×

Mirror structure with single crystal silicon cross-member

  • US 7,369,297 B2
  • Filed: 12/08/2005
  • Issued: 05/06/2008
  • Est. Priority Date: 06/18/2004
  • Status: Expired due to Fees
First Claim
Patent Images

1. A method of fabricating a mirror structure, the method comprising:

  • forming a cavity in a first substrate;

    implanting hydrogen ions in a second substrate;

    bonding the first substrate to the second substrate; and

    separating a portion of the second substrate.

View all claims
  • 0 Assignments
Timeline View
Assignment View
    ×
    ×