Integrated magnetic sensor component

• US 7,385,394 B2
• Filed: 06/15/2006
• Issued: 06/10/2008
• Est. Priority Date: 06/15/2005
• Status: Active Grant

• Current Assignee: Infineon Technologies AG
• Original Assignee: Infineon Technologies AG
• Inventors: Schindler, Uwe, Gottlieb, Alfred, Theuss, Horst, Petz, Martin, Dangelmaier, Jochen, Auburger, Albert
• Primary Examiner(s): LEDYNH, BOT L
• Application Number:
  US11/453,365
• Publication Number:
  US 20070145972A1
• Time in Patent Office: 726 Days
• Field of Search: 324173-174, 324/244, 324/260, 324/207.25, 324/252, 324/249, 361/723, 361/813
• US Class Current: 324/252
• CPC Class Codes: G01P 15/105 by magnetically sensitive devices
• CPC Class Codes: G01P 3/488 delivered by variable reluctance detectors
• CPC Class Codes: G01R 33/06 using galvano-magnetic devices

Abstract

A sensor component used to measure a magnetic field strength is disclosed. In one embodiment, the sensor component contains a plurality of leads and a sensor semiconductor chip, which measures the magnetic field strength. The sensor semiconductor chip has pads on its active upper side. These pads are connected electrically to the leads. The sensor component also contains a magnet, which is attached to the leads. The sensor semiconductor chip is arranged on an upper side of the magnet. The sensor component also has a first mold compound which shares a common boundary with the sensor semiconductor chip and surrounds the sensor semiconductor chip, the magnet and parts of the lead.

Claims

1. A sensor component for measuring a magnetic field strength, wherein the sensor component comprises:

a plurality of leads;

a sensor semiconductor chip configured to measure the magnetic field strength, wherein the sensor semiconductor chip has pads on its active upper side and the pads are electrically connected to the leads;

a magnet attached to the leads, wherein the sensor semiconductor chip is arranged on an upper side of the magnet; and

first mold compound, which shares a common boundary with the sensor semiconductor chip, and surrounds the sensor semiconductor chip, the magnet and parts of the lead wherein a soft magnetic homogenizing plate is fitted between the sensor semiconductor chip and the magnet.

2. The sensor component as claimed in claim 1, wherein the magnet is a permanent magnet.

3. The sensor component as claimed in claim 2, wherein the magnet consists of an alloy.

4. The sensor component as claimed in claim 2, wherein the magnet consists of a hard ferrite.

5. The sensor component as claimed in claim 1, wherein the active upper side of the sensor semiconductor chip is directed toward the magnet and the pads are electrically connected to the leads by flip-chip contacts.

6. The sensor component as claimed in claim 1, wherein the sensor semiconductor chip is aligned so that it points toward the magnet on the side opposite the active upper side, and wherein the pads of the sensor semiconductor chip are electrically connected to the leads by bond wires.

7. The sensor component as claimed in claim 1, which has further passive components, including capacitors, wherein the further passive components are also enclosed by the first mold compound.

8. The sensor component as claimed in claim 1, wherein the leads are bent so that they project centrally from the sensor component.

9. The sensor component as claimed in claim 1, wherein the leads are bent so that in their upper region they run on the upper side of the magnet on which the sensor semiconductor chip is fitted.

10. The sensor component as claimed in claim 1, wherein the magnet is glued to the leads.

11. The sensor component as claimed in claim 1, wherein the first mold compound consist of a thermoset.

14. The sensor component as claimed in claim 1, wherein the sensor is a rotation rate sensor.

12. A sensor component for measuring a magnetic field strength wherein the sensor component comprises:

a plurality of leads;

a sensor semiconductor chip configured to measure the magnetic field strength wherein the sensor semiconductor chip has pads on its active upper side and the pads are electrically connected to the leads;

a magnet attached to the leads, wherein the sensor semiconductor chip is arranged on an upper side of the magnet; and

first mold compound, which shares a common boundary with the sensor semiconductor chip, and surrounds the sensor semiconductor chip, the magnet and parts of the lead, wherein the first mold compound is surrounded by a further mold compound consisting of a thermoplastic.

13. A sensor component for measuring a magnetic field strength, wherein the sensor component comprises:

a plurality of leads;

a sensor semiconductor chip configured to measure the magnetic field strength, wherein the sensor semiconductor chip has pads on its active upper side and the pads are electrically connected to the leads;

a magnet attached to the leads, wherein the sensor semiconductor chip is arranged on an upper side of the magnet; and

first mold compound, which shares a common boundary with the sensor semiconductor chip, and surrounds the sensor semiconductor chip, the magnet and parts of the lead, wherein the leads are connected electrically to a cable and the connection points between the leads and the cable are surrounded by the first mold compound.

15. A method for manufacturing a sensor component for measuring a magnetic field strength, comprising:

providing of a plurality of leads;

providing of a magnet;

providing of a sensor semiconductor chip configured to measure the magnetic field strength, wherein the sensor semiconductor chip has pads on its active upper side;

securing the magnet to the leads;

arranging the sensor semiconductor chip on an upper side of the magnet;

electrical connection of the pads of the sensor semiconductor chip to the leads; and

enclosing the magnet, the sensor semiconductor chip and parts of the leads with a first mold compound so that the first mold compound shares a common boundary with the sensor semiconductor chip, wherein the sensor component is sprayed, with a further mold compound consisting of a thermoplastic.

16. The method as claimed in claim 15, wherein the leads are supplied as part of a lead frame.

17. The method as claimed in claim 15, wherein the active upper side of the sensor semiconductor chip is aligned to the magnet, and the pads are connected electrically to the leads by flip-chip contacts.

18. The method as claimed in claim 15, wherein the sensor semiconductor chip is aligned so that it points toward the magnet on the side opposite the active upper side, and the pads are connected electrically to the leads by bond wires.

19. The method as claimed in claim 15, wherein further electrical components are supplied which are also enclosed by the first mold compound.

20. A method for manufucturing a sensor component for measuring a magnetic field strength, comprising:

providing of a plurality of leads;

providing of a magnet;

providing of a sensor semiconductor chip configured to measure the magnetic field strength, wherein the sensor semiconductor chip has pads on its active upper side;

securing the magnet to the leads;

arranging the sensor semiconductor chip on an upper side of the magnet;

electrical connection of the pads of the sensor semiconductor chip to the leads; and

enclosing the magnet, the sensor semiconductor chip and parts of the leads with a first mold compound so that the first mold compound shares a common boundary with the sensor semiconductor chip, wherein a soft magnetic honmogenizing plate is fitted between the sensor semiconductor chip and the magnet, and the soft magnetic homogenizing plate is also enclosed by the first mold compound.

21. The method as claimed in claim 20, wherein a cable is connected to the leads, and this cable is accessible from the outside.