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Method of using deformable mirror using piezoelectric actuators formed as an integrated circuit

  • US 7,372,614 B2
  • Filed: 10/06/2005
  • Issued: 05/13/2008
  • Est. Priority Date: 07/30/2003
  • Status: Expired
First Claim
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1. A method comprising:

  • detecting wavefront aberrations;

    generating a control signal based on the detected aberration;

    moving extensions of a piezoelectric actuator based on the control signal;

    deforming a reflector based on the moving of the extensions to correct the aberrations in the wavefront;

    measuring a change in capacitance of the extensions; and

    verifying the deformation of the reflector based on the measured change in capacitance.

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