Integrated circuit inductors

• US 7,388,462 B2
• Filed: 03/18/2002
• Issued: 06/17/2008
• Est. Priority Date: 07/09/1999
• Status: Expired due to Term

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micron Technology, Inc.
• Inventors: Ahn, Kie Y., Forbes, Leonard
• Primary Examiner(s): Mai; Anh T
• Application Number:
  US10/100,709
• Publication Number:
  US 20020095770A1
• Time in Patent Office: 2,283 Days
• Field of Search: 336/200, 336/223, 336/225, 336/232, 296/021
• US Class Current: 336/200
• CPC Class Codes: H01F 17/0033 with the coil helically wound around a magnetic core
• CPC Class Codes: H01F 27/2804 Printed windings
• CPC Class Codes: H01F 37/00 Fixed inductances not covered by group H01F17/00
• CPC Class Codes: H01L 27/08 including only semiconductor components of a single kind
• CPC Class Codes: Y10S 257/924 with passive device, e.g. capacitor, or battery, as integral part of housing or housing element, e.g. cap
• CPC Class Codes: Y10T 29/4902 Electromagnet, transformer or inductor
• CPC Class Codes: Y10T 29/49037 Using reference point/surface to facilitate measuring
• CPC Class Codes: Y10T 29/49069 Data storage inductor or core
• CPC Class Codes: Y10T 29/49071 by winding or coiling
• CPC Class Codes: Y10T 29/49073 by assembling coil and core
• CPC Class Codes: Y10T 29/49075 including permanent magnet or core

Abstract

The invention relates to an inductor comprising a plurality of interconnected conductive segments interwoven with a substrate. The inductance of the inductor is increased through the use of coatings and films of ferromagnetic materials such as magnetic metals, alloys, and oxides. The inductor is compatible with integrated circuit manufacturing techniques and eliminates the need in many systems and circuits for large off chip inductors. A sense and measurement coil, which is fabricated on the same substrate as the inductor, provides the capability to measure the magnetic field or flux produced by the inductor. This on chip measurement capability supplies information that permits circuit engineers to design and fabricate on chip inductors to very tight tolerances.

Claims

1. An inductor comprising:

a coil having a core area, the core area being an area surrounded by the coil; and

a substrate, wherein the substrate is partially coated to provide a coated substrate portion and an uncoated substrate portion, wherein the coated substrate portion fills the core area such that a first portion of the coil at a first surface of the substrate passes through the substrate and couples to a second portion of the coil at a second surface of the substrate, wherein a substrate material of the coated substrate portion and a substrate material of the uncoated substrate portion are identical substrate material, and wherein the substrate and the core area include an identical material.

2. The inductor of claim 1, wherein the coated substrate portion includes a magnetic material.

3. The inductor of claim 2, wherein the magnetic material is a magnetic oxide.

4. The inductor of claim 2, wherein the coated substrate includes an insulator layer.

5. The inductor of claim 1, wherein the coil is partially embedded in the substrate.

6. The inductor of claim 1, wherein the core area comprises a semiconductor material.

7. An inductor comprising:

a coil for creating a magnetic flux, the coil having a core area, the core area being an area surrounded by the coil; and

a substrate partially coated with a surface coating to provide a coated substrate portion and an uncoated substrate portion, wherein a substrate material of the coated substrate portion and a substrate material of the uncoated substrate portion are identical substrate material, the coated substrate portion filling the core area and coupled to the magnetic flux, and wherein the coil includes a first portion passing through the substrate and coupling to a second portion of the coil at a second surface of the substrate.

8. The inductor of claim 7, wherein the surface coating is a magnetic material.

9. The inductor of claim 8, wherein the coil comprises a plurality of interconnected metal segments fabricated from a material selected form the group consisting of gold and copper.

10. The inductor of claim 7, wherein the coil is partially embedded in the substrate.

11. The inductor of claim 7, wherein the surface coating includes a magnetic oxide.

12. The inductor of claim 11, wherein the surface coating includes an insulator layer.

13. The inductor of claim 7, wherein the surface coating covers first and second sides of the substrate.

14. The inductor of claim 7, wherein the first portion of the coil passes through the substrate via a hole extending from a first surface of the substrate through the substrate and to the second surface of the substrate.

15. The inductor of claim 14, wherein the substrate and the core area include an identical material.

16. The inductor of claim 15, wherein the identical includes semiconductor material.

17. The inductor of claim 15, wherein the identical material includes silicon.

18. An inductor comprising:

a coil with a core area for generating a magnetic flux, the core area being an area surrounded by the coil; and

a substrate partially coated with a coating to provide a coated substrate portion and an uncoated substrate portion, wherein the coated substrate portion fills the core area such that a first portion of the coil at a first surface of the substrate passes through the substrate and couples to a second portion of the coil at a second surface of the substrate, wherein a substrate material of the coated substrate portion and a substrate material of the uncoated substrate portion are identical substrate material, wherein at least a portion of the coating is coupled to the coil via the magnetic flux, and wherein the substrate and the core area include an identical material.

