Method of repairing micromirrors in spatial light modulators
First Claim
1. A method of operating a device comprising an array of micromirrors, each comprising a mirror plate and an addressing electrode, the method comprising:
- switching the micromirrors between an ON and OFF state;
applying a number of refresh voltage pulses to the mirror plates so as to repair a stuck micromirror; and
wherein a ratio of the number of switches of the micromirrors between the ON and OFF states to the number of refresh voltage pulses is greater than 1.
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Accused Products
Abstract
Disclosed herein is method of operating a device that comprises an array of micromirrors. The method comprises a process usable for repairing stuck micromirrors of the micromirror array during the operation. The reparation process applies, at the ON state, two consecutive refresh voltages to the mirror plates of the micromirrors in the array with the pulses being separated in time longer than the characteristic oscillation time of the micromirrors. The reparation process can be applied independently to the micromirrors. Alternatively, the reparation process can be incorporated with a bias inversion process.
41 Citations
20 Claims
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1. A method of operating a device comprising an array of micromirrors, each comprising a mirror plate and an addressing electrode, the method comprising:
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switching the micromirrors between an ON and OFF state; applying a number of refresh voltage pulses to the mirror plates so as to repair a stuck micromirror; and wherein a ratio of the number of switches of the micromirrors between the ON and OFF states to the number of refresh voltage pulses is greater than 1. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification