Fabrication and integration of polymeric bioMEMS

• US 7,375,404 B2
• Filed: 12/03/2004
• Issued: 05/20/2008
• Est. Priority Date: 12/05/2003
• Status: Expired due to Fees

• Current Assignee: University of Maryland Biotechnology Institute, University of Maryland, College Park
• Original Assignee: University of Maryland Biotechnology Institute, University of Maryland, College Park
• Inventors: Wu, Li-Qun, Yi, Hyunmin, Li, Sheng, Valentine, Theresa Michelle, Kastantin, Mark Joseph, Park, Jung Jin, Rubloff, Gary W., Ghodssi, Reza
• Primary Examiner(s): Nguyen; Tuan H.
• Application Number:
  US11/003,005
• Publication Number:
  US 20050230767A1
• Time in Patent Office: 1,264 Days
• Field of Search: 257/414, 257/415, 257/40
• US Class Current: 257/414
• CPC Class Codes: B01L 2200/027 for microfluidic devices
• CPC Class Codes: B01L 2200/0689 Sealing
• CPC Class Codes: B01L 2200/12 Specific details about manufacturing devices
• CPC Class Codes: B01L 2300/041 Connecting closures to device or container
• CPC Class Codes: B01L 2300/0645 Electrodes
• CPC Class Codes: B01L 2300/0803 Disc shape
• CPC Class Codes: B01L 2300/0816 Cards, e.g. flat sample carriers usually with flow in two horizontal directions
• CPC Class Codes: B01L 2300/0887 Laminated structure
• CPC Class Codes: B01L 3/502707 characterised by the manufacture of the container or its components by shaping or joining plastic parts B29C59/00, B29C65/00; by laminating B32B37/00; manufacture of microstructural devices in general B81C
• CPC Class Codes: B81B 2201/058 Microfluidics not provided for in B81B2201/051 - B81B2201/054
• CPC Class Codes: B81B 7/0061 suitable for fluid transfer from the MEMS out of the package or vice versa, e.g. transfer of liquid, gas, sound
• CPC Class Codes: B81C 3/002 Aligning microparts

Abstract

A micro-electro-mechanical system (MEMS) device is provided, along with means for its fabrication and operation for microfluidic and/or biomicrofluidic applications. The MEMS device includes a substrate, optional electrodes on the substrate, a patterned structure on the substrate, the patterned structure having a fluidic microchannel aligned with one or more of the optional electrodes, an encapsulation membrane covering the microchannel, and an optional reactive layer deposited over the electrode in the microchannel. MEMS devices of preferred embodiments permit a leak-tight seal to be formed around the microchannel and fluidic interconnects established for robust operation of fluidics-based processes. MEMS devices of other preferred embodiments permit reversible attachment and separation of the encapsulation membrane relative to the patterned structure.

Claims

1. A micro-electro-mechanical system (MEMS) device, comprising:

a substrate;

a patterned structure on the substrate, the patterned structure having a microchannel; and

an encapsulation layer covering the microchannel, the encapsulation layer being reversibly attachable and separable with respect to the patterned structure;

wherein;

the patterned structure comprises an epoxy; and

the encapsulation layer comprises polydimethylsiloxane.

2. A micro-electro-mechanical system (MEMS) device,

comprising:

a substrate;

a patterned structure on the substrate, the patterned structure having a microchannel; and

an encapsulation layer covering the microchannel, the encapsulation layer being reversibly attachable and separable with respect to the patterned structure;

wherein the patterned structure comprises SU-8.

3. A micro-electro-mechanical system (MEMS) device, comprising:

a substrate;

a patterned structure on the substrate, the patterned structure having a microchannel; and

an encapsulation layer covering the microchannel, the encapsulation layer being reversibly attachable and separable with respect to the patterned structure;

further comprising first and second electrodes situated on the substrate, the first electrode being aligned with the microchannel

wherein the first electrode comprises polypyrrole.

4. A micro-electro-mechanical system (MEMS) device, comprising:

a substrate;

a patterned structure on the substrate, the patterned structure having a microchannel; and

an encapsulation layer covering the microchannel, the encapsulation layer being reversibly attachable and separable with respect to the patterned structure;

further comprising first and second electrodes situated on the substrate, the first electrode being aligned with the microchannel; and

further comprising a reactive layer deposited over the first electrode in the microchannel.

5. The device of claim 4, wherein the reactive layer comprises chitosan.

6. The device of claim 4, further comprising biomolecules or cells conjugated to the reactive layer.

7. A micro-electro-mechanical system (MEMS) device, comprising:

a substrate;

a patterned structure on the substrate, the patterned structure comprising SU-8 and having a microchannel; and

a polydimethylsiloxane encapsulation layer covering the microchannel.

8. The device of claim 7, wherein the encapsulation layer has a fluid inlet port and a fluid outlet port, the microchannel connecting the fluid inlet and outlet ports to one another.

9. The device of claim 7, further comprising first and second electrodes situated on the substrate, the first electrode being aligned with the microchannel.

