Method for detecting defects
First Claim
Patent Images
1. A method for inspecting a substrate for defects, comprising:
- obtaining an inspected pixel and a reference pixel;
calculating an inspected value and a reference value, the inspected value representative of the inspected pixel and the reference value representative of the reference pixel;
selecting exactly one of the inspected value and the reference value as a selected value based on a comparison of the inspected value and the reference value;
selecting a threshold in response to the selected value; and
determining a relationship between the selected threshold, the reference value and the inspected value to indicate a presence of a defect.
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Abstract
A method for inspecting a substrate for defects, including: (a) obtaining an inspected pixel and a reference pixel; (b) calculating an inspected value and a reference value, the inspected value representative of the inspected pixel and the reference value representative of the reference pixel; (c) selecting a threshold in response to a selected value out of the inspected value and the reference value; and (d) determining a relationship between the selected threshold, the reference value and the inspected value to indicate a presence of a defect.
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Citations
82 Claims
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1. A method for inspecting a substrate for defects, comprising:
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obtaining an inspected pixel and a reference pixel; calculating an inspected value and a reference value, the inspected value representative of the inspected pixel and the reference value representative of the reference pixel; selecting exactly one of the inspected value and the reference value as a selected value based on a comparison of the inspected value and the reference value; selecting a threshold in response to the selected value; and determining a relationship between the selected threshold, the reference value and the inspected value to indicate a presence of a defect. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31)
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32. A method for inspecting a substrate for defects, comprising:
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illuminating the substrate; obtaining an inspected pixel; calculating an inspected value representative of the inspected pixel; determining whether to obtain a reference pixel from a same die of the inspected pixel or from a reference pixel from another die; obtaining a reference pixel in response to the determination; calculating an inspected value representative of the inspected pixel; selecting exactly one of the inspected value and the reference value as a selected value based on a comparison of the inspected value and the reference value; selecting a threshold in response to the selected value; and comparing the selected threshold to a difference between the reference value and the inspected value to determine the presence of a defect. - View Dependent Claims (33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53)
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54. A method for inspecting a substrate for defects, comprising:
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obtaining an inspected pixel, inspected neighboring pixels and a reference pixel; calculating an inspected value, a second inspected value and a reference value, the second inspected value representative of the inspected pixel alone, the reference value representative of the reference pixel and neighboring reference pixels and the inspected value representative of the inspected pixel and inspected neighboring pixels; selecting exactly one of the inspected value and the reference value as a selected value based on a comparison of the inspected value and the reference value; selecting a first threshold and a second threshold in response to the selected value; determining a first relationship between the selected first threshold, the inspected value and the second inspected value, determining a second relationship between the selected second threshold, the inspected value and the reference value; and indicating a presence of a defect in response to at least one of the first relationship and the second relationship. - View Dependent Claims (55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82)
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Specification