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Microsensor system and method for measuring data

  • US 7,383,071 B1
  • Filed: 01/20/2004
  • Issued: 06/03/2008
  • Est. Priority Date: 04/25/2003
  • Status: Expired due to Fees
First Claim
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1. A microsensor system, comprising:

  • an actuator;

    a microprobe proximate the actuator, wherein the microprobe comprises;

    a housing having an aperture;

    an ISFET attached to the housing, wherein the ISFET has a gate located proximate the aperture; and

    a reference electrode attached to the housing proximate the aperture; and

    a cantilever arm attached to the actuator and the microprobe.

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