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Support structure for free-standing MEMS device and methods for forming the same

  • US 7,385,744 B2
  • Filed: 06/28/2006
  • Issued: 06/10/2008
  • Est. Priority Date: 06/28/2006
  • Status: Expired due to Fees
First Claim
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1. A microelectromechanical (MEMS) device comprising:

  • a functional layer comprising a first material; and

    a deformable layer comprising a second material different from the first material, the deformable layer mechanically coupled to the functional layer at a junction, wherein the functional layer and the deformable layer have substantially equal internal stresses at the junction.

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