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Force sensor, force detection system and force detection program

  • US 7,395,721 B2
  • Filed: 12/23/2004
  • Issued: 07/08/2008
  • Est. Priority Date: 05/14/2004
  • Status: Expired due to Fees
First Claim
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1. A force sensor comprising:

  • a displacement unit that displaces when a force is applied;

    at least one first sensor unit that generates a first output by detecting the displacement of said displacement unit as change of capacitance; and

    a second sensor unit that is annexed to said first sensor unit and generates a second output which is independent of said first output and rises steeply from said first output and shifts to a saturated state ahead of said first output by detecting the displacement of said displacement unit of the same direction that said first sensor unit detects as change of capacitance.

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