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MEMS device fabricated on a pre-patterned substrate

  • US 7,373,026 B2
  • Filed: 07/01/2005
  • Issued: 05/13/2008
  • Est. Priority Date: 09/27/2004
  • Status: Expired due to Fees
First Claim
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1. A display device, comprising:

  • a substrate embossed having a plurality of grooves formed therein;

    a first electrode formed over a top surface of the substrate, wherein the first electrode is discontinuous at the grooves to thereby separate the first electrode into rows;

    a second electrode, wherein the first electrode and the second electrode are insulated from each other and separated by a first cavity;

    a semi-reflective layer separated from the second electrode by a second cavity; and

    a transparent material formed over the semi-reflective layer.

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