Hydrogen vent for optoelectronic packages with resistive thermal device (RTD)
First Claim
Patent Images
1. An apparatus, comprising:
- a resistive thermal device (RTD) sensitive to hydrogen;
a material to out gas trapped hydrogen;
a sealed enclosure housing the RTD and the material, the RTD comprising a platinum layer and one of a chromium and titanium adhesion layer;
an inert gas atmosphere within the sealed enclosure;
an opening in the sealed enclosure to form a vent; and
a hydrogen selective permeable membrane covering the vent to vent out gassed hydrogen from the sealed enclosure.
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Abstract
Thermally tuned lasers may use a resistive thermal device (RTD), sensitive to hydrogen, within a hermetic enclosure. Over time, hydrogen trapped within the enclosure or out gassed from other components within the enclosure may degrade the accuracy of the RTD. A vent comprising a hydrogen selective permeable membrane, such as palladium or a palladium alloy, provided in the enclosure vents hydrogen to mitigate damage to the RTD.
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Citations
14 Claims
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1. An apparatus, comprising:
- a resistive thermal device (RTD) sensitive to hydrogen;
a material to out gas trapped hydrogen; a sealed enclosure housing the RTD and the material, the RTD comprising a platinum layer and one of a chromium and titanium adhesion layer; an inert gas atmosphere within the sealed enclosure; an opening in the sealed enclosure to form a vent; and a hydrogen selective permeable membrane covering the vent to vent out gassed hydrogen from the sealed enclosure. - View Dependent Claims (2, 3, 4, 5, 6)
- a resistive thermal device (RTD) sensitive to hydrogen;
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7. A method, comprising:
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sealing a resistive thermal device (RTD) sensitive to hydrogen in an enclosure, the RTD comprising a platinum layer and one of a chromium and titanium adhesion layer; sealing a material out gassing trapped hydrogen in the enclosure; filling the enclosure with an inert gas atmosphere; providing a vent in the enclosure;
covering the vent with a hydrogen selective permeable membrane; anddiffusing out gassed hydrogen through the permeable membrane. - View Dependent Claims (8, 9)
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10. An optical system comprising:
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a hermetic package comprising an interior; a temperature tuned laser within the interior; a resistive thermal device (RTD) sensitive to hydrogen within the interior to measure temperature, the RTD comprising a platinum layer and one of a titanium and a chromium adhesion layer; at least one material to outgas trapped hydrogen within the interior; and a vent in the hermetic package comprising a hydrogen selective membrane to diffuse the outgas trapped hydrogen from the interior to an exterior of the hermetic package. - View Dependent Claims (11, 12, 13, 14)
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Specification