Method, program product and apparatus for generating assist features utilizing an image field map
First Claim
1. A method of generating assist features for a pattern to be formed on a surface of a substrate, the steps comprising:
- (a) generating an image field map corresponding to the pattern;
(b) extracting characteristics of a contour at a predetermined threshold of the image field map; and
(c) determining a dominant axis of the contour;
(d) generating at least one assist feature for the pattern in accordance with the characteristics extracted in step (b);
(e) orienting an assist feature in accordance with the dominant axis.
2 Assignments
0 Petitions
Accused Products
Abstract
Disclosed concepts include a method, program product and apparatus for generating assist features for a pattern to be formed on the surface of a substrate by generating an image field map corresponding to the pattern. Characteristics are extracted from the image field map, and assist features are generated for the pattern in accordance with the characteristics extracted in step. The assist features may be oriented relative to a dominant axis of a contour of the image field map. Also, the assist features may be polygon-shaped and sized to surround the contour or relative to the inside of the contour. Moreover, the assist features may be placed in accordance with extrema identified from the image field map. Utilizing the image field map, a conventional and complex two-dimensional rules-based approach for generating assist feature can be obviated.
-
Citations
16 Claims
-
1. A method of generating assist features for a pattern to be formed on a surface of a substrate, the steps comprising:
-
(a) generating an image field map corresponding to the pattern; (b) extracting characteristics of a contour at a predetermined threshold of the image field map; and (c) determining a dominant axis of the contour; (d) generating at least one assist feature for the pattern in accordance with the characteristics extracted in step (b); (e) orienting an assist feature in accordance with the dominant axis. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
-
-
9. A computer program product, comprising executable code stored in at least one machine readable memory, wherein execution of the code by at least one programmable computer causes the at least one programmable computer to perform a sequence of steps for generating assist features for a pattern to be formed on a surface of a substrate, the steps comprising:
-
(a) generating an image field map corresponding to the pattern; (b) extracting characteristics of a contour at a predetermined threshold of the image field map; and (c) determining a dominant axis of the contour; (d) generating at least one assist feature for the pattern in accordance with the characteristics extracted in step (b); (e) orienting an assist feature in accordance with the dominant axis. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
-
Specification