Photonic waveguide structures for chip-scale photonic integrated circuits

• US 7,389,029 B2
• Filed: 07/01/2004
• Issued: 06/17/2008
• Est. Priority Date: 07/03/2003
• Status: Expired due to Fees

• Current Assignee: Applied Research And Photonics, Inc.
• Original Assignee: Applied Research And Photonics, Inc.
• Inventors: Tomalia, Donald, Rahman, Anis
• Primary Examiner(s): Kim; Ellen E.
• Application Number:
  US10/710,303
• Publication Number:
  US 20050002628A1
• Time in Patent Office: 1,447 Days
• Field of Search: 385/129
• US Class Current: 385/129
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: G02B 6/1221 made from organic materials

Abstract

The present invention discloses a photonic waveguide that is based on natural index contrast (NIC) principle and also discloses fabrication details thereof. Such waveguide forms the basis of a class of chip-scale micro- and nano-photonic integrated circuits (PICs). The NIC method utilizes the built-in refractive index difference between two layers of dielectric thin films of two materials, created from nano-materials that are designed for optical waveguide applications. This new class of waveguides simplifies the PIC fabrication process significantly. Based on the NIC based waveguides, which by design possess multiple photonic functionalities, PICs can be fabricated for a number of photonic applications such as arrayed waveguide grating (AWG), reflective arrayed waveguide grating (RAWG), interleaver, interferometer, and electro-optic sensor. Additionally, several other PICs can also be fabricated via tiers of integration, such as triple-phase integration where multiple optical functionalities are monolithically integrated on a chip.

Claims

1. A photonic waveguide comprising of:

a substrate,

a first layer of a nanomaterial,

a second layer of a nanomaterial,

a third layer of the first nanomaterial,

a fourth layer of an optical material,

wherein the second layer has a higher refractive index than the first layer,

wherein the third layer has the same refractive index as the first layer,

wherein the first layer is the bottom cladding,

wherein the second layer is the guiding layer,

wherein the third layer is the top cladding,

wherein the fourth layer is a cover layer,

wherein the second layer is patterned to form the core of the waveguide,

wherein the first and the third layers enclose the second layer, thus forming a waveguide,

wherein the waveguiding is accomplished by the natural index contrast (NIC) method where the NIC value is given by

2. The waveguide of claim 1 wherein the waveguide can transmit light at least in the wavelength range of 1060 to 1650 nm.

3. The waveguide of claim 1 wherein the first layer comprises of a nanomaterial that is deposited on the said substrate by at least one method from spin-coating, spray deposition, chemical vapor deposition, etc.

4. The waveguide of claim 1 wherein the second layer comprises of a nanomaterial that is deposited on top of the said first layer of claim 3 by at least one method from spin-coating, spray deposition, chemical vapor deposition, etc.

5. The waveguide of claim 1 wherein the first layer is at least a dendrimer, a spin-on-glass, a nanosilica, a polymer, or a composition thereof.

6. The waveguide of claim 1 wherein the second layer is at least a dendrimer, a spin-on-glass, nanosilica, a polymer, or a composition thereof.

7. The waveguide of claim 1 wherein the thickness of the first layer is controlled at least by solution concentration, solution viscosity, solution pH, spin-coating parameters, and curing parameters.

8. The waveguide of claim 1 wherein the thickness of the second layer is controlled at least by solution concentration, solution viscosity, solution pH, spin-coating parameters, and curing parameters.

9. The waveguide of claim 1 wherein the patterned second layer comprises of a plurality of waveguides.

10. The waveguide of claim 1 wherein the second layer is comprised of at least one waveguide structure from a group of waveguide structures comprising of:

linear waveguide, curved waveguide, circular waveguide, splitter, spiral waveguide, serpentine waveguide, branched waveguide, slab waveguide, parallel waveguide, converging waveguide, diverging waveguide, and interconnect waveguide.

11. The waveguide of claim 1 wherein the patterned second layer defines at least one device.

12. The waveguide of claim 1 wherein the substrate material comprises of at least one hard and non-flexible material from the group:

silicon, glass, quartz, plastic, alumina, and ceramic.

13. The waveguide of claim 1 wherein the substrate material comprises of at least one soft and flexible material from the group:

plastic, polyimide, pyrex, and polymer.

34. The waveguide of claim 1 wherein the thickness of the third layer is controlled at least by solution concentration, solution viscosity, solution pH, spin-coating parameters, and curing parameters.

36. The photonic integrated circuit of claim 34, wherein the second layer is a guiding layer.

37. The photonic integrated circuit of claim 34, wherein the guiding layer is doped for signal amplification.

38. The photonic integrated circuit of claim 34, wherein the guiding layer is doped for signal modulation.

39. The photonic integrated circuit of claim 34, wherein the guiding layer has a dopant.

14. A photonic waveguide comprising of:

a substrate,

a first layer of a nanomaterial,

a second layer of a nanomaterial,

a third layer of the first nanomaterial,

a fourth layer of an optical material that forms a cover layer,

wherein the second layer having the ability to amplify an optical signal,

wherein the second layer has a higher refractive index than the first layer,

wherein the third layer has the same refractive index as the first layer,

wherein the first layer is the bottom cladding,

wherein the third layer is the top cladding,

wherein the first and the third layers enclose the second layer, thus forming a waveguide,

wherein the first layer and the second layer have refractive indices in a difference ratio to fall within a predetermined natural index contrast range,

wherein the NIC value has a range of >

0% to ˜

240%,

wherein the second layer is an amplifying layer,

wherein the second layer is patterned to form the waveguide core, and pumped by a pump laser,

wherein the waveguide can amplify light at least in the wavelength range of 1060 to 1650 nm,

wherein the amplification wavelength range is tuned by choosing at least one rare-earth dopant species,

wherein the amplification efficiency is tuned at least by the concentration of the rare-earth metal ion incorporation in the second layer.

