Method of manufacturing external force detection sensor
First Claim
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1. A method of manufacturing an external force detection sensor, comprising the steps of:
- providing an element substrate including a front surface side and a back surface side having a sensor element forming area;
forming an etching stop layer of a conductive material only in the sensor element forming area of the back surface side of the element substrate;
arranging a support substrate with a recessed portion therein on the back surface side of said element substrate, the recessed portion being arranged opposite to the etching stop layer of said element substrate;
joining the support substrate to the element substrate;
through-hole dry etching the front surface side of the element substrate until reaching the etching stop layer so as to form a sensor element.
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Abstract
A method of manufacturing an external force detection sensor in which a sensor element is formed by through-hole dry etching of an element substrate, and an electrically conductive material is used as an etching stop layer during the dry etching.
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Citations
14 Claims
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1. A method of manufacturing an external force detection sensor, comprising the steps of:
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providing an element substrate including a front surface side and a back surface side having a sensor element forming area; forming an etching stop layer of a conductive material only in the sensor element forming area of the back surface side of the element substrate; arranging a support substrate with a recessed portion therein on the back surface side of said element substrate, the recessed portion being arranged opposite to the etching stop layer of said element substrate; joining the support substrate to the element substrate; through-hole dry etching the front surface side of the element substrate until reaching the etching stop layer so as to form a sensor element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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Specification