Method of operating a micromechanical device that contains anti-stiction gas-phase lubricant
First Claim
1. A method of operating a micromechanical device assembly comprising:
- providing a micromechanical device that comprises;
a first contact surface;
an electrode coupled to a base; and
a mirror coupled to the base and having a conductive region, a reflective mirror surface and a second contact surface, wherein the second contact surface interacts with the first contact surface during device operation; and
a power supply that is in electrical communication with the conductive region and the electrode;
exposing the reflective mirror surface to optical radiation delivered from a light source;
biasing the electrode relative to the conductive region to a potential that causes the mirror to move to a desired position and that causes the first contact surface to interact with the second contact surface; and
disposing a gas-phase lubricant between the first contact surface and the second contact surface at a predetermined pressure, wherein the gas-phase lubricant is not susceptible to substantial fragmentation, breakdown or out-gassing when exposed to the optical radiation and is adapted to reduce stiction between the first contact surface and the second contact surface.
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Abstract
One embodiment of an micromechanical device includes a first contact surface, a moveable component having a second contact surface, where the second contact surface interacts with the first contact surface during device operation, and a gas-phase lubricant disposed between the first contact surface and the second contact surface, where the gas-phase lubricant is adapted to reduce stiction-related forces between the first contact surface and the second contact surface. One advantage of the disclosed device is that a gas-phase lubricant has a high diffusion rate and, therefore, is self-replenishing, meaning that it can quickly move back into a contact region after being physically displaced from the region by the contacting surfaces of the device during operation. Consequently, the gas-phase lubricant is more reliable than conventional solid or liquid lubricants in preventing stiction-related device failures.
62 Citations
23 Claims
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1. A method of operating a micromechanical device assembly comprising:
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providing a micromechanical device that comprises; a first contact surface; an electrode coupled to a base; and a mirror coupled to the base and having a conductive region, a reflective mirror surface and a second contact surface, wherein the second contact surface interacts with the first contact surface during device operation; and a power supply that is in electrical communication with the conductive region and the electrode; exposing the reflective mirror surface to optical radiation delivered from a light source; biasing the electrode relative to the conductive region to a potential that causes the mirror to move to a desired position and that causes the first contact surface to interact with the second contact surface; and disposing a gas-phase lubricant between the first contact surface and the second contact surface at a predetermined pressure, wherein the gas-phase lubricant is not susceptible to substantial fragmentation, breakdown or out-gassing when exposed to the optical radiation and is adapted to reduce stiction between the first contact surface and the second contact surface. - View Dependent Claims (2, 3, 4, 14, 17, 20, 23)
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5. A method of operating a micromechanical device assembly comprising:
- providing a micromechanical device that comprises;
a first contact surface; and
a moveable component having a second contact surface, wherein the second contact surface interacts with the first contact surface during device operation;
causing the second contact surface of the moveable component to interact repeatedly with the first contact surface; and
disposing a gas-phase lubricant between the first contact surface and the second contact surface at a predetermined pressure, wherein contaminants are removed from the micromechanical device assembly prior to disposing the gas-phase lubricant, and the gas-phase lubricant is adapted to reduce stiction between the first contact surface and the second contact surface. - View Dependent Claims (6, 7, 8, 15, 18, 21)
- providing a micromechanical device that comprises;
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9. A method of operating a micromechanical device comprising:
- providing a micromechanical device that comprises;
a first contact surface; and
a moveable component having a second contact surface, wherein the second contact surface interacts with the first contact surface during device operation;
causing the second contact surface of the moveable component to interact repeatedly with the first contact surface;
disposing a liquid or solid lubricant material on at least one of the first contact surface and the second contact surface; and
disposing a gas-phase lubricant between the first contact surface and the second contact surface at a predetermined pressure, wherein contaminants are removed from the micromechanical device assembly prior to disposing the gas-phase lubricant, and the gas-phase lubricant is adapted to reduce stiction between the first contact surface and the second contact surface. - View Dependent Claims (10, 11, 12, 13, 16, 19, 22)
- providing a micromechanical device that comprises;
Specification