Texturing slurry and texturing method by using same

• US 7,374,473 B2
• Filed: 11/27/2006
• Issued: 05/20/2008
• Est. Priority Date: 11/28/2005
• Status: Active Grant

• Current Assignee: Nihon Micro Coating Co., Ltd.
• Original Assignee: Nihon Micro Coating Co., Ltd.
• Inventors: Saito, Mitsuru, Kumasaka, Noriyuki, Horie, Yuji, Yamaguchi, Kazuei
• Primary Examiner(s): Rose; Robert A.
• Application Number:
  US11/605,497
• Publication Number:
  US 20070123153A1
• Time in Patent Office: 540 Days
• Field of Search: 451/36, 451/37, 451/41, 451/28, 451/57, 451/63, 451/307, 451/173
• US Class Current: 451/36
• CPC Class Codes: B24B 21/12 involving a contact wheel or roller pressing the belt against the work
• CPC Class Codes: B24B 37/044 characterised by the composition of the lapping agent
• CPC Class Codes: C09G 1/02 containing abrasives or grinding agents abrasives as such C09K3/14; polishing of semi-conductors H01L
• CPC Class Codes: C09K 3/1463 Aqueous liquid suspensions

Abstract

Texturing slurry for texturing a substrate for a magnetic hard disk is obtained by dispersing abrading particles of a specified kind in a specified kind of dispersant. The abrading particles include diamond clusters formed with artificial diamond particles with primary particle diameter of 20 nm or less and surrounded by impurities containing chlorine at a certain ratio. The cluster diameter and the average cluster diameter of the diamond clusters are each within a specified range. For texturing a substrate surface, the substrate is rotated, texturing slurry of this invention is supplied to the surface and a texturing tape of a specified kind is pressed against the substrate surface while it is caused to run.

Claims

1. Texturing slurry for texturing a substrate for a magnetic hard disk, said texturing slurry comprising abrading particles and a dispersant for dispersing said abrading particles;

wherein said abrading particles comprise diamond clusters formed with artificial diamond particles with primary particle diameter of 20 nm or less and surrounded by impurities that are attached thereto, the density of non-diamond carbon in said impurities surrounding said artificial diamond particles being 95% or more and 99% or less, the density of chlorine in the impurities other than non-diamond carbon of said diamond clusters being 0.5% or more, the cluster diameter of said diamond clusters being 30 nm or more and 500 nm or less, the average cluster diameter of said diamond clusters being 30 nm or more and 200 nm or less, and said texturing slurry containing said abrading particles by 0.005 weight % or more and 0.5 weight % or less; and

wherein said dispersant comprises water and an additive, said additive containing one or more selected from the group consisting of glycol compounds, higher aliphatic amides, organic phosphates and surfactants, and said texturing slurry containing said additive by 1 weight % or more and 10 weight % or less.

2. The texturing slurry of claim 1 containing said abrading particles by 0.005 weight % or more and 0.1 weight % or less.

3. The texturing slurry of claim 1 having pH value of 8 or greater.

4. A method of texturing a substrate for a magnetic hard disk, said method comprising the steps of:

rotating said substrate;

supplying texturing slurry to surface of said substrate; and

pressing a texturing tape onto the surface of said substrate and running said texturing tape;

wherein said texturing slurry comprises abrading particles and a dispersant for dispersing said abrading particles;

wherein said abrading particles comprise diamond clusters formed with artificial diamond particles with primary particle diameter of 20 nm or less and surrounded by impurities that are attached thereto, the density of non-diamond carbon in said impurities surrounding said artificial diamond particles being 95% or more and 99% or less, the density of chlorine in the impurities other than non-diamond carbon of said diamond clusters being 0.5% or more, the cluster diameter of said diamond clusters being 30 nm or more and 500 nm or less, the average cluster diameter of said diamond clusters being 30 nm or more and 200 nm or less, and said texturing slurry containing said abrading particles by 0.005 weight % or more and 0.5 weight % or less;

wherein said dispersant comprises water and an additive, said additive containing one or more selected from the group consisting of glycol compounds, higher aliphatic amides, organic phosphates and surfactants, and said texturing slurry containing said additive by 1 weight % or more and 10 weight % or less; and

wherein said texturing tape comprises a woven, non-woven, raised or flocked cloth material, at least a surface area of said cloth material for being pressed against the surface of said substrate comprising fibers with thickness 0.1 μ

m or greater and 5.0 μ

m or less.

5. The method of claim 4 wherein said texturing slurry contains said abrading particles by 0.005 weight % or more and 0.1 weight % or less.

6. The method of claim 4 wherein said texturing slurry has pH value of 8 or greater.