Method for making a semiconductor device having a high-k gate dielectric layer and a metal gate electrode

• US 7,390,709 B2
• Filed: 09/08/2004
• Issued: 06/24/2008
• Est. Priority Date: 09/08/2004
• Status: Active Grant

• Current Assignee: Tahoe Research Limited (f/k/a Learndale Limited) (Vector Capital Corporation)
• Original Assignee: Intel Corporation
• Inventors: Shah, Uday, Chau, Robert S., Doczy, Mark L., Kavalieros, Jack, Brask, Justin K., Metz, Matthew V., Datta, Suman, Nagisetty, Ramune
• Primary Examiner(s): Nguyen; Thanh
• Application Number:
  US10/937,195
• Publication Number:
  US 20060051924A1
• Time in Patent Office: 1,385 Days
• Field of Search: 438/199, 438/240, 438/785, 438/591
• US Class Current: 438/199
• CPC Class Codes: H01L 21/823842 gate conductors with different gate conductor materials or different gate conductor implants, e.g. dual gate structures

Abstract

A method for making a semiconductor device is described. That method comprises forming a first dielectric layer on a substrate, a trench within the first dielectric layer, and a second dielectric layer on the substrate. The second dielectric layer has a first part that is formed in the trench and a second part. After a first metal layer with a first workfunction is formed on the first and second parts of the second dielectric layer, part of the first metal layer is converted into a second metal layer with a second workfunction.

Claims

1. A method for making a semiconductor device comprising:

forming a first dielectric layer on a substrate;

forming a trench within the first dielectric layer;

forming a second dielectric layer on the substrate, the second dielectric layer having a first part that is formed at the bottom of the trench and a second part;

forming a first metal layer having a first workfunction on the first part of the second dielectric layer and on the second part of the second dielectric layer; and

converting the first metal layer, where formed on the first part of the second dielectric layer, into a second metal layer with a second workfunction by;

masking the first metal layer with a sacrificial light absorbing material;

forming a photoresist layer on the sacrificial light absorbing material;

patterning the photoresist layer such that a first portion of the sacrificial light absorbing material may subsequently be removed;

removing the first portion of the sacrificial light absorbing material, which first portion overlies the first part of the second dielectric layer, while leaving a second portion of the sacrificial light absorbing material overlying the second part of the second dielectric layer; and

adding a workfunction shifting component to the first metal layer, where formed on the first part of the second dielectric layer,

wherein;

the sacrificial light absorbing material includes a light absorbing dye that absorbs light at a wavelength used in the patterning of the photoresist layer.

2. The method of claim 1 wherein the second dielectric layer comprises a high-k gate dielectric layer that is formed on the substrate after the first dielectric layer is formed on the substrate.

3. The method of claim 2 wherein the high-k gate dielectric layer comprises a material that is selected from the group consisting of hafnium oxide, hafnium silicon oxide, lanthanum oxide, lanthanum aluminum oxide, zirconium oxide, zirconium silicon oxide, tantalum oxide, titanium oxide, barium strontium titanium oxide, barium titanium oxide, strontium titanium oxide, yttrium oxide, aluminum oxide, lead scandium tantalum oxide, and lead zinc niobate.

4. The method of claim 1 wherein the first metal layer comprises a material that is selected from the group consisting of hafnium, zirconium, titanium, tantalum, aluminum, a metal carbide, an aluminide, ruthenium, palladium, platinum, cobalt, nickel, and a conductive metal oxide.

5. The method of claim 1 wherein the workfunction shifting component is added to the first metal layer by exposing the first metal layer to a fluorine based plasma.

6. The method of claim 5 wherein the first metal layer, where formed on the first part of the second dielectric layer, is converted into a second metal layer with a second workfunction by:

treating the first metal layer, where formed on the first part of the second dielectric layer, to a plasma derived at least in part from sulfur hexafluoride;

then

removing the second portion of the sacrificial light absorbing material.

7. The method of claim 1 wherein the first metal layer, where formed on the first part of the second dielectric layer, is converted into a second metal layer with a second workfunction by:

forming a donor metal layer, which comprises a workfunction shifting component, on the first metal layer where formed on the first part of the second dielectric layer;

then

applying a high temperature anneal treatment to cause the workfunction shifting component to diffuse from the donor metal layer into the first metal layer.

8. The method of claim 7 further comprising:

depositing the donor metal layer on the first metal layer;

forming a masking layer on the donor metal layer, where deposited on the first metal layer above the first part of the second dielectric layer;

removing the exposed part of the donor metal layer, where deposited on the first metal layer above the second part of the second dielectric layer;

removing the masking layer; and

applying the high temperature anneal treatment; and

wherein;

the donor metal layer comprises a material that is selected from the group consisting of ruthenium, palladium, platinum, iridium, a refractory metal nitride, hafnium, zirconium, titanium, aluminum, and lanthanum; and

the high temperature anneal takes place at a temperature of at least about 300°

C. for at least about one minute to generate the second metal layer with the second workfunction.

9. The method of claim 1 wherein the first metal layer is between about 25 and about 300 angstroms thick, and has a workfunction that is between about 3.9 eV and about 4.2 eV, and the second metal layer has a workfunction that is between about 4.9 eV and about 5.2 eV.

10. The method of claim 1 wherein the first metal layer is between about 25 and about 300 angstroms thick, and has a workfunction that is between about 4.9 eV and about 5.2 eV, and the second metal layer has a workfunction that is between about 3.9 eV and about 4.2 eV.

11. The method of claim 1 wherein the second dielectric layer is formed on the substrate before the first dielectric layer is formed on the substrate, and wherein the second part of the second dielectric layer, like the first part of the second dielectric layer, is formed at the bottom of the trench.

12. The method of claim 1 wherein the second part of the second dielectric layer is formed at the bottom of a second trench that is formed within the first dielectric layer.

13. A method for making a semiconductor device comprising:

forming a first dielectric layer on a substrate;

forming a trench within the first dielectric layer;

forming a high-k gate dielectric layer on the substrate, the high-k gate dielectric layer having a first part that is formed at the bottom of the trench and a second part;

forming a first metal layer on both the first and second parts of the high-k gate dielectric layer, the first metal layer having a first workfunction;

forming a sacrificial light absorbing material on the first metal layer, a first part of the sacrificial light absorbing material covering the first part of the high-k gate dielectric layer and a second part of the sacrificial light absorbing material covering a second part of the high-k gate dielectric layer;

removing the first part of the sacrificial light absorbing material while retaining the second part of the sacrificial light absorbing material, thus exposing part of the first metal layer, the removal of the first part of the sacrificial light absorbing material being accomplished using a patterned photoresist layer;

converting the exposed part of the first metal layer into a second metal layer with a second workfunction; and

removing the second part of the sacrificial light absorbing material, wherein the sacrificial light absorbing material includes a light absorbing dye that absorbs light at a wavelength used in the patterning of the photoresist layer.

14. The method of claim 13 wherein the exposed part of the first metal layer is converted into the second metal layer with the second workfunction by treating the exposed part of the first metal layer with a fluorine based plasma.

15. The method of claim 14 wherein the first metal layer is between about 25 and about 300 angstroms thick, has a workfunction that is between about 3.9 eV and about 4.2 eV, and comprises a material that is selected from the group consisting of hafnium, zirconium, titanium, tantalum, aluminum, a metal carbide, and an aluminide, and the second metal layer has a workfunction that is between about 4.9 eV and about 5.2 eV.