292 B2
  • Filed: 05/03/2006
  • Issued: 05/06/2008
  • Est. Priority Date: 05/03/2006
  • Status: Expired due to Fees
First Claim
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1. A microelectromechanical system (MEMS) device, comprising:

  • a conductor comprising a metallized semiconductor; and

    a movable element configured to be actuated by said conductor,wherein the MEMS device is an optical MEMS device,and wherein the conductor comprises an electrode, and the movable element moves in response to an electrical potential between the conductor and the movable element, and the conductor has an electrical resistivity from about 10 μ

    Ω

    cm to about 100 μ

    Ω

    cm and an optical reflectance from about 5% to about 40%.

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