MEMS device fabricated on a pre-patterned substrate

• US 7,373,026 B2
• Filed: 07/01/2005
• Issued: 05/13/2008
• Est. Priority Date: 09/27/2004
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: IDC, LLC
• Inventors: Chui, Clarence
• Primary Examiner(s): Connelly-Cushwa; Michelle R.
• Assistant Examiner(s): Rahll; Jerry T.
• Application Number:
  US11/174,220
• Publication Number:
  US 20060067646A1
• Time in Patent Office: 1,047 Days
• Field of Search: 385/8, 359/318, 345/85, 438/607, 362/620
• US Class Current: 385/8
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26

Abstract

A microelectromechanical systems device fabricated on a pre-patterned substrate having grooves formed therein. A lower electrode is deposited over the substrate and separated by an orthogonal upper electrode by a cavity. The upper electrode is configured to be movable to modulate reflected light. A semi-reflective layer and a transparent material are formed over the movable upper electrode.

Claims

1. A display device, comprising:

a substrate embossed having a plurality of grooves formed therein;

a first electrode formed over a top surface of the substrate, wherein the first electrode is discontinuous at the grooves to thereby separate the first electrode into rows;

a second electrode, wherein the first electrode and the second electrode are insulated from each other and separated by a first cavity;

a semi-reflective layer separated from the second electrode by a second cavity; and

a transparent material formed over the semi-reflective layer.

2. The display device of claim 1, wherein the first and second electrodes are insulated from each other by a dielectric material deposited over the first electrode.

3. The display device of claim 1, wherein each of the plurality of grooves has a reentrant profile.

4. The display device of claim 1, wherein the first electrode is orthogonal to the second electrode.

5. The display device of claim 1, wherein the second electrode is configured to be movable.

6. The display device of claim 5, wherein the second cavity is larger and the first cavity is smaller when the second electrode is moved.

7. The display device of claim 1, further comprising:

a display;

a processor that is in electrical communication with said display, said processor being configured to process image data; and

a memory device in electrical communication with said processor.

8. The display device of claim 7, further comprising:

a first controller configured to send at least one signal to said display; and

a second controller configured to send at least a portion of said image data to said first controller.

9. The display system as recited in claim 7, further comprising:

an image source module configured to send said image data to said processor.

10. The display system as recited in claim 9, wherein said image source module comprises at least one of a receiver, transceiver, and transmitter.

11. The display system as recited in claim 7, further comprising:

an input device configured to receive input data and to communicate said input data to said processor.

12. A display device, comprising:

a substrate embossed having a plurality of grooves formed therein;

a first electrode formed over a top surface of the substrate;

a second electrode, wherein the first electrode and the second electrode are insulated from each other and separated by a first cavity;

a semi-reflective layer separated from the second electrode by a second cavity; and

a transparent material formed over the semi-reflective layer, wherein the transparent material has a plurality of holes formed therein.

13. A display device, comprising:

a substrate embossed having a plurality of grooves formed therein, wherein the substrate is opaque;

a first electrode formed over a top surface of the substrate;

a second electrode, wherein the first electrode and the second electrode are insulated from each other and separated by a first cavity;

a semi-reflective layer separated from the second electrode by a second cavity; and

a transparent material formed over the semi-reflective layer.

14. A display device, comprising

a substrate having a plurality of grooves formed therein;

a first reflecting means for reflecting light formed over a top surface of the substrate;

a second reflecting means for reflecting light, wherein the first reflecting means and the second reflecting means are insulated from each other and separated by a first cavity;

a semi-reflective layer separated from the second reflecting means by a second cavity; and

a viewing means for transmitting light, the viewing means formed over the semi-reflecting layer,

wherein the first reflecting means on the top surface of the substrate is discontinuous at the grooves forming rows of the first reflecting means on the top surface.

15. The display device of claim 14, wherein the second reflecting means is oriented in rows orthogonally to the rows of the first reflecting means.

16. The display device of claim 14, wherein the first and second reflecting means are insulated from each other by a dielectric material deposited over the first reflecting means.

17. The display device of claim 14, wherein the second reflecting means is configured to be movable.