Controlling a fabrication tool using support vector machine
First Claim
1. A method of controlling a fabrication tool using a support vector machine, the method comprising:
- a) obtaining a profile model of a structure, the profile model being defined by profile parameters that characterize the geometric shape of the structure;
b) obtaining a set of values for the profile parameters;
c) generating a set of simulated diffraction signals using the set of values for the profile parameters, each simulated diffraction signal characterizing the behavior of light diffracted from the structure;
d) training the support vector machine using the set of simulated diffraction signals as inputs to the support vector machine and the set of values for the profile parameters as expected outputs of the support vector machine;
e) after d), performing a fabrication process using a first fabrication tool to fabricate the structure on a wafer;
f) obtaining a measured diffraction signal off the structure fabricated on the wafer;
g) inputting the measured diffraction signal into the trained support vector machine;
h) after g), obtaining values of profile parameters of the structure as an output from the trained support vector machine; and
i) after h), adjusting one or more process parameters or equipment settings of the first fabrication tool based on the values of the profile parameters obtained in g).
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Abstract
A fabrication tool can be controlled using a support vector machine. A profile model of the structure is obtained. The profile model is defined by profile parameters that characterize the geometric shape of the structure. A set of values for the profile parameters is obtained. A set of simulated diffraction signals is generated using the set of values for the profile parameters, each simulated diffraction signal characterizing the behavior of light diffracted from the structure. The support vector machine is trained using the set of simulated diffraction signals as inputs to the support vector machine and the set of values for the profile parameters as expected outputs of the support vector machine. After the support vector machine has been trained, a fabrication process is performed using the fabrication tool to fabricate the structure on the wafer. A measured diffraction signal off the structure is obtained. The measured diffraction signal is inputted into the trained support vector machine. Values of profile parameters of the structure are obtained as an output from the trained support vector machine. One or more process parameters or equipment settings of the fabrication tool are adjusted based on the obtained values of the profile parameters.
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Citations
23 Claims
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1. A method of controlling a fabrication tool using a support vector machine, the method comprising:
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a) obtaining a profile model of a structure, the profile model being defined by profile parameters that characterize the geometric shape of the structure; b) obtaining a set of values for the profile parameters; c) generating a set of simulated diffraction signals using the set of values for the profile parameters, each simulated diffraction signal characterizing the behavior of light diffracted from the structure; d) training the support vector machine using the set of simulated diffraction signals as inputs to the support vector machine and the set of values for the profile parameters as expected outputs of the support vector machine; e) after d), performing a fabrication process using a first fabrication tool to fabricate the structure on a wafer; f) obtaining a measured diffraction signal off the structure fabricated on the wafer; g) inputting the measured diffraction signal into the trained support vector machine; h) after g), obtaining values of profile parameters of the structure as an output from the trained support vector machine; and i) after h), adjusting one or more process parameters or equipment settings of the first fabrication tool based on the values of the profile parameters obtained in g). - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A computer-readable storage medium containing computer executable instructions for causing a computer to control a fabrication tool using a support vector machine, comprising instructions for:
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a) obtaining a profile model of a structure, the profile model being defined by profile parameters that characterize the geometric shape of the structure; b) obtaining a set of values for the profile parameters; c) generating a set of simulated diffraction signals using the set of values for the profile parameters, each simulated diffraction signal characterizing the behavior of light diffracted from the structure; d) training the support vector machine using the set of simulated diffraction signals as inputs to the support vector machine and the set of values for the profile parameters as expected outputs of the support vector machine; e) after d), performing a fabrication process using a first fabrication tool to fabricate the structure on a wafer; f) obtaining a measured diffraction signal off the structure fabricated on the wafer; g) inputting the measured diffraction signal into the trained support vector machine; h) after g), obtaining values of profile parameters of the structure as an output from the trained support vector machine; and i) after h), adjusting one or more process parameters or equipment settings of the first fabrication tool based on the values of the profile parameters obtained in g). - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
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17. A system to system to control fabrication of a structure on a semiconductor wafer, comprising:
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a first fabrication tool configured to perform a fabrication process to fabricate the structure on the wafer; an optical metrology device configured to measure a diffraction signal off the structure on the wafer; a support vector machine, wherein the support vector machine is trained using a set of simulated diffraction signals as inputs to the support vector machine and a set of values for the profile parameters as expected outputs of the support vector machine, wherein the set of simulated diffraction signals is generated using the set of values for the profile parameters, and wherein the profile parameters characterize the geometric shape of the structure; and a. processor configured to input the measured diffraction signal into the trained support vector machine, obtain values of profile parameters of the structure as an output from the trained support vector machine, and adjust one or more process parameters or equipment settings of the first fabrication tool based on the obtained values of the profile parameters. - View Dependent Claims (18, 19, 20, 21, 22, 23)
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Specification