High selectivity BPSG to TEOS etchant

• US 7,378,353 B2
• Filed: 12/29/2005
• Issued: 05/27/2008
• Est. Priority Date: 04/07/1998
• Status: Expired due to Fees

• Current Assignee: Round Rock Research LLC
• Original Assignee: Micron Technology, Inc.
• Inventors: Torek, Kevin J., Lee, Whonchee
• Primary Examiner(s): Vinh; Lan
• Application Number:
  US11/321,111
• Publication Number:
  US 20060102586A1
• Time in Patent Office: 880 Days
• Field of Search: 438/745, 438/750, 438/752, 252/79.1
• US Class Current: 438/745
• CPC Class Codes: C03C 15/00 Surface treatment of glass, not in the form of fibres or filaments, by etching etching or surface-brightening compositions, in general C09K13/00
• CPC Class Codes: H01L 21/31111 by chemical means

Abstract

An organic acid/fluoride-containing solution etchant having high selectivity for BPSG to TEOS. In an exemplary situation, a TEOS layer may be used to prevent contamination of other components in a semiconductor device by the boron and phosphorous in a layer of BPSG deposited over the TEOS layer. The etchant of the present invention may be used to etch desired areas in the BPSG layer, wherein the high selectivity for BPSG to TEOS of etchant would result in the TEOS layer acting as an etch stop. A second etch with a known etchant may be utilized to etch the TEOS layer. The known etchant for the second etch can be less aggressive and, thus, not damage the components underlying the TEOS layer.

Claims

1. A method of forming an opening in a borophosphosilicate glass layer on a semiconductor device, the method comprising:

providing a layer of borophosphosilicate glass over a layer of tetraethyl orthosilicate;

masking a pattern on the borophosphosilicare glass layer; and

etching the borophosphosilicate glass layer through an opening in the pattern with an etchant comprising a fluoride-containing solution and an organic acid selected from the group consisting of oxalic acid and formic acid to form a via including substantially vertical sidewalls from a lowermost portion of the via to an upper most portion of the via in the borophospliosilicate glass layer and to expose the underlying tetraethyl orthosilicate.

2. The method of claim 1, wherein the fluoride-containing solution is selected from the group consisting of hydrofluoric acid and ammonium fluoride.

3. The method of claim 1, wherein the organic acid comprises formic acid and the fluoride-containing solution comprises 49% hydrofluoric acid by weight in water.

4. The method of claim 1, wherein the formic acid is in a volumetric ratio with the hydrofluoric acid from between about 1:

1 to 500;

1.

5. The method of claim 2, wherein the formic acid is in a volumetric ratio with the hydrofluoric acid at about 10:

1 to about 100;

1.

6. The method of claim 1, wherein the organic acid comprises formic acid and the fluoride-containing solution comprises 40% ammonium fluoride acid by weight in water.

7. The method of claim 1, wherein the etchant includes a selectivity ratio of borophosphosilicate glass to tetraethyl orthosilicate between about 27:

1 and 55;

1.

8. A method of selectively etching a borophosphosilicate glass layer on a semiconductor device, the method comprising:

providing a semiconductor substrate having a layer of tetraethyl orthosilicate and an overlying layer of borophosphosilicate glass; and

contacting the borophosphosilicate glass layer with a solution comprising a fluoride-containing solution and an organic acid selected from the group consisting of oxalic acid and formic acid to form a via including substantially vertical sidewalls from a lowermost portion of the via to an upper most portion of the via in the borophosphosilicate glass layer and to expose the underlying tetraethyl orthosilicare.

9. The method of claim 8, wherein the organic acid comprises oxalic acid and the fluoride-containing solution comprises 40% ammonium fluoride acid by weight in water.

10. The method of claim 8, wherein the solution includes a selectivity ratio of borophosphosilicate glass to tetraethyl orthosilicate between about 27:

1 and 55;

1.

11. The method of claim 8, wherein the organic acid comprises oxalic acid and the fluoride-containing solution comprises 49% hydrofluoric acid by weight in water.

12. The method of claim 11, wherein the oxalic acid is in a volumetric ratio with the hydrofluoric acid from between about 1:

1 to 500;

1.

13. The method of claim 12, wherein the oxalic acid is in a volumetric ratio with the hydrofluoric acid at about 10:

1 to about 100;

1.