Apparatus and method for electrostatically depositing aerosol particles

• US 7,393,385 B1
• Filed: 02/28/2007
• Issued: 07/01/2008
• Est. Priority Date: 02/28/2007
• Status: Active Grant

• Current Assignee: Corning Incorporated
• Original Assignee: Corning Incorporated
• Inventors: Coffey, Calvin Thomas, Fekety, Curtis Robert, Osterhout, Clinton Damon, Truesdale, Carlton Maurice, Sala, Martin Andrew, Filippov, Andrey V
• Primary Examiner(s): Chiesa; Richard L
• Application Number:
  US11/712,149
• Time in Patent Office: 489 Days
• Field of Search: 96/60, 96/62, 96/69, 96 77- 80, 96/88, 96 95- 98, 95/59, 95/61, 95/78, 95/79
• US Class Current: 95/59
• CPC Class Codes: B03C 3/383 using radiation
• CPC Class Codes: C03C 17/06 with metals C03C17/34, C03C17/44 take precedence
• CPC Class Codes: C03C 2217/251 Al, Cu, Mg or noble metals
• CPC Class Codes: C03C 2217/268 Other specific metals
• CPC Class Codes: C03C 2217/27 Mixtures of metals, alloys
• CPC Class Codes: C03C 2218/115 electro-enhanced deposition
• CPC Class Codes: C23C 24/04 Impact or kinetic deposition of particles
• CPC Class Codes: C23C 26/00 Coating not provided for in groups C23C2/00 - C23C24/00

Abstract

An apparatus useful for electrostatic deposition (ESD) of aerosol particles and methods of depositing the aerosol particles onto a substrate are disclosed. The ESD apparatus and the method of the present invention are useful for electrostatically depositing nanoparticles produced by gas-phase synthesis onto a substrate where the velocity of the flow of aerosol can be controlled.

Claims

1. An apparatus for electrostatically depositing aerosol particles comprising:

a particle generator selected from an induction particle generator, a flame spray pyrolysis generator, an ultrasonic particle generator and combinations thereof connected to an inlet passage adapted to carry a flow of aerosol in the direction of a center axis of the inlet passage;

a diverging section connected to the inlet passage, the diverging section comprising an outlet passage and a particle deposition passage, wherein the particle deposition passage forms a turn relative to the center axis of the inlet passage;

wherein the particle deposition passage comprises a charging zone comprising a charger and is adapted to receive a flow of aerosol from the inlet passage, an electrostatic deposition zone adapted to receive a flow of aerosol from the charging zone and an outlet passage positioned at the terminal end of the particle deposition passage; and

the electrostatic deposition zone comprises a pair of deposition electrodes spaced apart and facing one another.

2. The apparatus according to claim 1, wherein the charging zone comprises a charger selected from a corona charger, a radioactive gas ionizer, a photoelectric charger and combinations thereof.

3. The apparatus according to claim 2, wherein the charger comprises a pair of corona discharge electrodes spaced apart and facing one another.

4. The apparatus according to claim 3, further comprising a source of direct current (DC) connected to the charging electrodes.

5. The apparatus according to claim 1, further comprising a source of direct current (DC) connected to the deposition electrodes.

6. The apparatus according the claim 1, wherein the particle deposition passage is at an angle (α

) from 90 degrees to 170 degrees relative to the center axis of the inlet passage.

7. The apparatus according to claim 3, wherein at least one of the pair of corona discharge electrodes comprises multiple corona wires having an even delta profile.

8. The apparatus according to claim 3, wherein at least one in the pair of corona discharge electrodes comprises an outer surface comprising a conductive material.

9. The apparatus according to claim 8, wherein the conductive material is selected from aluminum, copper, brass, stainless steel, steel and combinations thereof.

10. The apparatus according to claim 3, wherein the deposition electrodes are spaced from 2 inches to 8 inches apart from one another and are positioned from 1 inch to 12 inches from the pair of corona discharge electrodes.

11. The apparatus according to claim 1, wherein the electrodes in the pair of deposition electrodes each comprise an outer surface comprising a conductive material.

12. The apparatus according to claim 11, wherein the conductive material is selected from aluminum, copper, brass, stainless steel, steel and combinations thereof.

13. The apparatus according to claim 12, wherein at least one electrode in the pair of deposition electrodes further comprises a material selected from silicon, quartz, fused silica, ceramic, mica and combinations thereof located throughout the perimeter of the outer surface.

14. The apparatus according to claim 1, further comprising a substrate positioned on at least one electrode in the pair of deposition electrodes.

15. The apparatus according to claim 14, comprising two or more substrates positioned on at least one electrode in the pair of deposition electrodes.

16. A method for electrostatically depositing aerosol particles on a substrate, the method comprising:

generating an initial flow of aerosol comprising nanoparticles;

passing the initial flow of aerosol across a diverging section that divides the initial flow of aerosol into a particle deposition stream and an outlet stream;

wherein at least the particles in the particle deposition stream flow at an angle and at a reduced velocity relative to the initial flow of aerosol;

passing the particle deposition stream through a charging zone comprising a charger;

applying direct current to the charger to charge the aerosol particles passing there between, forming charged aerosol particles;

passing the charged aerosol particles between a pair of deposition electrodes, at least one having a substrate attached thereto; and

applying direct current to the deposition electrodes to produce an electric field there between that deposits the charged aerosol particles comprising nanoparticles onto the substrate.

17. The method according to claim 16, wherein the charger is selected from a corona charger, a radioactive gas ionizer, a photoelectric charger and combinations thereof.

18. The method according to claim 17, wherein the charger comprises a pair of corona discharge electrodes spaced apart and facing one another.