Composition and method for removing photoresist materials from electronic components
First Claim
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1. A method for pulsing fluids comprising:
- forming a treating fluid mixture under pressure;
positioning a substrate to be treated in a processing vessel, the substrate having a material adhered to the substrate;
sending treating fluid mixture into the processing vessel;
releasing a first pulse of the fluid out of the processing vessel;
sending treating fluid mixture into the processing vessel again; and
releasing a second pulse of the fluid out of the processing vessel, whereby the releasing of the pulses of fluid results in removing adhered material from the substrate.
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Abstract
Composition and method for removing photoresist materials from electronic components. The composition is a mixture of at least one dense phase fluid and at least one dense phase fluid modifier. The method includes exposing a substrate to at least one pulse of the composition in a supercritical state to remove photoresist materials from the substrate.
5 Citations
12 Claims
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1. A method for pulsing fluids comprising:
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forming a treating fluid mixture under pressure; positioning a substrate to be treated in a processing vessel, the substrate having a material adhered to the substrate; sending treating fluid mixture into the processing vessel; releasing a first pulse of the fluid out of the processing vessel; sending treating fluid mixture into the processing vessel again; and releasing a second pulse of the fluid out of the processing vessel, whereby the releasing of the pulses of fluid results in removing adhered material from the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification