Embedded piezoelectric microcantilever sensors

• US 7,395,693 B2
• Filed: 01/24/2007
• Issued: 07/08/2008
• Est. Priority Date: 12/02/2004
• Status: Expired due to Fees

• Current Assignee: Arizona Board of Regents (University of Arizona)
• Original Assignee: Arizona Board of Regents (University of Arizona)
• Inventors: Eastman, Michael P., Porter, Timothy L.
• Primary Examiner(s): CYGAN, MICHAEL T
• Application Number:
  US11/657,250
• Publication Number:
  US 20070119236A1
• Time in Patent Office: 531 Days
• Field of Search: 73/232, 73/240.6, 73/290.5, 73/310.1, 73/310.5
• US Class Current: 73/23.2
• CPC Class Codes: G01N 2203/0023 Bending
• CPC Class Codes: G01N 2203/0286 Miniature specimen; Testing on microregions of a specimen
• CPC Class Codes: G01N 7/04 by absorption or adsorption alone

Abstract

An apparatus and method for sensing chemical and/or biological analytes includes a deflectable arm of a microcantilever at least partially embedded within a sensing element. A gaseous or liquid medium which may include the analyte being detected is introduced to the sensing element. The sensing element undergoes volumetric expansion or contraction in the presence of the analyte sought to be detected, typically by adsorbing the analyte. The volumetric change of the sensing element causes the deflectable arm to deflect. The deflectable arm includes at least one measurable physical property which changes when the arm deflects. Detecting means are provided to measure the change in the physical property to determine the presence and amount of analyte present. An array of microcantilevers in which each microcantilever is dedicated to detecting a particular analyte which may be included in the medium, is also provided.

Claims

1. A microcantilever sensor, comprising:

a polymeric sensing material having at least one receptor bound to said sensing material that selectively binds an analyte, wherein said polymeric sensing material is capable of a volumetric change when the receptor is brought into contact with said analyte;

a deflectable arm having a first end fixedly coupled to a substrate, and a second end capable of deflecting responsive to a volumetric change of the polymeric sensing material, wherein said polymeric sensinci material is disposed on a further substrate;

and a detecting element which creates a detectable signal in response to the deflection of said arm.

2. The microcantilever sensor as in claim 1, wherein said arm includes at least one measurable physical property which changes when said arm deflects and said detecting element is capable of measuring a change in said at least one measurable physical property at least one point along said arm.

3. The microcantilever sensor as in claim 1, in which said detecting element includes an electric circuit for facilitating measurement of said deflection of said arm.

4. The microcantilever sensor as in claim 1, in which said detecting element includes a transducer capable of transducing said deflection of said arm to a measurable electrical signal.

5. The microcantilever sensor as in claim 1, in which said deflectable arm includes a piezoresistive member and said detecting element includes an electrical circuit capable of measuring a change in resistance of said piezoresistive member due to said deflection.

6. The microcantilever sensor as in claim 5, wherein said piezoresistive member comprises barium titanate.

7. The microcantilever sensor as in claim 1, wherein said deflectable arm is embedded within said polymeric sensing material.

8. The microcantilever sensor as in claim 1, wherein the polymeric sensing material comprises a biological receptor formed of one of either layered biological molecules or composite materials.

9. The microcantilever sensor as in claim 8, in which said biological receptor comprises one of either an antibody or a composite containing said antibody.

10. The microcantilever sensor as in claim 9, in which said analyte comprises a biological material attracted to said antibody.

11. The microcantilever as in claim 8, in which said biological receptor comprises a genetic material either alone or contained within a composite material.

12. The microcantilever sensor as in claim 11, in which said genetic material is DNA.

13. The microcantilever sensor as in claim 1, in which said analyte is included within one of either a gaseous medium or a liquid medium.

14. The microcantilever sensor as in claim 2, wherein said detecting element is capable of measuring a change in said at least one measurable physical property at a plurality of locations along said arm.

15. A method for detecting an analyte within a medium, comprising:

providing a deflectable microcantilever arm having a first end fixedly coupled to a substrate, said microcantilever arm disposed in a rest position;

forming a polymeric sensing material deposit adjacent to a second end of said arm, wherein said polymeric sensing material is disposed on a further substrate;

binding a receptor material capable of selectively binding an analyte to said polymeric sensing material, such that said polymeric sensing material deposit is capable of a volumetric change responsive to the presence of said analyte, said volumetric change causing a deflection of said microcantilever arm;

measuring a control volume of said polymeric sensing material deposit by monitoring the deflection of said microcantilever arm in the absence of said analyte;

introducing a medium containing said analyte to said sensing element, said medium being one of a liquid and a vapor;

and comparing the control volume to a measured volume in the presence of said medium by monitoring the deflection of said microcantilever arm.

16. The method as in claim 15, wherein said microcantilever arm includes at least one measurable physical property which changes when said microcantilever arm deflects and said measuring comprises measuring a change in said at least one measurable physical property.

17. The method as in claim 15, wherein said microcantilever arm includes a piezoresistive member and said measuring comprises measuring a resistance change of said piezoresistive member as a result of one of said upward deflection and said downward deflection.