Elevated temperature pressure sensor

• US 7,387,028 B1
• Filed: 04/21/2006
• Issued: 06/17/2008
• Est. Priority Date: 11/30/2000
• Status: Expired due to Fees

• Current Assignee: Orbital Research, Inc.
• Original Assignee: Orbital Research, Inc.
• Inventors: Lisy, Frederick J., Prince, Troy, Carver, Reed, Snyder, Joseph
• Primary Examiner(s): Allen; Andre J.
• Assistant Examiner(s): JENKINS, JERMAINE L
• Application Number:
  US11/408,694
• Time in Patent Office: 788 Days
• Field of Search: 73700-756, 3612831-2834
• US Class Current: 73/715
• CPC Class Codes: F02C 9/28 Regulating systems responsive to plant or ambient parameters, e.g. temperature, pressure, rotor speed F02C9/30 - F02C9/38, F02C9/44 take precedence
• CPC Class Codes: F02D 41/3005 Details not otherwise provided for
• CPC Class Codes: F23N 5/022 using electronic means F23N5/04 - F23N5/14 take precedence
• CPC Class Codes: G01B 5/30 for measuring the deformation in a solid, e.g. mechanical strain gauge
• CPC Class Codes: G01L 1/005 by electrical means and not provided for in G01L1/06 - G01L1/22

Abstract

The present invention relates, in general, to pressure sensors capable of operating at high temperatures. The present invention further relates to a high temperature pressure sensor with an improved gage factor. The present invention still further provides a pressure sensor with a smaller sized diaphragm, which is capable of reading higher pressures. The present invention also provides a method and sensor for detecting strain using shape memory alloys.

Claims

1. A pressure sensor comprising

a substrate with an opening;

and

a flexible diaphragm held across the opening of the substrate

wherein at temperatures of at least about 400°

C., the pressure sensor has a gage factor of at least about 22.

2. The pressure sensor in claim 1, wherein the pressure sensor has a gage factor of at least about 30.

3. The pressure sensor in claim 1, wherein the pressure sensor has a gage factor of at least about 35.

4. The pressure sensor in claim 1, wherein at temperatures of at least about 550°

C., the pressure sensor has a gage factor of at least about 16.

5. The pressure sensor in claim 4, wherein the pressure sensor has a gage factor of at least about 25.

6. The pressure sensor in claim 4, wherein the pressure sensor has a gage factor of at least about 35.

7. The pressure sensor in claim 1, wherein the opening of the substrate has a maximum cross-sectional dimension of less than about 1.0 mm and the pressure sensor is capable of measuring pressures of greater than about 1000 psi without premature failure.

8. The pressure sensor in claim 7, wherein the pressure sensor is capable of measuring pressures less than about 300 psi.

9. A pressure sensor comprising

a substrate with an opening;

and

a flexible diaphragm held across the opening of the substrate

wherein at temperatures of at least about 200°

C., the pressure sensor has a gage factor of at least about 27.

10. The pressure sensor in claim 9, wherein at temperatures of at least about 200°

C., the pressure sensor has a gage factor of at least about 32.

11. The pressure sensor in claim 9, wherein at temperatures of at least about 200°

C., the pressure sensor has a gage factor of at least about 37.

12. The pressure sensor in claim 9, wherein at temperatures of at least about 550°

C., the pressure sensor has a gage factor of at least about 35.

13. The pressure sensor in claim 9, wherein at temperatures of at least about 400°

C., the pressure sensor has a gage factor of at least about 22.

14. The pressure sensor in claim 13, wherein at temperatures of at least about 400°

C., the pressure sensor has a gage factor of at least about 30.

15. The pressure sensor in claim 9, wherein the opening of the substrate has a maximum cross-sectional dimension of less than about 1.0 mm and the pressure sensor is capable of measuring pressures of greater than about 1000 psi without premature failure.

16. The pressure sensor in claim 15, wherein the pressure sensor is capable of measuring pressures less than about 300 psi.

17. A pressure sensor comprising

a substrate with an opening;

and

a flexible diaphragm held across the opening of the substrate

wherein at temperatures of at least about 500°

C., the pressure sensor has a gage factor of at least about 20.

18. The pressure sensor in claim 17, wherein the pressure sensor has a gage factor of at least about 30.

19. The pressure sensor in claim 17, wherein the pressure sensor has a gage factor of at least about 35.

20. The pressure sensor in claim 17, wherein the opening of the substrate has a maximum cross-sectional dimension of less than about 1.0 mm and the pressure sensor is capable of measuring pressures of greater than about 1000 psi without premature failure.