10. The device of claim 9, wherein the first electrode comprises polypyrrole.

11. The device of claim 9, further comprising a reactive layer deposited over the first electrode in the microchannel.

12. The device of claim 11, wherein the reactive layer comprises chitosan.

13. The device of claim 11, further comprising biomolecules or cells conjugated to the reactive layer.

14. A micro-electro-mechanical system (MEMS) device, comprising:

a substrate;

a patterned structure on the substrate, the patterned structure comprising an inlet reservoir, an outlet reservoir, and a microchannel; and

an encapsulation layer covering the microchannel, the encapsulation layer comprising a fluid inlet port in fluid communication with said inlet reservoir and a fluid outlet port in fluid communication with said outlet reservoir;

wherein;

the patterned structure comprises an epoxy; and

the encapsulation layer comprises polydimethylsiloxane.

15. A micro-electro-mechanical system (MEMS) device, comprising:

a substrate;

a patterned structure on the substrate, the patterned structure comprising an inlet reservoir, an outlet reservoir, and a microchannel; and

an encapsulation layer covering the microchannel, the encapsulation layer comprising a fluid inlet port in fluid communication with said inlet reservoir and a fluid outlet port in fluid communication with said outlet reservoir;

wherein the patterned structure comprises SU-8.

16. A micro-electro-mechanical system (MEMS) device, comprising:

a substrate;

a patterned structure on the substrate, the patterned structure comprising an inlet reservoir, an outlet reservoir, and a microchannel; and

an encapsulation layer covering the microchannel, the encapsulation layer comprising a fluid inlet port in fluid communication with said inlet reservoir and a fluid outlet port in fluid communication with said outlet reservoir;

further comprising;

a first wafer adjacent to the substrate and on an opposite side of the substrate relative to the patterned structure; and

a second wafer adjacent to the encapsulation layer and on an opposite side of the encapsulation layer relative to the patterned structure, the second wafer comprising an inlet channel and an outlet channel in fluid communication with the fluid inlet reservoir and the fluid outlet reservoir, respectively.

17. The device of claim 16, further comprising:

a first frame on an opposite side of the first wafer relative to the substrate; and

a second frame on an opposite side of the second wafer relative to the encapsulation layer, the second frame comprising a frame inlet channel and a frame outlet channel in fluid communication with the fluid inlet reservoir and the fluid outlet reservoir, respectively.

18. The device of claim 17, further comprising a gasket layer between the first frame and the first wafer.

19. The device of claim 18, further comprising a compression mechanism applying a compressive force to outer surfaces of the first and second frames.

20. A micro-electro-mechanical system (MEMS) device, comprising:

a substrate;

a patterned structure on the substrate, the patterned structure comprising an inlet reservoir, an outlet reservoir, and a microchannel; and

an encapsulation layer covering the microchannel, the encapsulation layer comprising a fluid inlet port in fluid communication with said inlet reservoir and a fluid outlet port in fluid communication with said outlet reservoir;

further comprising first and second electrodes situated on the substrate, the first electrode being aligned with the microchannel;

wherein the first electrode comprises polypyrrole.

21. A micro-electro-mechanical system (MEMS) device, comprising:

a substrate;

a patterned structure on the substrate, the patterned structure comprising an inlet reservoir, an outlet reservoir, and a microchannel; and

an encapsulation layer covering the microchannel, the encapsulation layer comprising a fluid inlet port in fluid communication with said inlet reservoir and a fluid outlet port in fluid communication with said outlet reservoir;

further comprising first and second electrodes situated on the substrate, the first electrode being aligned with the microchannel;

further comprising a reactive layer deposited over the first electrode in the microchannel.

22. The device of claim 21, wherein the reactive layer comprises chitosan.

23. The device of claim 21, further comprising biomolecular molecules or cells conjugated to the reactive layer.

24. A micro-electro-mechanical system (MEMS) device, comprising:

a substrate;

a patterned structure on the substrate, the patterned structure comprising a first layer and a second layer, the first layer having a microchannel, the second layer comprising a ridge protruding from the first layer and surrounding the microchannel; and

a compressible sealing layer covering the microchannel and compressed against the ridge to provide a leak-tight seal.

wherein;

the patterned structure comprises an epoxy; and

the compressible sealing layer comprises polydimethylsiloxane.

25. A micro-electro-mechanical system (MEMS) device, comprising:

a substrate;

a patterned structure on the substrate, the patterned structure comprising a first layer and a second layer, the first layer having a microchannel, the second layer comprising a ridge protruding from the first layer and surrounding the microchannel; and

a compressible sealing layer covering the microchannel and compressed against the ridge to provide a leak-tight seal;

wherein the patterned structure comprises SU-8.

