Apparatus and methods for the inspection of objects
First Claim
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1. An electrical circuitry inspection method comprising:
- performing reference based inspection of electrical circuitry to be inspected, including;
for each of a plurality of types of local characteristics, each type occurring at least once within said electrical circuitry to be inspected, identifying at least one portion of interest within the electrical circuitry whereat said local characteristic is expected to occur; and
inspecting an image of each of said at least one portion of interest, using a selected inspection task employing information defining said portion of interest and additional inspection information relevant to said portion of interest, said inspection task being selected from among a plurality of different inspection tasks in response to the type of local characteristic expected to occur in the portion of interest,said information defining said portion of interest comprising at least one of;
binary Contour Element (CEL) data, identifying contour elements which correspond to borders between different regions in a pattern; and
color CEL data, identifying contour elements which correspond to borders between different regions in a pattern and identifying a type of region on either side of a CEL.
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Abstract
An electrical circuit inspection method including, for each of a plurality of types of local characteristics, each type occurring at least once within electrical circuitry to be inspected, identifying at least one portion of interest within the electrical circuitry whereat the local characteristic is expected to occur, and inspecting an image of each portion of interest, using an inspection task selected in response to the type of local characteristic expected to occur in the portion of interest.
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Citations
20 Claims
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1. An electrical circuitry inspection method comprising:
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performing reference based inspection of electrical circuitry to be inspected, including; for each of a plurality of types of local characteristics, each type occurring at least once within said electrical circuitry to be inspected, identifying at least one portion of interest within the electrical circuitry whereat said local characteristic is expected to occur; and inspecting an image of each of said at least one portion of interest, using a selected inspection task employing information defining said portion of interest and additional inspection information relevant to said portion of interest, said inspection task being selected from among a plurality of different inspection tasks in response to the type of local characteristic expected to occur in the portion of interest, said information defining said portion of interest comprising at least one of; binary Contour Element (CEL) data, identifying contour elements which correspond to borders between different regions in a pattern; and color CEL data, identifying contour elements which correspond to borders between different regions in a pattern and identifying a type of region on either side of a CEL. - View Dependent Claims (3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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2. Electrical circuitry apparatus comprising:
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a reference based inspector performing reference based inspection of electrical circuitry to be inspected, said reference based inspector including; a portion of interest identifier operative, for each of a plurality of types of local characteristics, each type occurring at least once within said electrical circuitry to be inspected, to identify at least one portion of interest within the electrical circuitry whereat said local characteristic is expected to occur; and an image inspector inspecting an image of each of said at least one portion of interest, using a selected inspection task employing information defining said portion of interest and additional inspection information relevant to said portion of interest, said inspection task being selected from among a plurality of different inspection tasks in response to the type of local characteristic expected to occur in the portion of interest, said information defining said portion of interest comprising at least one of; binary Contour Element (CEL) data, identifying contour elements which correspond to borders between different regions in a patter; and color CEL data, identifying contour elements which correspond to borders between different regions in a pattern and identifying a type of region on either side of a CEL. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20)
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Specification