Lithographic apparatus, device manufacturing method, and device manufactured thereby

• US 7,375,795 B2
• Filed: 12/22/2004
• Issued: 05/20/2008
• Est. Priority Date: 12/22/2004
• Status: Active Grant

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Fluit, Jeroen, Lof, Joeri, Luttikhuis, Bernardus Antonius Johannes, Spit, Peter
• Primary Examiner(s): RUTLEDGE, DELLA J
• Application Number:
  US11/018,930
• Publication Number:
  US 20060132735A1
• Time in Patent Office: 1,245 Days
• Field of Search: 355/53, 355/67, 355/72, 356399-401, 356490-508, 378/34, 378/35
• US Class Current: 355/53
• CPC Class Codes: G03F 7/70291 Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
• CPC Class Codes: G03F 7/70791 Large workpieces, e.g. glass substrates for flat panel displays or solar panels

Abstract

Substrate processing apparatus includes a lithographic apparatus which comprises an illumination system for supplying a projection beam of radiation, an array of individually controllable elements serving to impart the projection beam with a pattern in its cross-section, and a projection system for projecting the patterned beam onto a target portion of a substrate. The processing apparatus also includes a substrate supply arranged to output at least one unbroken length of substrate, and a substrate conveying system arranged to convey each outputted unbroken length of substrate from the substrate supply and past the projection system such that the projection system is able to project the patterned beam onto a series of target portions along each unbroken length of substrate. In certain embodiments, long lengths of substrate are supplied from a roll, but alternatively a series of separate sheets can be supplied.

Claims

1. A lithographic apparatus comprising:

an illumination system for supplying a projection beam of radiation;

an array of individually controllable elements serving to impart the projection beam with a pattern in its cross-section to form a patterned beam;

a projection system for projecting the patterned beam onto a target portion of a substrate;

a substrate supply having adjacent layers of substrates arranged to output at least one unbroken length of substrate

a substrate conveying system arranged to convey each outputted unbroken length of substrate from the substrate supply and past the projection system such that the projection system is able to project the patterned beam onto a series of target portions along each unbroken length of substrate; and

a detection system arranged to detect alignment marks on the substrate that enable the lithographic apparatus to position the substrate.

2. The lithographic apparatus of claim 1, wherein the substrate conveying system is arranged to convey each outputted unbroken length of substrate in an uninterrupted manner from the substrate supply and past the projection system.

3. The lithographic apparatus of claim 1, further comprising a separating system for separating a layer of separating material from the outputted substrate before the outputted substrate is conveyed past the projection system.

4. The lithographic apparatus of claim 1, wherein the substrate supply comprises a reel, the at least one unbroken length of substrate is wound onto the reel, and the substrate supply is arranged to output each unbroken length from the reel.

5. The lithographic apparatus of claim 4, wherein the substrate is a glass substrate.

6. The lithographic apparatus of claim 1, wherein each unbroken length of substrate has a length to width ratio of at least one.

7. The lithographic apparatus of claim 1, wherein each unbroken length of substrate has a substantially uniform width and a length at least five times as large as the width.

8. The lithographic apparatus of claim 1, wherein the substrate supply is arranged to output a plurality of individual unbroken lengths of substrate.

9. The lithographic apparatus of claim 8, wherein the substrate conveying system is arranged to convey the plurality of individual unbroken lengths of substrate from the substrate supply and past the projection system in a series.

10. The lithographic apparatus of claim 9, wherein the series is a continuous series.

11. A device manufactured using apparatus in accordance with claim 1.

12. The device of claim 11, wherein the device is a flat panel display.

13. The lithographic apparatus of claim 1, further comprising a controller coupled to the detection system and the substrate conveying system, wherein control signals from the controller are used to control the movement of the substrate based on control signals from the detection system.

14. The lithographic apparatus of claim 13, wherein the controller is coupled to the array of individually controllable elements, wherein control signals from the controller are used to adjust the timing of control data sent to the controllable elements, thereby the radiation pattern being projected onto the substrate at a particular time is appropriate to the position of the substrate.

15. The lithographic apparatus of claim 1, wherein the detection system is arranged to detect alignment marks that enable the lithographic apparatus to determine a displacement of the substrate in a direction in which the substrate conveying system is arranged to convey each outputted unbroken length of substrate.

