Hermetically sealed package for optical, electronic, opto-electronic and other devices
First Claim
Patent Images
1. A hermetically sealed package comprising:
- one or more devices on a semiconductor substrate;
a lid attached to the semiconductor substrate to encapsulate the one or more devices such that the one or more devices are hermetically sealed within an area defined by the substrate and the lid;
wherein the lid includes;
a region containing a substance;
a wall separating the region containing the substance from the one or more devices, wherein the wall has an opening through which the substance can pass to the one or more devices.
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Abstract
Techniques are disclosed for hermetically sealing one or more devices within a package. According to one aspect, a lid is attached to a substrate on which one or more devices are provided such that the devices are encapsulated within an area defined by the substrate and the lid. A substance, such as a lubricant or gas, is introduced via one or more through-holes in the lid to a region that is separated from the devices by a wall having at least one opening through which the substance can pass to the devices. The through-hole then may be hermetically sealed, for example, using a local heating process that does not degrade the lubricant or other substance.
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Citations
20 Claims
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1. A hermetically sealed package comprising:
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one or more devices on a semiconductor substrate; a lid attached to the semiconductor substrate to encapsulate the one or more devices such that the one or more devices are hermetically sealed within an area defined by the substrate and the lid; wherein the lid includes; a region containing a substance; a wall separating the region containing the substance from the one or more devices, wherein the wall has an opening through which the substance can pass to the one or more devices. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A hermetically sealed package comprising:
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one or more devices on a substrate; a lid attached to the substrate to encapsulate the one or more devices such that the one or more devices are hermetically sealed within an area defined by the substrate and the lid; wherein the lid is transparent to optical signals with which the one or more devices are arranged to interact during their operation and wherein the lid includes; a region containing a substance; a wall separating the region containing the substance from the one or more devices, wherein the wall has an opening through which the substance can pass to the one or more devices. - View Dependent Claims (18, 19, 20)
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Specification