15. The waveguide of claim 14 wherein the pump and the signal are combined at least via a coupler.

16. The waveguide of claim 14 wherein the first layer is at least a dendrimer, spin-on-glass, nanosilica, polymer, or a composition thereof.

17. The waveguide of claim 14 wherein the second layer is at least a dendrimer, a spin-on-glass, a nanosilica, a polymer, or a composition thereof.

18. The waveguide of claim 14 wherein the second layer is incorporated with at least one rare-earth metal ion from a group comprising of:

Erbium, Neodymium, Praseodymium, Thorium, Holmium, Terbium, Europium, and other rare-earth metal ions with a dendrimer.

19. The waveguide of claim 14 wherein the patterned second layer comprises of a plurality of waveguides.

20. The waveguide of claim 14 wherein the second layer is comprised of at least one waveguide structure from a group of waveguide structures comprising of:

linear waveguide, curved waveguide, circular waveguide, splitters, spiral waveguide, serpentine waveguide, branched waveguide, slab waveguide, parallel waveguide, converging waveguide, diverging waveguide, and interconnect waveguide.

21. The waveguide of claim 14 wherein the patterned second layer defines at least one device.

22. The waveguide of claim 14 wherein the substrate material comprises of at least one hard and non-flexible material from the group:

silicon, glass, quartz, plastic, alumina and ceramic.

23. The waveguide of claim 14 wherein the substrate material comprises of at least one soft and flexible material from the group:

plastic, polyimide, pyrex, and polymer.

24. A photonic waveguide comprising of:

a substrate,

a first layer of a nanomaterial,

a second layer of a nanomaterial,

a third layer of the first nanomaterial,

a fourth layer of an optical material that forms a cover layer,

wherein the second layer having the ability to modulate an optical signal via increased electro-optic coefficient,

wherein the second layer has a higher refractive index than the first layer,

wherein the third layer has the same refractive index as the first layer,

wherein the first layer is the bottom cladding,

wherein the third layer is the top cladding,

wherein the first and the third layers enclose the second layer, thus forming a waveguide,

wherein the waveguide comprised of the first layer and the second layer have refractive indices in a ratio that fall within a predetermined natural index contrast range,

wherein the NIC value has a range of >

0% to ˜

240%,

wherein the second layer is patterned to form the core of the waveguide,

wherein the second layer is a modulating layer,

wherein the waveguide can modulate light at least in the wavelength range of 1060 to 1650 nm.

25. The waveguide of claim 24 wherein the first layer is at least a dendrimer, a spin-on-glass, a nanosilica, a polymer, or a composition thereof.

26. The waveguide of claim 24 wherein the second layer is at least a dendrimer, a spin-on-glass, a nanosilica, a polymer, or a composition thereof.

27. The waveguide of claim 24 wherein the second layer is doped with at least one inorganic additive.

28. The waveguide of claim 24 wherein the second layer is doped with at least one organic additive such as a chromophore.

29. The waveguide of claim 24 wherein the patterned second layer comprises of a plurality of waveguides.

30. The waveguide of claim 24 wherein the second layer is comprised of at least one waveguide structure from a group of waveguide structures comprising of:

linear waveguide, curved waveguide, circular waveguide, splitters, spiral waveguide, serpentine waveguide, branched waveguide, slab waveguide, parallel waveguide, converging waveguide, diverging waveguide, and interconnect waveguide.

31. The waveguide of claim 24 wherein the patterned second layer defines at least one device.

32. The waveguide of claim 24 wherein the substrate material comprises of at least one hard and non-flexible material from the group:

silicon, glass, quartz, plastic, alumina and ceramic.

33. The waveguide of claim 24 wherein the substrate material comprises of at least one soft and flexible material from the group:

plastic, polyimide, pyrex, and polymer.

35. A photonic integrated circuit (PIC), comprising:

a first layer of nanomaterial with a first refractive index;

a second layer of nanomaterial with a second refractive index, wherein the second refractive index is greater than the first refractive index; and

a third layer of nanomaterial with a third refractive index, wherein the third refractive index is substantially the same as the first refractive index;

wherein the first layer, the second layer and the third layer form at least one waveguide;

wherein the at least one waveguide is used as a building block for the PIC;

wherein the at least one waveguide forming the building blocks of the PIC, has the first layer and the second layer refractive indices in a ratio that satisfy a predetermined natural index contrast range;

wherein the NIC value has a range of >

0% to ˜

240%.