Method of generating interferometric information

• US 7,388,669 B2
• Filed: 08/15/2005
• Issued: 06/17/2008
• Est. Priority Date: 01/15/2003
• Status: Expired due to Fees

• Current Assignee: Inlight Solutions, Inc.
• Original Assignee: Inlight Solutions, Inc.
• Inventors: Abbink, Russell E.
• Primary Examiner(s): Connolly; Patrick J
• Application Number:
  US11/204,278
• Publication Number:
  US 20050270539A1
• Time in Patent Office: 1,037 Days
• Field of Search: 356451-456, 356/481, 356/517, 25033907-33909
• US Class Current: 356/455
• CPC Class Codes: G01J 3/453 by correlation of the amplitudes

Abstract

The present invention provides methods for generating interferometric information. Interferometric information from refractively scanned interferometers can contain errors due to wavelength-dependent refractive indices. The wavelength-dependent refractive indices of elements of the interferometer can produce errors when the OPD at a reference wavelength is different than the OPD at a sample wavelength. The invention can provide correction of interferometric information using relationships between the OPD at the wavelengths of interest, which correction can also be dependent on physical relationships among elements of the interferometer.

Claims

1. A method of generating interferometric information, comprising:

a. Collecting reference data from a refractively scanned interferometer at a reference wavelength while the interferometer is configured with a first plurality of OPDs;

b. Collecting sample data from the interferometer at one or more sample wavelengths while the interferometer is configured with the first plurality of OPDs; and

c. Determining a relationship of sample data to OPD from the sample data and the first plurality of OPDs adjusted by a relationship between OPD at the reference wavelength and OPD at a selected sample wavelength.

2. A method as in claim 1, wherein:

a. The first plurality of OPDs comprises equally spaced OPDs; and

b. Determining a relationship of sample data to OPD comprises determining the OPD at the selected sample wavelength from the OPD at the reference wavelength and a relationship between OPD at the reference wavelength and OPD at the selected sample wavelength.

3. A method as in claim 2, wherein the relationship between OPD at the reference wavelength and OPD at the selected sample wavelength is determined from the refractive index of the refractive scanner at the reference wavelength and at the selected sample wavelength.

4. A method as in claim 3, wherein the relationship between OPD at the reference wavelength and OPD at the selected sample wavelength is determined from the refractive index of the refractive scanner at the reference wavelength and at the selected sample wavelength, and from physical relationships among elements of the interferometer.

5. A method as in claim 1, further comprising interpolating the relationship of sample data to OPD to a plurality of substantially equally spaced OPDs.

6. A method as in claim 1, further comprising determining a relationship of sample data to OPD from the sample data and the first plurality of OPDs adjusted by a relationship between OPD at the reference wavelength and OPD at a second selected sample wavelength.

7. A method of generating interferometric information using a refractively scanned interferometer, comprising:

a. Determining the refractive index of a refractive scanner in the interferometer at a reference wavelength and at a selected sample wavelength;

b. Determining the relationship between OPD at the reference wavelength and OPD at the selected sample wavelength for a plurality of OPDs at the reference wavelength;

c. For each of a plurality of interferometer configurations, collecting interferogram data at the reference wavelength and at the selected sample wavelength;

d. Determining the OPD at the reference wavelength corresponding to each of the plurality of interferometer configurations;

e. Determining the OPD at the selected sample wavelength corresponding to each of the plurality of interferometer configurations from the OPD at the reference wavelength and the determined relationship;

f. Associating the interferogram data at the selected sample wavelength with the determined OPD at the selected sample wavelength.

8. A method as in claim 7, wherein associating the interferogram data comprises determining estimated interferogram data at a plurality of substantially equally spaced OPDs from the collected interferogram data at the selected sample wavelength and the determined OPDs.

9. A method as in claim 7, wherein determining the OPD at the reference wavelength corresponding to each of the plurality of interferometer configurations comprises determining interferometer configurations where the AC component of the interferogram data at the reference wavelength is substantially zero, and determining the OPD to be a multiple of one half the reference wavelength.

10. A method as in claim 7, further comprising

a. Determining the refractive index of the refractive scanner at a second selected sample wavelength;

b. Determining the relationship between OPD at the reference wavelength and OPD at the second selected sample wavelength for a plurality of OPDs at the reference wavelengths;

c. For each of a plurality of interferometer configurations, collecting interferogram data at the reference wavelength and at the second selected sample wavelength;

d. Determining the OPD at the reference wavelength corresponding to each of the plurality of interfereometer configurations;

e. Determining the OPD at the second selected sample wavelength corresponding to each of the plurality of interfereometer configurations from the OPD at the reference wavelength and the determined relationship;

f. Associating the interferogram data at the second selected sample wavelength with the determined OPD at the second selected sample wavelength.