Microsensor system and method for measuring data
First Claim
Patent Images
1. A microsensor system, comprising:
- an actuator;
a microprobe proximate the actuator, wherein the microprobe comprises;
a housing having an aperture;
an ISFET attached to the housing, wherein the ISFET has a gate located proximate the aperture; and
a reference electrode attached to the housing proximate the aperture; and
a cantilever arm attached to the actuator and the microprobe.
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Abstract
One embodiment is a microprobe. An example of the microprobe comprises a housing having an aperture. This example of the microprobe also comprises an ISFET attached to the housing. The ISFET may have a gate located proximate the aperture. This example of the microprobe further comprises a reference electrode attached to the housing proximate the aperture. Another embodiment is a microsensor system. Another embodiment is a method for measuring a characteristic of tissue. Yet another condition embodiment is a method for monitoring tissue pH.
89 Citations
12 Claims
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1. A microsensor system, comprising:
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an actuator; a microprobe proximate the actuator, wherein the microprobe comprises; a housing having an aperture; an ISFET attached to the housing, wherein the ISFET has a gate located proximate the aperture; and a reference electrode attached to the housing proximate the aperture; and a cantilever arm attached to the actuator and the microprobe. - View Dependent Claims (2, 3, 4, 5)
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6. A microprobe comprising:
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a housing having an aperture; an ion sensitive field effect transistor (ISFET) attached to the housing, wherein the ISFET has a gate located proximate the aperture; a reference electrode attached to the housing proximate the aperture, wherein the housing is a hermetically sealed encapsulant that encapsulates the microprobe and exposes at least a portion of the gate and at least a portion of the reference electrode within the aperture, and wherein the ISFET is configured to operate as a pH sensor; and a second ISFET, wherein the second ISFET is configured to operate as a blood gas sensor, and wherein the second ISFET has a gate located in communication with the aperture.
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7. A microprobe, comprising:
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a substrate; an ion sensitive field effect transistor (ISFET) monolithically integrated to the substrate, wherein the ISFET comprises a gate, and wherein the ISFET is configured to operate as a pH sensor; a reference electrode monolithically integrated to the substrate; a second ISFET, monolithically integrated to the substrate, wherein the second ISFET comprises a second gate, and wherein the second ISFET is configured to operate as a blood gas sensor; associated circuitry comprising a temperature sensing diode, wherein the associated circuitry is monolithically integrated with the substrate; and a housing having an aperture, wherein the housing hermetically encapsulates the substrate, the ISFET, the second ISFET, the reference electrode, and the associated circuitry, and wherein at least a portion of the gate, the second gate, and the reference electrode are located within the aperture. - View Dependent Claims (8, 9, 10, 11, 12)
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Specification