×

Methods of preparation of hollow microstructures and nanostructures

  • US 7,387,813 B2
  • Filed: 07/07/2005
  • Issued: 06/17/2008
  • Est. Priority Date: 07/07/2005
  • Status: Active Grant
First Claim
Patent Images

1. A method of preparing a spherically-shaped body having a parylene shell comprising acts of:

  • providing a spherically-shaped scaffolding material having an outer diameter of less than about 100 μ

    m;

    depositing a parylene precursor material on a surface of the spherically-shaped scaffolding material;

    polymerizing the parylene precursor material to produce the parylene shell; and

    removing the spherically-shaped scaffolding material resulting in a cavity defined by the parylene shell.

View all claims
  • 3 Assignments
Timeline View
Assignment View
    ×
    ×