High performance sol-gel spin-on glass materials

• US 7,393,469 B2
• Filed: 07/31/2003
• Issued: 07/01/2008
• Est. Priority Date: 07/31/2003
• Status: Expired due to Fees

• Current Assignee: Gula Consulting Limited Liability Company (Intellectual Ventures LLC)
• Original Assignee: Waveguide Solutions
• Inventors: Velasco, Paul, Benrashid, Ramazan
• Primary Examiner(s): KOSLOW, CAROL M
• Application Number:
  US10/632,450
• Publication Number:
  US 20050022697A1
• Time in Patent Office: 1,797 Days
• Field of Search: 252/301.36, 252/301.35, 106/287.16, 528/15, 528/12, 528/32, 528/34
• US Class Current: 252/301.36
• CPC Class Codes: G03F 7/0757 Macromolecular compounds containing Si-O, Si-C or Si-N bonds G03F7/0752 takes precedence
• CPC Class Codes: H01L 21/02126 the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
• CPC Class Codes: H01L 21/02216 the compound being a molecule comprising at least one silicon-oxygen bond and the compound having hydrogen or an organic group attached to the silicon or oxygen, e.g. a siloxane
• CPC Class Codes: H01L 21/02282 liquid deposition, e.g. spin-coating, sol-gel techniques, spray coating
• CPC Class Codes: H01L 21/3122 layers comprising polysiloxane compounds
• CPC Class Codes: H01L 21/316 composed of oxides or glassy oxides or oxide based glass
• CPC Class Codes: H01L 33/56 Materials, e.g. epoxy or silicone resin

Abstract

Hybrid sol-gel materials are provided, which may be produced by the reaction of an alkyl or dialkyl substituted trialkoxysilane or dialkoxysilane reacting with a silane diol, wherein said alkyl group has from 1 to 8 carbon atoms. A process is also provided for patterning the sol-gel spin-on glass material by: a) coating a substrate with the spin-on glass material; b) exposing the coated substrate of step a) to UV illumination in a desired pattern; c) post-exposure baking the coated substrate of step b) at a temperature from 100° C. to 120° C. for 30 to 60 minutes; d) cooling the coated substrate of step c) to room temperature; e) removing the non-exposed areas of the coating on the coated substrate of step d); f) drying the coated substrate of step e); g) hard baking the coated substrate of step f) at a temperature from 120° C. and 150° C. for 1 to 3 hours.

Claims

1. A process for producing a non-aqueous sol-gel spin-on glass material comprising a hybrid glass/polymer material, by reacting an alkyl trialkoxysilane, an alkyl dialkoxysilane or a dialkyl dialkoxysilane with a silane diol, wherein said alkyl group has from 1 to 8 carbon atoms, wherein the reaction of the alkyl trialkoxysilane, alkyl dialkoxysilane or dialkyl dialkoxysilane silane with the silane diol is carried out in a non-aqueous medium in the presence of a calalyst, wherein the catalyst is selected from:

a) a tin catalyst or b) a dibutyltin diluarate, titanium isopropoxide, acetic acid or trifluroroacetic acid catalyst.

2. The process of claim 1, wherein the silane diol is a diphenylsilanediol, a 1,3-Bis (3-hydroxypropyl) tetramethyldisiloxane, a 1,3-Bis (4-hydroxybutyl) tetramethyldisiloxane, a fluorinated silane diol, or a mixture of one or more of these silane diols.

3. The process of claim 1, wherein the alkyl group is replaced with a methacyloxypropyl, acryloxypropyl, or epoxy moiety.

4. The process of claim 1, wherein the trialkoxysilane has 1 C₁ to C₈ alkyl or methacryloxypropyl groups on the same molecule and the dialkoxysilane has 1 to 2 C₁ to C₈ alkyl or methacryloxypropyl groups on the same molecule.

5. The process of claim 1, further comprising adding a UV light blocking material and/or an oxygen scavenger.

6. The process of claim 1, further comprising adding a light-scattering material.

7. The process of claim 1, further comprising adding a coupling agent.

8. The process of claim 7, wherein the coupling agent is a dibutoxyaluminoxytriethoxysilane, a mixture of zirconium isopropoxide and methacrylic acid, or another transition metal propoxide.

9. A non-aqueous sol-gel spin-on glass material comprising a hybrid glass/polymer material containing a phosphor dopant, which consists essentially of a YAG base phosphor or moisture sensitive phosphor nano-particles, said sol-gel spin-on-glass material selected from the group having the following formulas:

10. The non-aqueous sol-gel spin-on glass material of claim 9, having the following formula:

11. The non-aqueous sol-gel spin-on glass material of claim 9, having the following formula:

12. The non-aqueous sol-gel spin-on glass material of claim 9, having the following formula:

13. The non-aqueous sol-gel spin-on glass material of claim 9 having the following formula:

14. The non-aqueous sol-gel spin-on glass material of claim 9, further comprising a UV light blocking material and/or an oxygen scavenger.

15. The non-aqueous sol-gel spin-on glass material of claim 9, further comprising a light-scattering material.

16. A process for producing the non-aqueous sol-gel spin-on glass material of claim 9, the process comprising reacting an alkyl substituted trialkoxysilane, an alkyl substituted dialkoxysilane or a dialkyl substituted dialkoxysilane with a silane diol, wherein said alkyl group has from 1 to 8 carbon atoms, wherein the reaction of the alkyl substituted trialkoxysilane, alkyl substituted dialkoxysilane or dialkyl substituted dialkoxysilane silane with the silane diol is carried out in a non-aqueous medium in the presence of a catalyst, the process further comprising adding to said sol-gel spin-on glass material a phosphor dopant, which consists essentially of a YAG base phosphor or moisture sensitive phosphor nano-particles.