26. A micro-electro-mechanical system (MEMS) device, comprising:

a substrate;

a patterned structure on the substrate, the patterned structure comprising a first layer and a second layer, the first layer having a microchannel, the second layer comprising a ridge protruding from the first layer and surrounding the microchannel; and

a compressible sealing layer covering the microchannel and compressed against the ridge to provide a leak-tight seal;

wherein;

the patterned structure further has a fluid inlet reservoir and a fluid outlet reservoir, the microchannel connecting the fluid inlet and outlet reservoirs to one another; and

the encapsulation layer comprises a fluid inlet port in fluid communication with the inlet reservoir and a fluid outlet port in fluid communication with the outlet reservoir;

further comprising;

a first wafer adjacent to the substrate and on an opposite side of the substrate relative to the patterned structure; and

a second wafer adjacent to the encapsulation layer and on an opposite side of the compressible sealing layer relative to the patterned structure, the second wafer comprising an inlet channel and an outlet channel in fluid communication with the fluid inlet reservoir and the fluid outlet reservoir, respectively.

27. The device of claim 26, further comprising:

a first frame on an opposite side of the first wafer relative to the substrate;

a second frame on an opposite side of the second wafer relative to the compressible sealing layer, the second frame comprising a frame inlet channel and a frame outlet channel in fluid communication with the fluid inlet reservoir and the fluid outlet reservoir, respectively; and

a clamp mechanism applying a compressive force to outer surfaces of the first and second frames and establishing the leak-tight seal between the patterned structure and the compressible sealing layer.

28. A micro-electro-mechanical system (MEMS) device, comprising:

a substrate;

a patterned structure on the substrate, the patterned structure comprising a first layer and a second layer, the first layer having a microchannel, the second layer comprising a ridge protruding from the first layer and surrounding the microchannel; and

a compressible sealing layer covering the microchannel and compressed against the ridge to provide a leak-tight seal;

further comprising first and second electrodes situated on the substrate, the first electrode being aligned with the microchannel;

wherein the first electrode comprises polypyrrole.

29. A micro-electro-mechanical system (MEMS) device, comprising:

a substrate;

a patterned structure on the substrate, the patterned structure comprising a first layer and a second layer, the first layer having a microchannel, the second layer comprising a ridge protruding from the first layer and surrounding the microchannel; and

a compressible sealing layer covering the microchannel and compressed against the ridge to provide a leak-tight seal;

further comprising first and second electrodes situated on the substrate, the first electrode being aligned with the microchannel;

further comprising a reactive layer deposited over the first electrode in the microchannel.

30. The device of claim 29, wherein the reactive layer comprises chitosan.

31. The device of claim 29, further comprising biomolecules or cells conjugated to the reactive layer.

32. A micro-electro-mechanical system (MEMS) device, comprising:

a substrate;

a patterned ridge structure on the substrate, the patterned ridge structure forming and surrounding a microchannel; and

a compressible sealing layer covering the microchannel and compressed against the ridge structure to provide a leak-tight seal;

wherein;

the patterned ridge structure comprises an epoxy; and

the compressible sealing layer comprises polydimethylsiloxane.

33. A micro-electro-mechanical system (MEMS) device, comprising:

a substrate;

a patterned ridge structure on the substrate, the patterned ridge structure forming and surrounding a microchannel; and

a compressible sealing layer covering the microchannel and compressed against the ridge structure to provide a leak-tight seal;

wherein the patterned ridge structure comprises SU-8.

34. A micro-electro-mechanical system (MEMS) device, comprising:

a substrate;

a patterned ridge structure on the substrate, the patterned ridge structure forming and surrounding a microchannel; and

a compressible sealing layer covering the microchannel and compressed against the ridge structure to provide a leak-tight seal;

wherein;

the patterned ridge structure further has a fluid inlet reservoir and a fluid outlet reservoir, the microchannel connecting the fluid inlet and outlet reservoirs to one another; and

the compressible sealing layer comprises a fluid inlet port in fluid communication with the inlet reservoir and a fluid outlet port in fluid communication with the outlet reservoir

further comprising;

a first wafer adjacent to the substrate and on an opposite side of the substrate relative to the patterned ridge structure; and

a second wafer adjacent to the compressible sealing layer and on an opposite side of the compressible sealing layer relative to the patterned ridge structure, the second wafer comprising an inlet channel and an outlet channel in fluid communication with the fluid inlet reservoir and the fluid outlet reservoir, respectively.

35. The device of claim 34, further comprising:

a first frame on an opposite side of the first wafer relative to the substrate;

a second frame on an opposite side of the second wafer relative to the compressible sealing layer, the second frame comprising a frame inlet channel and a frame outlet channel in fluid communication with the fluid inlet reservoir and the fluid outlet reservoir, respectively; and

a clamp mechanism applying a compressive force to outer surfaces of the first and second frames and establishing the leak-tight seal between the compressible sealing layer and the patterned ridge structure.

36. A micro-electro-mechanical system (MEMS) device, comprising:

a substrate;

a patterned ridge structure on the substrate, the patterned ridge structure forming and surrounding a microchannel; and

a compressible sealing layer covering the microchannel and compressed against the ridge structure to provide a leak-tight seal;

further comprising first and second electrodes situated on the substrate, the first electrode being aligned with the microchannel.

37. The device of claim 36, wherein the first electrode comprises polypyrrole.

38. The device of claim 36, further comprising a reactive layer deposited over the first electrode in the microchannel.

39. The device of claim 38, wherein the reactive layer comprises chitosan.

40. The device of claim 38, further comprising biomolecules or cells conjugated to the reactive layer.