Pressure sensor for detecting small pressure differences and low pressures

• US 7,389,697 B2
• Filed: 05/20/2005
• Issued: 06/24/2008
• Est. Priority Date: 12/22/1997
• Status: Expired due to Fees

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Jonsson, Steffan
• Primary Examiner(s): NOORI, MAX H
• Application Number:
  US11/134,001
• Publication Number:
  US 20060000289A1
• Time in Patent Office: 1,131 Days
• Field of Search: 73718-724
• US Class Current: 73/724
• CPC Class Codes: G01L 13/025 using diaphragms
• CPC Class Codes: G01L 9/0073 using a semiconductive diaphragm
• CPC Class Codes: G01L 9/0075 using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Abstract

A capacitive pressure sensor of substantially ceramic material comprises a thick base plate (100), a front plate (140) having the same thickness as the base plate and a movable diaphragm (120) located between the front plate and the base plate. Capacitor electrodes (121b, 121a) are provided at the surface of the diaphragm facing the base plate and form a measurement capacitor. The diaphragm (120) is extremely thin and is produced by sintering a ceramic material such aluminum oxide. Owing to a pressing process used during the sintering a strong, very thin diaphragm is obtained having no mechanical stresses and fracture indications. It can be produced to have a very small thickness in order to provide pressure sensors having a high sensitivity, which can also for high-vacuum applications tolerate to be subjected to the atmospheric pressure. A shielding plate (110) can be inserted between the base plate (100) compensating the measurement capacitor. The shielding plate (110) can also be extremely thin, having a thickness down to a thickness corresponding to the thickness of a diaphragm (120).

Claims

1. A pressure sensor comprising:

an extremely thin diaphragm plate produced by sintering a ceramic material that is subjected to a pressing force during a portion of the sintering, the diaphragm plate having a movable portion, mounted for movement in response to a pressure to be measured;

said diaphragm plate including an electrode, the position of which can be electronically sensed; and

wherein said diaphragm plate has a thickness smaller than 0.35% of the diameter of said movable portion thereof.

2. A pressure sensor according to claim 1 wherein said plate is made of a ceramic material.

3. A pressure sensor according to claim 1 wherein said ceramic material is aluminum oxide.

4. A pressure sensor comprising:

a substantially rigid base plate;

a diaphragm plate, having at least a portion thereof which is movable in response to a pressure;

a first cavity formed between the base plate and the diaphragm plate, for forming a measurement electrode pair;

a shielding plate having a front surface, which forms a wall of the first cavity and is part of the measurement electrode pair, and a rear surface; and

a second cavity formed between the rear surface of the shielding plate and a surface of the base plate, the walls of the second cavity forming a reference electrode pair, for compensating measurement values captured by the measurement electrode.

5. A pressure sensor according to claim 4, wherein said shielding plate has substantially the same thickness as said diaphragm plate.

6. A pressure sensor according to claim 4, wherein said second cavity is connected to a reference pressure.

7. A pressure sensor according to claim 6 wherein the reference pressure is obtained by connecting the second cavity to a space containing a getter.

8. A pressure sensor according to claim 4, wherein said movable portion of said diaphragm plate has a thickness smaller than 0.35% of the diameter of said movable portion.

9. A pressure sensor according to claim 5, wherein said movable portion of said diaphragm plate has a thickness smaller than 0.35% of the diameter of said movable portion.

10. A pressure sensor comprising:

a pressure housing assembly made of substantially ceramic materials comprising a substantially rigid base plate, a front plate, and an extremely thin diaphragm plate produced by sintering a film of ceramic material that is subjected to a variable pressing force during a portion of the sintering, the diaphragm plate being at least partly movable in response to a pressure;

said diaphragm plate being directly disposed between the base plate and the front plate to form a cavity between a side of the diaphragm plate and a side of the base plate, so that the walls of the cavity form a measurement electrode; and

wherein the base plate and the front plate have substantially the same thickness and are made of substantially the same material.

11. A pressure sensor according to claim 10, wherein the front plate and the base plate have through-holes, the cross-sectional areas of which are small portions of the total area of the respective plate.

12. A pressure sensor, comprising:

a body made of a first substantially ceramic material defining an interior volume, the body including a wall defining a first aperture; and

a flexible diaphragm produced by sintering a second substantially ceramic material that is subjected to pressing force during a portion of the sintering, the diaphragm having a thickness smaller than 0.35% of the diameter of the diaphragm and the diaphragm dividing the interior volume into a first portion and a second portion, the first aperture being in fluid communication with the first portion, at least a first part of the diaphragm moving in a first direction when a pressure in the first portion increases relative to a pressure in the second portion, the first part of the diaphragm moving in a second direction when the pressure in the first portion decreases relative to the pressure in the second portion, the first part of the diaphragm and at least a first part of the body being characterized by a measurement capacitance, and the measurement capacitance changing in response to movement of the first part of the diaphragm relative to the first part of the body.

13. The pressure sensor of claim 12, the pressing force varying during the portion of the sintering.

14. The pressure sensor of claim 12, the first substantially ceramic material being aluminum oxide.

15. The pressure sensor of claim 12, the second substantially ceramic material being aluminum oxide.

16. The pressure sensor of claim 12, the second substantially ceramic material being aluminum oxide and a small amount of magnesium oxide.

17. The pressure sensor of claim 12, the body further including a shield plate disposed in the second portion of the interior volume, the shield plate having a first surface and a second surface opposite the first surface, the first part of the diaphragm and at least a portion of the first surface of the shield plate characterized by the measurement capacitance, and at least a portion of the shield plate and a second part of the body characterized by a reference capacitance.

18. The pressure sensor of claim 17, the shield plate having substantially the same thickness as the diaphragm.

19. The pressure sensor of claim 17, the shield plate being produced by sintering a substantially ceramic material that is subjected to pressing force during a portion of the sintering.

20. The pressure sensor of claim 19, the pressing force varying during the portion of the sintering.