Acoustic resonator performance enhancement using alternating frame structure

• US 7,388,454 B2
• Filed: 06/23/2005
• Issued: 06/17/2008
• Est. Priority Date: 10/01/2004
• Status: Active Grant

• Current Assignee: Avago Technologies International Sales Pte Limited (Broadcom, Inc.)
• Original Assignee: Avago Technologies Wireless IP Singapore Pte Limited (Broadcom, Inc.)
• Inventors: Ruby, Richard C., Bradley, Paul D., Feng, Hongjun, Fazzio, Ronald S.
• Primary Examiner(s): Summons; Barbara
• Application Number:
  US11/159,753
• Publication Number:
  US 20060071736A1
• Time in Patent Office: 1,090 Days
• Field of Search: 333187-189, 310/335, 29/253.5
• US Class Current: 333/187
• CPC Class Codes: H03H 2003/0428 of an electrode
• CPC Class Codes: H03H 3/02 for the manufacture of piezoelectric or electrostrictive resonators or networks H03H3/08 takes precedence
• CPC Class Codes: H03H 9/02086 Means for compensation or elimination of undesirable effects
• CPC Class Codes: H03H 9/02149 of ageing changes of characteristics, e.g. electro-acousto-migration
• CPC Class Codes: H03H 9/13 for networks consisting of piezoelectric or electrostrictive materials H03H9/145 takes precedence
• CPC Class Codes: H03H 9/132 characterized by a particular shape
• CPC Class Codes: H03H 9/173 Air-gaps

Abstract

Disclosed is an acoustic resonator that includes a substrate, a first electrode, a layer of piezoelectric material, a second electrode, and an alternating frame region. The first electrode is adjacent the substrate, and the first electrode has an outer perimeter. The piezoelectric layer is adjacent the first electrode. The second electrode is adjacent the piezoelectric layer and the second electrode has an outer perimeter. The alternating frame region is on one of the first and second electrodes.

Claims

1. An acoustic resonator comprising:

a first electrode;

a layer of piezoelectric material adjacent the first electrode;

a second electrode adjacent the layer of piezoelectric material, the second electrode having an outer perimeter; and

an alternating frame region configured on the second electrode adjacent the outer perimeter;

wherein the alternating frame region further comprises a first region having a first acoustic impedance and a second region having a second acoustic impedance, the first and second acoustic impedances being different such that certain wavelengths of signals within the acoustic resonator reflect and interfere to improve Q.

2. The acoustic resonator of claim 1, wherein the alternating frame region comprises at least a first raised frame and a second raised frame on the second electrode, the first and second raised frames being spaced apart from each other.

3. The acoustic resonator of claim 2, wherein the alternating frame region is a distributed Bragg reflector.

4. The acoustic resonator of claim 2, wherein the first and second spaced apart raised frames are the same width.

5. The acoustic resonator of claim 2, wherein the first frame is wider than the second frame.

6. The acoustic resonator of claim 2, wherein the first frame is thicker than the second electrode.

7. The acoustic resonator of claim 2, further including a recessed region inside the first and second raised frames.

8. An acoustic resonator comprising:

a substrate;

a first electrode adjacent the substrate, wherein the first electrode has an outer perimeter;

a piezoelectric layer adjacent the first electrode;

a second electrode adjacent the piezoelectric layer, wherein the second electrode has an outer perimeter; and

an alternating frame region on one of the first and second electrodes;

wherein the alternating frame region includes at least one raised frame adjacent at least one relatively recessed region;

wherein the alternating frame region is a distributed Bragg reflector.

9. An acoustic resonator comprising:

a substrate;

a first electrode adjacent the substrate, wherein the first electrode has an outer perimeter;

a piezoelectric layer adjacent the first electrode;

a second electrode adjacent the piezoelectric layer, wherein the second electrode has an outer perimeter; and

an alternating frame region on one of the first and second electrodes;

wherein a depression is formed in the substrate and wherein the depression has a depression perimeter;

wherein the alternating frame region is outside the depression perimeter adjacent the outer perimeter of the second electrode.

10. An acoustic resonator comprising:

a substrate;

a first electrode adjacent the substrate, wherein the first electrode has an outer perimeter;

a piezoelectric layer adjacent the first electrode;

a second electrode adjacent the piezoelectric layer;

wherein the second electrode has an outer perimeter; and

an alternating frame region on one of the first and second electrodes;

wherein a depression is formed in the substrate and wherein the depression has a depression perimeter;

wherein the alternating frame region overlaps the depression perimeter.

11. An acoustic resonator comprising:

a substrate;

a first electrode adjacent the substrate, wherein the first electrode has an outer perimeter;

a piezoelectric layer adjacent the first electrode;

a second electrode adjacent the piezoelectric layer;

wherein the second electrode has an outer perimeter; and

an alternating frame region on one of the first and second electrodes;

wherein a depression is formed in the substrate and wherein the depression has a depression perimeter;

wherein the alternating frame region is inside the depression perimeter.

12. An acoustic resonator comprising:

a substrate;

a first electrode adjacent the substrate;

a layer of piezoelectric material adjacent the first electrode;

a second electrode adjacent the layer of piezoelectric material, wherein the first electrode, the layer of piezoelectric material and the second electrode together form an acoustic membrane having an outer edge and a center; and

an alternating frame region adjacent the outer edge of the acoustic membrane, which includes a plurality of raised frames on the second electrode, each of the plurality of raised frames being spaced apart, wherein the alternating frame region traps lateral modes within the acoustic membrane.

13. The acoustic resonator of claim 12, wherein the alternating frame region further comprises a first region having a first acoustic impedance and a second having a second acoustic impedance, the first and second acoustic impedances being different such that certain wavelengths of signals within the acoustic resonator reflect and interfere to improve Q.

14. The acoustic resonator of claim 12, wherein at least one of the raised frames on the second electrode stiffens the edge of the acoustic membrane thereby trapping modes within the resonator.