Process monitoring device for sample processing apparatus and control method of sample processing apparatus
First Claim
1. A plasma processing method for processing a sample by using plasma on a lot unit basis, comprising:
- detecting plural kinds of information as monitor data relating to a processing state of the sample, using a plurality of sensors;
selecting a detection time range of the monitor data thus detected, which is used for monitoring a plasma processing;
converting the monitor data within the selected detection time range into a converted signal;
predicting a pattern shape of the sample based on the converted signal;
calculating a correction quantity of a processing parameter, for decreasing a deviation between the predicted pattern shape and a standard value;
storing the correction quantity of the processing parameter; and
converting the correction quantity of a processing parameter obtained by the calculating operation when a kind of a next sample of a next lot is different from the sample, thereby to use a converted correction quantity of the processing parameter for a processing of the next sample.
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Abstract
A plasma processing method for processing a sample by using plasma on a lot unit basis, including: detecting plural kinds of information as monitor data relating to a processing state of the sample, using a plurality of sensors; selecting a detection time range of the monitor data thus detected; converting the monitor data within the selected detection time range into a converted signal; predicting a pattern shape of the sample based on the converted signal; calculating a correction quantity of a processing parameter, for decreasing a deviation between the predicted pattern shape and a standard value; and converting the correction quantity of a processing parameter obtained by the calculating operation when a kind of a next sample of a next lot is different from the sample, thereby to use a converted correction quantity of the processing parameter for a processing of the next sample.
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Citations
2 Claims
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1. A plasma processing method for processing a sample by using plasma on a lot unit basis, comprising:
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detecting plural kinds of information as monitor data relating to a processing state of the sample, using a plurality of sensors; selecting a detection time range of the monitor data thus detected, which is used for monitoring a plasma processing; converting the monitor data within the selected detection time range into a converted signal; predicting a pattern shape of the sample based on the converted signal; calculating a correction quantity of a processing parameter, for decreasing a deviation between the predicted pattern shape and a standard value; storing the correction quantity of the processing parameter; and converting the correction quantity of a processing parameter obtained by the calculating operation when a kind of a next sample of a next lot is different from the sample, thereby to use a converted correction quantity of the processing parameter for a processing of the next sample.
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2. A plasma processing method for processing a sample by using plasma on a lot unit basis, comprising:
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detecting plural kinds of information as monitor data relating to a processing state of the sample, using a plurality of sensors; selecting a detection time range of the monitor data thus detected, which is used for monitoring a plasma processing; converting the monitor data within the selected detection time range, into a converted signal; predicting a pattern shape of the sample based on the converted signal; calculating a correction quantity of a processing parameter, for decreasing a deviation between the predicted pattern shape and a standard value; and storing the correction quantity of the processing parameter, wherein a correction quantity of a processing parameter obtained by the calculating operation at a time of processing a sample at a position of one lot is used for a processing of a sample at the same position of a next lot.
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Specification