System and method for gas flow verification
First Claim
1. A gas flow rate verification apparatus, comprising:
- a first volume defined within a first chamber;
a second volume defined within a second chamber, the second volume being larger than the first volume, wherein the second volume is isolatable from the first volume by at least one valve;
a first pressure measurement device configured to be connected in fluid communication with either the first volume, the second volume, or both the first and second volumes; and
a second pressure measurement device configured to be connected in fluid communication with either the first volume, the second volume, or both the first and second volumes, the second pressure measurement device capable of measuring higher pressures than the first pressure measurement device,wherein each of the first volume, the second volume, or both the first and second volumes is selectable as a test volume for measuring a gas flow rate,wherein each of the first pressure measurement device or the second pressure measurement device is selectable for measuring a pressure within the test volume.
1 Assignment
0 Petitions
Accused Products
Abstract
A gas flow rate verification apparatus is provided for shared use in a multiple tool semiconductor processing platform. The gas flow rate verification apparatus is defined to measure a pressure rate of rise and temperature within a test volume for determination of a corresponding gas flow rate. The apparatus includes first and second volumes, wherein the second volume is larger than the first volume. The apparatus also includes first and second pressure measurement devices, wherein the second pressure measurement device is capable of measuring higher pressures. Based on the target gas flow rate to be measured, either the first or second volume can be selected as the test volume, and either the first or second pressure measurement device can be selected to measure the pressure in the test volume. Configurability of the apparatus enables accurate measurement of gas flow rates over a broad range and in an time efficient manner.
-
Citations
13 Claims
-
1. A gas flow rate verification apparatus, comprising:
-
a first volume defined within a first chamber; a second volume defined within a second chamber, the second volume being larger than the first volume, wherein the second volume is isolatable from the first volume by at least one valve; a first pressure measurement device configured to be connected in fluid communication with either the first volume, the second volume, or both the first and second volumes; and a second pressure measurement device configured to be connected in fluid communication with either the first volume, the second volume, or both the first and second volumes, the second pressure measurement device capable of measuring higher pressures than the first pressure measurement device, wherein each of the first volume, the second volume, or both the first and second volumes is selectable as a test volume for measuring a gas flow rate, wherein each of the first pressure measurement device or the second pressure measurement device is selectable for measuring a pressure within the test volume. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
-
-
9. A method for operating a gas flow rate verification device, comprising:
-
identifying a target gas flow rate range; selecting a test volume within the gas flow rate verification device, wherein the selected test volume is either a small volume or a large volume, the test volume selection being based on the identified target gas flow rate range; selecting a pressure measurement device within the gas flow rate verification device, wherein the selected pressure measurement device is either a lower pressure measurement device or a higher pressure measurement device, the selected pressure measurement device being based on the identified target gas flow rate range; evacuating the test volume; exposing the test volume to a gas flow rate to be measured; measuring a pressure rate of rise within the test volume; measuring a temperature within the test volume; determining the gas flow rate into the test volume using the measured pressure rate of rise and temperature within the test volume; and outputting, displaying, storing, or otherwise conveying the determined gas flow rate. - View Dependent Claims (10, 11, 12, 13)
-
Specification