In situ optical surface temperature measuring techniques and devices
First Claim
1. A temperature sensor in a chamber comprising:
- a test substrate removeably disposed in said chamber, said test substrate having a surface, said surface having a recess therein;
a layer of luminescent material, disposed in the recess, that emits electromagnetic radiation having a detectable optical characteristic functionally dependent on the temperature of the test substrate;
an optical window that seals said layer of luminescent material in the recess;
a chuck disposed in said chamber; and
an optical fiber light waveguide that penetrates the chuck, the optical fiber light waveguide having an end, wherein the optical fiber light waveguide is in optical communication with the layer of luminescent material and wherein there is a spacing between the end of the optical fiber light waveguide and the optical window such that the end of the optical fiber light waveguide does not touch the optical window or the layer of luminescent material, and wherein the test substrate is positioned in the chamber so that the layer of luminescent material faces the end of the optical fiber light waveguide that penetrates the chuck; and
wherein the optical fiber light waveguide does not completely penetrate the chuck.
3 Assignments
0 Petitions
Accused Products
Abstract
A luminescent temperature sensor comprising (i) an object having a recess, (ii) a layer of luminescent material disposed in the recess, wherein the luminescent material emits electromagnetic radiation having a detectable optical characteristic that is functionally dependent on the temperature of the object, and (iii) a light waveguide in optical communication with the layer of luminescent material, is provided. A test device for measuring a temperature in a processing step comprising (i) an object having a surface and having a recess in the surface of the object, (ii) a layer of luminescent material disposed in the recess, wherein the luminescent material emits electromagnetic radiation having a detectable optical characteristic that is functionally dependent on the temperature of the object in response to a source of excitation radiation, and (iii) an optical window that seals said layer of luminescent material in the recess in the surface of the object, is provided.
-
Citations
27 Claims
-
1. A temperature sensor in a chamber comprising:
-
a test substrate removeably disposed in said chamber, said test substrate having a surface, said surface having a recess therein; a layer of luminescent material, disposed in the recess, that emits electromagnetic radiation having a detectable optical characteristic functionally dependent on the temperature of the test substrate; an optical window that seals said layer of luminescent material in the recess; a chuck disposed in said chamber; and an optical fiber light waveguide that penetrates the chuck, the optical fiber light waveguide having an end, wherein the optical fiber light waveguide is in optical communication with the layer of luminescent material and wherein there is a spacing between the end of the optical fiber light waveguide and the optical window such that the end of the optical fiber light waveguide does not touch the optical window or the layer of luminescent material, and wherein the test substrate is positioned in the chamber so that the layer of luminescent material faces the end of the optical fiber light waveguide that penetrates the chuck; and
wherein the optical fiber light waveguide does not completely penetrate the chuck. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
-
-
23. A test device for measuring a temperature in a processing step, the test device comprising:
-
a test substrate, said test substrate having a surface, said surface having a recess therein, wherein said test substrate is dimensioned for removeable placement in a chamber; a layer of luminescent material wholly contained in the recess, wherein the luminescent material emits electromagnetic radiation has a detectable optical characteristic that is functionally dependent on the temperature of the test substrate in response to a source of excitation radiation in a processing chamber; and an optical window that seals said layer of luminescent material in the recess in the surface of the substrate, wherein the optical window is wholly contained within the recess. - View Dependent Claims (24, 25, 26, 27)
-
Specification