Method and apparatus for processing wafer surfaces using thin, high velocity fluid layer

• US 7,383,843 B2
• Filed: 06/30/2004
• Issued: 06/10/2008
• Est. Priority Date: 09/30/2002
• Status: Active Grant

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Korolik, Mikhail, de Larios, John M., Smith, Michael G. R., Redeker, Fritz, Ravkin, Michael, DiPietro, Christian
• Primary Examiner(s): Perrin; Joseph L.
• Application Number:
  US10/882,835
• Publication Number:
  US 20050145265A1
• Time in Patent Office: 1,441 Days
• Field of Search: 134/95.1, 134/95.2, 134/99.1, 134/102.3, 134/167.R, 134/198, 134/902, 344/07
• US Class Current: 134/95.2
• CPC Class Codes: C25D 17/00 Constructional parts, or assemblies thereof, of cells for electrolytic coating
• CPC Class Codes: C25D 17/001 Apparatus specially adapted for electrolytic coating of wafers, e.g. semiconductors or solar cells
• CPC Class Codes: C25D 5/08 Electroplating with moving electrolyte e.g. jet electroplating using locally applied jets of electrolyte C25D5/026
• CPC Class Codes: H01L 21/67023 for general liquid treatment, e.g. etching followed by cleaning
• CPC Class Codes: H01L 21/67028 for cleaning followed by drying, rinsing, stripping, blasting or the like
• CPC Class Codes: H01L 21/67034 for drying
• CPC Class Codes: H01L 21/6704 for wet cleaning or washing
• CPC Class Codes: H01L 21/67051 using mainly spraying means, e.g. nozzles
• CPC Class Codes: H01L 21/67063 for etching
• CPC Class Codes: Y10S 134/902 Semiconductor wafer

Abstract

Among the many embodiment, in one embodiment, a method for processing a substrate is disclosed which includes generating a fluid layer on a surface of the substrate, the fluid layer defining a fluid meniscus. The generating includes moving a head in proximity to the surface, applying a fluid from the head to the surface while the head is in proximity to the surface of the substrate to define the fluid layer, and removing the fluid from the surface through the proximity head by a vacuum. The fluid travels along the fluid layer between the head and the substrate at a velocity that increases as the head is in closer proximity to the surface.

Claims

1. An apparatus for processing a substrate, comprising:

a head capable of moving in proximity to a surface of the substrate and generating a fluid layer on the surface of the substrate to define a fluid meniscus, the proximity head including,

a head surface having flat surface regions;

at least one inlet defined in the head surface for applying a fluid to the surface of the substrate to define the fluid layer,

at least one outlet defined in the head surface for removing the fluid from the surface of the substrate;

wherein the head is defined to move the fluid along the fluid layer between the head surface and the substrate at a velocity that increases as the head is in closer proximity to the surface, and the head surface is defined so that the at least one inlet and at least one outlet are defined by discrete holes that reside at the head surface and extend through the flat surface regions of the head surface.

2. An apparatus for processing a substrate as recited in claim 1, wherein the head is configured to move to between about 5 microns and about 500 microns in distance from the surface in operation.

3. An apparatus for processing a substrate as recited in claim 1, wherein head is capable of applying the fluid to the surface at a flow rate of between about 50 ml/sec to about 4000 ml/sec.

4. An apparatus for processing a substrate as recited in claim 1, wherein the fluid meniscus conducts one of an etching operation, cleaning operation, plating operation, and a drying operation.

5. An apparatus for processing a substrate as recited in claim 1, wherein the outlet applies vacuum to remove the fluid from the surface.

6. An apparatus for processing a substrate as recited in claim 1, wherein the head is capable of moving the fluid along the surface of the substrate from the inlet to the outlet with a velocity of between 10 cm/sec and 100 cm/sec.

7. An apparatus for processing a substrate as recited in claim 1, wherein the fluid layer includes one of an etching fluid, a plating fluid, a cleaning fluid, and a rinsing fluid.

8. An apparatus for processing a substrate as recited in claim 1, further comprising,

an additional inlet capable of applying a surface tension reducing fluid to a border of the fluid meniscus.

9. An apparatus for processing a substrate as recited in claim 1, wherein the surface tension reducing fluid is an isopropyl alcohol vapor in nitrogen gas.

10. A substrate preparation system, comprising:

a head having a head surface with flat surface regions, the head capable of being moved in proximity to a substrate surface when in operation;

a first conduit defined at the head surface for delivering a fluid to the substrate surface through the head; and

a second conduit defined at the head surface for removing the fluid from the substrate surface, the fluid forming a fluid layer over the substrate surface in operation;

wherein the fluid travels along the fluid layer between the head surface and the substrate surface at a velocity that increases as the head is in closer proximity to the substrate surface and the head surface is such that the first conduit and second conduit are defined by discrete holes that reside at the head surface and extend through the flat surface regions of the head surface.

11. A substrate preparation system as recited in claim 10, wherein the head is configured to move to between about 5 microns and about 500 microns in distance from the substrate surface in operation.

12. A substrate preparation system as recited in claim 10, wherein the head is capable of applying the fluid at a flow rate of between about 10 cm/sec to about 100 cm/sec.

13. A substrate preparation system as recited in claim 10, wherein the fluid layer conducts one of an etching operation, cleaning operation, plating operation, and a drying operation.

14. A substrate preparation system as recited in claim 10, wherein the second conduit applies vacuum to remove the fluid from the substrate surface.

15. A substrate preparation system as recited in claim 10, wherein the fluid is one of an etching fluid, a plating fluid, a cleaning fluid, and a rinsing fluid.

16. A substrate preparation system as recited in claim 10, further comprising,

an additional inlet capable of applying a surface tension reducing fluid to the substrate surface.

17. A substrate preparation system as recited in claim 16, wherein the surface tension reducing fluid is an isopropyl alcohol vapor in nitrogen gas.