Method for an element using two resist layers
First Claim
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1. A method of forming an element, comprising:
- forming a first resist layer on top of a substrate;
forming a seed layer on top of at least a portion of the first resist layer;
forming a second resist layer over a portion of the seed layer, a portion of the second resist layer being positioned above a portion of the first resist layer as well as above the portion of the second layer and;
electroplating a conductive layer over exposed portions of the seed layer; and
removing the first and second resist;
wherein after the removing, step the conductive layer includes at least two electrically isolated regions.
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Abstract
A two resist layer process allows a seed layer to be used to electroplate a conductive layer of an element in a way that a portion of the seed layer can be removed.
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Citations
19 Claims
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1. A method of forming an element, comprising:
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forming a first resist layer on top of a substrate; forming a seed layer on top of at least a portion of the first resist layer; forming a second resist layer over a portion of the seed layer, a portion of the second resist layer being positioned above a portion of the first resist layer as well as above the portion of the second layer and; electroplating a conductive layer over exposed portions of the seed layer; and removing the first and second resist; wherein after the removing, step the conductive layer includes at least two electrically isolated regions. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A method of forming an element, comprising:
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forming a first resist layer on top of a substrate; forming a seed layer on top of at least a portion of the first resist layer; forming a second resist layer over a portion of the seed layer, a portion of the second resist layer being positioned above a portion of the first resist layer as well as above the portion of the second layer and; electroplating a conductive layer over exposed portions of the seed layer; and removing the first and second resist; wherein the portion of the seed layer on top of the first resist layer electrically connects a bus bar to an antenna during the electroplating step.
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8. A method of forming an element, comprising:
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forming a first resist layer on top of a substrate; forming a seed layer on top of at least a portion of the first resist layer; forming a second resist layer over a portion of the seed layer, a portion of the second resist layer being positioned above a portion of the first resist layer as well as above the portion of the seed layer and; electroplating a conductive layer over exposed portions of the seed layer; and removing the first and second resist; wherein the portion of seed layer on top of the first resist layer shorts together portions of an antenna coil during the electroplating step.
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9. A method of forming an element, comprising:
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forming a first resist layer on top of a substrate; forming a seed layer on top of at least a portion of the first resist layer; forming a second resist layer over a portion of the seed layer, a portion of the second resist layer being positioned above a portion of the first resist layer as well as above the portion of the seed layer and; electroplating a conductive layer over exposed portions of the seed layer; and removing the first and second resist; wherein the portion of the seed layer on top of the first resist layer shorts together portions of a dipole antenna.
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10. An element constructed by the process of:
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forming a first resist layer on top of a substrate; forming a seed layer on top of at least a portion of the first resist layer; forming a second resist layer over a portion of the seed layer, a portion of the second resist layer being positioned above a portion of the first resist layer as well as above the portion of the seed layer and; electroplating a conductive layer over exposed portions of the seed layer; and removing the first and second resist; wherein after the removing step the conductive layer includes at least two electrically isolated regions. - View Dependent Claims (11, 12, 13, 14, 15)
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16. An element constructed by the process of:
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forming a first resist layer on top of a substrate; forming a seed layer on top of at least a portion of the first resist layer; forming a second resist layer over a portion of the seed layer, a portion of the second resist layer being positioned above a portion of the first resist layer as well as above the portion of the seed layer and; electroplating a conductive layer over exposed portions of the seed layer; and removing the first and second resist; wherein the portion of the seed layer on top of the first resist layer electrically connects a bus bar to an antenna during the electroplating step.
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17. An element constructed by the process of:
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forming a first resist layer on top of a substrate; forming a seed layer on top of at least a portion of the first resist layer; forming a second resist layer over a portion of the seed layer, a portion of the second resist layer being positioned above a portion of the first resist layer as well as above the portion of the seed layer and; electroplating a conductive layer over exposed portions of the seed layer; and removing the first and second resist; wherein the portion of seed layer on top of the first resist layer shorts together portion of an antenna coil during the electroplating step.
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18. An RFID antenna constructed by the process of:
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forming a first resist layer on top of a substrate; forming a seed layer on top of at least a portion of the first resist layer; forming a second resist layer over a portion of the seed layer, a portion of the second resist layer being positioned above a portion of the first resist layer as well as above the portion of the seed layer and; electroplating a conductive layer over exposed portions of the seed layer; and removing the first and second resist; wherein after the removing step the conductive layer includes at least two electrically isolated regions. - View Dependent Claims (19)
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Specification