19. The inductor of claim 18, wherein the coating includes a magnetic material.

20. The inductor of claim 19, wherein the coating includes a first insulating layer arranged between the magnetic material and the coil.

21. The inductor of claim 20, further including a second insulating layer adjacent the coil on a side opposite the first insulating layer.

22. The inductor of claim 18, wherein the coil is partially embedded in the substrate.

23. The inductor of claim 18, further including leads connected to the coil.

24. The inductor of claim 18, further including a circuit connected to the leads.

25. An inductor comprising:

a substrate partially coated with a surface coating to provide a coated substrate portion and an uncoated substrate portion, wherein a substrate material of the coated substrate portion and a substrate material of the uncoated substrate portion are identical substrate material; and

a conductive path surrounded the coated substrate portion and at least partially surrounding the substrate such that a first portion of the conductive path at a first surface of the substrate passes through an entire of the substrate and couples to a second portion of the conductive path at a second surface of the substrate, the conductive path is constructed for creating a magnetic flux that couples to the substrate and surface coating.

26. The inductor of claim 25, wherein the surface coating comprises a magnetic material covered by an insulating material.

27. The inductor of claim 26, wherein the magnetic material is a magnetic oxide.

28. The inductor of claim 26, wherein the insulating material is an inorganic oxide.

29. The inductor of claim 26, wherein the insulating material comprises polyimide.

30. The inductor of claim 25, wherein the conductive path includes first conductive segments that pass through the substrate.

31. The inductor of claim 30, wherein the conductive path includes second conductive segments exterior to the substrate that connect to the first conductive segments to form a coil.

32. An inductor comprising:

a substrate having a partially coated surface to provide a coated substrate portion and an uncoated substrate portion, wherein a substrate material of the coated substrate portion and a substrate material of the uncoated substrate portion are identical substrate material, the partially coated surface is coated with one or more layers; and

a coil at least partially surrounding the substrate such that the coated substrate portion fills a core area of the coil and is magnetically coupled to the coil, the core area being an area surrounded by the coil such that a first portion of the coil at a first surface of the substrate passes through a hole in the substrate and couples to a second portion of the coil at a second surface of the substrate, wherein the hole extends from the first surface of the substrate to the second surface of the substrate.

33. The inductor of claim 32, wherein one of the one or more layers includes a magnetic material arranged immediately adjacent the substrate.

34. The inductor of claim 33, including an insulating layer covering the magnetic material.

35. The inductor of claim 33, wherein the magnetic material comprises nickel and iron.

36. The inductor of claim 32, wherein the coil is partially embedded in the substrate.

37. The inductor of claim 32, further including a sense inductor magnetically coupled to the coil.

38. An inductor comprising:

a conductive path comprising first and second conductive segments, the conductive path having a core area for producing a magnetic field within the core area, the core area being an area surrounded by the conductive path;

a substrate, wherein the substrate is partially coated to provide a coated substrate portion and an uncoated substrate portion, wherein a substrate material of the coated substrate portion and a substrate material of the uncoated substrate portion are identical substrate material, the coated substrate portion filling the core area and magnetically coupled to the conductive path, and wherein at least a portion of the conductive path is embedded in the substrate, wherein the substrate and the core area include an identical material.

39. The inductor of claim 38, wherein the substrate comprises a material selected from the group of materials consisting of:

silicon, germanium, gallium arsenide, and silicon carbide.

40. The inductor of claim 38, wherein the coated substrate portion includes a layer of magnetic material.

41. The inductor of claim 38, wherein the conductive path comprises first conductive segments embedded in the substrate and second conductive segments connected to the first conductive segments to form a coil.

42. An inductor comprising:

first and second conductive segments connected to form a coil with a core area and an inductance, the core area being an area surrounded by the coil;

a substrate arranged in the core area, with the first conductive segments passing through a at least one hole in a material of the core area, wherein the substrate is partially coated to provide a coated substrate portion and an uncoated substrate portion, and wherein a substrate material of the coated substrate portion and a substrate material of the uncoated substrate portion are identical substrate material; and

at least one layer of magnetic material formed in the coated substrate portion to increase the inductance of the coil.

43. The inductor of claim 42, wherein the coil has a rectangular cross-section.

44. The inductor of claim 42, wherein the coil has a triangular cross-section.

45. The inductor of claim 42, further including leads connected to the coil.

46. The inductor of claim 45, further including a circuit connected to the leads.