16. The lithographic apparatus of claim 15, wherein the detection system is arranged to detect alignment marks that enable the detection system to determine a displacement of the substrate in a direction perpendicular to the direction in which the substrate conveying system is arranged to convey each outputted unbroken length of substrate.

17. The lithographic apparatus of claim 1, wherein the detection system comprises:

a moveable detector that is moveable in a direction perpendicular to the direction in which the substrate conveying system is arranged to convey each outputted unbroken length of substrate.

18. A device manufacturing method comprising the steps of:

providing a substrate supply having adjacent layers of substrate with a separating material arranged between adjacent layers of substrate;

outputting from the supply at least one unbroken length of substrate;

providing a projection beam of radiation using an illumination system;

using an array of individually controllable elements to impart the projection beam with a pattern in its cross-section to form a patterned beam;

using a projection system to project the patterned beam;

conveying each outputted unbroken length of substrate from the substrate supply and past the projection system;

positioning the length of substrate by detecting alignment marks extending along each unbroken length of substrate; and

projecting the patterned beam onto a series of target portions along each unbroken length of substrate.

19. The method of claim 18, wherein the step of providing a substrate supply comprises providing each unbroken length of substrate on a roll.

20. The method of claim 19, wherein the substrate is glass.

21. The method of claim 18, further comprising the step of collecting each unbroken length of substrate on a roll after exposure to the patterned beam.

22. The method of claim 18, further comprising the steps of:

processing each unbroken length of substrate in at least one additional processing stage; and

conveying each outputted unbroken length of substrate from the substrate supply, through the at least one additional processing stage, and past the projection system.

23. A device manufactured using a method in accordance with claim 18.

24. The device of claim 23, wherein the device is a flat panel display.

25. The method of claim 18, further comprising:

determining a displacement of the substrate in a direction in which the substrate conveying system is arranged to convey each outputted unbroken length of substrate by detecting the alignment marks extending along each unbroken length of substrate.

26. The method of claim 25, further comprising:

determining a displacement of the substrate in a direction perpendicular to the direction in which the substrate conveying system is arranged to convey each outputted unbroken length of substrate by detecting the alignment marks extending along each unbroken length of substrate.

27. A substrate processing apparatus comprising:

a lithographic apparatus that projects a patterned beam onto a target portion of a substrate;

a substrate supply having adjacent layers of substrates arranged to output at least one unbroken length of substrate, wherein a layer of separating material exists between adjacent layers of substrates; and

a substrate conveying system arranged to convey each outputted unbroken length of substrate from the substrate supply such that the lithographic apparatus is able to project the patterned beam onto a series of target portions along each unbroken length of substrate; and

a detection system arranged to detect alignment marks on the substrate that enable the lithographic apparatus to position the substrate.

28. The lithographic apparatus of claim 27, wherein the detection system is arranged to detect alignment marks that enable the lithographic apparatus to determine a displacement of the substrate in a direction in which the substrate conveying system is arranged to convey each outputted unbroken length of substrate.

29. The lithographic apparatus of claim 28, wherein the detection system is arranged to detect alignment marks that enable the detection system to determine a displacement of the substrate in a direction perpendicular to the direction in which the substrate conveying system is arranged to convey each outputted unbroken length of substrate.

30. The lithographic apparatus of claim 27, wherein the detection system comprises:

a moveable detector that is moveable in a direction perpendicular to the direction in which the substrate conveying system is arranged to convey each outputted unbroken length of substrate arranged to detect the alignment marks.

31. A device manufacturing method comprising the steps of:

providing a substrate supply having adjacent layers of substrate with a separating material arranged between adjacent layers of substrate;

outputting from the supply at least one unbroken length of substrate;

providing a projection beam of radiation using a lithographic apparatus;

conveying each outputted unbroken length of substrate from the substrate supply;

positioning the length of substrate by detecting alignment marks extending along each unbroken length of substrate; and

projecting the patterned beam onto a series of target portions along each unbroken length of substrate.

32. The method of claim 31, further comprising:

determining a displacement of the substrate in a direction in which the substrate conveying system is arranged to convey each outputted unbroken length of substrate by detecting the alignment marks extending along each unbroken length of substrate.

33. The method of claim 32, further comprising:

determining a displacement of the substrate in a direction perpendicular to the direction in which the substrate conveying system is arranged to convey each outputted unbroken length of substrate by detecting the alignment marks extending along each unbroken length of substrate.