Fabrication process for embedding optical band gap structures in a low temperature co-fired ceramic substrate

• US 7,390,371 B2
• Filed: 11/03/2006
• Issued: 06/24/2008
• Est. Priority Date: 01/20/2004
• Status: Expired due to Fees

• Current Assignee: NETGEAR, Inc.
• Original Assignee: Harris Corporation (L3Harris Technologies, Inc.)
• Inventors: Pike, Randy T.
• Primary Examiner(s): Mayes, Melvin C
• Application Number:
  US11/556,355
• Publication Number:
  US 20070056677A1
• Time in Patent Office: 599 Days
• Field of Search: 156/89.11, 156/89.12
• US Class Current: 156/89.12
• CPC Class Codes: G02B 1/005 made of photonic crystals or photonic band gap materials photonic band-gap structures or photonic lattices in integrated optics G02B6/1225; photonic band-gap structures or photonic lattices in optical fibres G02B6/02295
• CPC Class Codes: G02B 6/423 using guiding surfaces for the alignment

Abstract

A method for embedding optical band gap (OBG) devices in a ceramic substrate (100). The method includes the step (320) of pre-forming an OBG structure (105). The OBG structure can be a micro optical electromechanical systems (MOEMS) device. Further, the OBG structure can be preformed from indium phosphide and/or indium gallium arsenide. The method also includes the step (325) of coating the OBG structure with a surface binding material (230). The surface binding material can be comprised of calcium and hexane. The ratio of the calcium to hexane can be from about 1% to 2%. At a next step (330), the OBG structure can be inserted into the ceramic substrate. A pre-fire step (335) and a sintering step (340) then can be performed on the substrate.

Claims

1. A method for embedding optical band gap (OBG) devices in a ceramic substrate comprising the steps of:

pre-forming an OBG structure;

coating a portion of the OBG structure that is to be in contact with said ceramic substrate with a surface binding material for providing adhesion between said OBG structure and said ceramic substrate;

inserting the OBG structure into the ceramic substrate subsequent to coating the OBG structure; and

performing firing operations on the ceramic substrate subsequent to inserting the OBG structure into the ceramic substrate.

2. The method according to claim 1, wherein said step of inserting the OBG structure comprises inserting the OBG structure into a via formed within the ceramic substrate.

3. The method according to claim 1, further comprising the step of slow cooling the ceramic substrate after said step of performing firing operations.

4. The method according to claim 1, wherein said step of pre-forming the OBG structure comprises pre-forming the OBG structure from at least one material selected from the group consisting of indium phosphide and indium gallium arsenide.

5. The method according to claim 1, wherein the ceramic substrate comprises a plurality of substrate layers.

6. The method according to claim 1, wherein the ceramic substrate comprises low temperature co-fired ceramic.

7. A method for embedding optical band gap (OBG) devices in a ceramic substrate comprising the steps of:

pre-forming an OBG structure;

coating a portion of the OBG structure that is to be in contact with said ceramic substrate with a surface binding material for providing adhesion between said OBG structure and said ceramic substrate;

inserting the OBG structure into the ceramic substrate subsequent to coating the OBG structure; and

performing firing operations on the ceramic substrate subsequent to inserting the OBG structure into the ceramic substrate, wherein said step of performing firing operations on the ceramic substrate comprises the steps of;

pre-firing the ceramic substrate at a first temperature for a first duration of time; and

sintering the ceramic substrate at a second temperature for a second duration of time.

8. A method for embedding optical band gap (OBG) devices in a ceramic substrate comprising the steps of:

pre-forming an OBG structure;

coating a portion of the OBG structure that is to be in contact with said ceramic substrate with a surface binding material for providing adhesion between said OBG structure and said ceramic substrate;

inserting the OBG structure into the ceramic substrate subsequent to coating the OBG structure; and

performing firing operations on the ceramic substrate subsequent to inserting the OBG structure into the ceramic substrate, wherein the surface binding material comprises calcium.

9. The method according to claim 8, wherein the surface binding material further comprises hexane.

10. The method according to claim 9, wherein a ratio of the calcium to the hexane is from about 1% to 2%.