System and method for gas flow verification

• US 7,376,520 B2
• Filed: 03/16/2005
• Issued: 05/20/2008
• Est. Priority Date: 03/16/2005
• Status: Active Grant

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Meinccke, Richard J., Wong, Vernon
• Primary Examiner(s): Barlow; John
• Assistant Examiner(s): Bhat; Aditya S.
• Application Number:
  US11/083,761
• Publication Number:
  US 20060212233A1
• Time in Patent Office: 1,161 Days
• Field of Search: 702/50, 702/45, 702/47, 702/51, 702/53, 702/55, 738/61, 731/95, 732/041.1, 732/041.7, 738/614.2, 738/614.5
• US Class Current: 702/45
• CPC Class Codes: G01F 1/34 by measuring pressure or differential pressure
• CPC Class Codes: G01F 17/00 Methods or apparatus for determining the capacity of containers or cavities, or the volume of solid bodies measuring linear dimensions to determine volume G01B
• CPC Class Codes: G01F 22/02 involving measurement of pressure
• CPC Class Codes: G01F 25/15 specially adapted for gas meters G01F25/11 - G01F25/14, G01F25/17 take precedence
• CPC Class Codes: G01F 25/17 using calibrated reservoirs
• CPC Class Codes: G01F 7/005 by measuring pressure or differential pressure, created by the use of flow constriction

Abstract

A gas flow rate verification apparatus is provided for shared use in a multiple tool semiconductor processing platform. The gas flow rate verification apparatus is defined to measure a pressure rate of rise and temperature within a test volume for determination of a corresponding gas flow rate. The apparatus includes first and second volumes, wherein the second volume is larger than the first volume. The apparatus also includes first and second pressure measurement devices, wherein the second pressure measurement device is capable of measuring higher pressures. Based on the target gas flow rate to be measured, either the first or second volume can be selected as the test volume, and either the first or second pressure measurement device can be selected to measure the pressure in the test volume. Configurability of the apparatus enables accurate measurement of gas flow rates over a broad range and in an time efficient manner.

Claims

1. A gas flow rate verification apparatus, comprising:

a first volume defined within a first chamber;

a second volume defined within a second chamber, the second volume being larger than the first volume, wherein the second volume is isolatable from the first volume by at least one valve;

a first pressure measurement device configured to be connected in fluid communication with either the first volume, the second volume, or both the first and second volumes; and

a second pressure measurement device configured to be connected in fluid communication with either the first volume, the second volume, or both the first and second volumes, the second pressure measurement device capable of measuring higher pressures than the first pressure measurement device,

wherein each of the first volume, the second volume, or both the first and second volumes is selectable as a test volume for measuring a gas flow rate,

wherein each of the first pressure measurement device or the second pressure measurement device is selectable for measuring a pressure within the test volume.

2. The apparatus of claim 1, wherein each of the first volume and the second volume is connected in fluid communication with a gas source for which the gas flow rate is to be measured, each of the first volume and second volume being independently isolatable from the gas source.

3. The apparatus of claim 1, further comprising:

a heater defined to maintain an elevated temperature within each of the first volume and second volume; and

a temperature measurement device capable of measuring a temperature within each of the first volume and second volume.

4. The apparatus of claim 1, further comprising:

an input manifold configured to receive a gas supply from each of a plurality of gas sources, the input manifold being further configured to direct the received gas supply to the selected test volume.

5. The apparatus of claim 1, further comprising:

a first bridge line defined to connect the first volume to the second volume, the first bridge line including a first valve and a second valve, wherein the first pressure measurement device is disposed between the first valve and the second value; and

a second bridge line defined to connect the first volume to the second volume, the second bridge line including a third valve and a fourth valve, wherein the second pressure measurement device is disposed between the third valve and the fourth value.

6. The apparatus of claim 1, further comprising:

a first discharge line connecting the first volume to a pump, the first discharge line including a first discharge valve to isolate the first volume from the pump; and

a second discharge line connecting the second volume to the pump, the second discharge line including a second discharge valve to isolate the second volume from the pump.

7. The apparatus of claim 1, wherein the second volume is at least ten times larger than the first volume and the second pressure measurement device is capable of measuring pressures at least one hundred times larger than the first pressure measurement device.

8. The apparatus of claim 1, further comprising:

a control system defined to configure the pressure rate of rise gas flow rate measurement apparatus into a test configuration for measurement of the gas flow rate, the test configuration being defined by a selected test volume and a selected pressure measurement device,

the test configuration for a gas flow rate within a range extending from about 0.5 standard cubic centimeter(s) per minute (sccm) to about 5 sccm being defined by the first volume and the first pressure measurement device,

the test configuration for a gas flow rate within a range extending from about 5 sccm to about 50 sccm being defined by the second volume and the first pressure measurement device,

the test configuration for a gas flow rate within a range extending from about 50 sccm to about 500 sccm being defined by the first volume and the second pressure measurement device, and

the test configuration for a gas flow rate within a range extending from about 500 sccm to about 5000 sccm being defined by the second volume and the second pressure measurement device.

9. A method for operating a gas flow rate verification device, comprising:

identifying a target gas flow rate range;

selecting a test volume within the gas flow rate verification device, wherein the selected test volume is either a small volume or a large volume, the test volume selection being based on the identified target gas flow rate range;

selecting a pressure measurement device within the gas flow rate verification device, wherein the selected pressure measurement device is either a lower pressure measurement device or a higher pressure measurement device, the selected pressure measurement device being based on the identified target gas flow rate range;

evacuating the test volume;

exposing the test volume to a gas flow rate to be measured;

measuring a pressure rate of rise within the test volume;

measuring a temperature within the test volume;

determining the gas flow rate into the test volume using the measured pressure rate of rise and temperature within the test volume; and

outputting, displaying, storing, or otherwise conveying the determined gas flow rate.

10. The method of claim 9, further comprising:

maintaining a temperature of the test volume and structure defining the test volume to be greater than a condensation temperature of the gas to which the test volume is exposed.

11. The method of claim 9, wherein measuring the pressure rate of rise within the test volume is performed within a time period extending from about 5 seconds to about 60 seconds.

12. The method of claim 9, further comprising:

determining a leak flow rate from the test volume; and

using the leak flow rate to correct the determined gas flow rate into, the test volume.

13. The method of claim 9, wherein the small volume and lower pressure measurement device are selected for the identified target gas flow rate range extending from about 0.5 standard cubic centimeter(s) per minute (sccm) to about 5 sccm, the large volume and lower pressure measurement device being selected for the identified target gas flow rate range extending from about 5 sccm to about 50 sccm, the small volume and higher pressure measurement device being selected for the identified target gas flow rate range extending from about 50 sccm to about 500 sccm, the large volume and higher pressure measurement device being selected for the identified target gas flow rate range extending from about 500 sccm to about 5000 sccm.