Method of forming a polishing pad having reduced striations

• US 7,396,497 B2
• Filed: 09/30/2004
• Issued: 07/08/2008
• Est. Priority Date: 09/30/2004
• Status: Active Grant

• Current Assignee: Rohm and Haas Electronic Materials CMP Holdings, Inc.
• Original Assignee: Rohm and Haas Electronic Materials CMP Holdings, Inc.
• Inventors: November, Samuel J., Saikin, Alan H., Koetas, Joseph P., Leviton, Alan E., Norton, Kari-Ell, Robertson, Malcolm W.
• Primary Examiner(s): Halpern; Mark
• Application Number:
  US10/956,847
• Publication Number:
  US 20060066001A1
• Time in Patent Office: 1,377 Days
• Field of Search: 264/162, 264/161, 264/109, 264/118, 264/51, 264/54, 451/526, 451/41, 451/59, 451/528
• US Class Current: 264/162
• CPC Class Codes: B24B 37/205 provided with a window for inspecting the surface of the work being lapped
• CPC Class Codes: B24D 18/00 Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
• CPC Class Codes: B29B 7/726 Measuring properties of mixture, e.g. temperature or density B29B7/724 takes precedence
• CPC Class Codes: B29B 7/748 Plants B29B7/7433, B29B7/7485, B29B7/7495 take precedence
• CPC Class Codes: B29C 39/006 Monomers or prepolymers by reaction injection moulding B29C67/246

Abstract

The present invention provides a method of forming a chemical mechanical polishing pad, comprising providing a tank with polymeric materials and providing a storage hopper with microspheres having an initial bulk density, wherein the storage hopper further comprises a porous membrane provided over a plenum. The method further provides the steps of connecting a fluidizing gas source to the plenum through a gas inlet line and fluidizing the microspheres and reducing the initial bulk density by feeding gas into the plenum. In addition, the method further provides the steps of providing a delivery system for delivering the polymeric materials and the microspheres to a mixer, forming a mixture of the polymeric materials and the microspheres, pouring the mixture into a mold to form a molded product and cutting the molded product into the polishing pad.

Claims

1. A method of forming a chemical mechanical polishing pad, comprising:

providing a tank with polymeric materials;

providing a storage hopper with hollow polymeric microspheres having an initial bulk density, wherein the storage hopper further comprises a helical agitator and a porous membrane provided over a plenum;

providing a recirculation loop for recirculating the hollow polymeric microspheres and controlling the bulk density of the hollow polymeric microspheres, wherein the recirculation loop has a mass flow sensor for measuring a continuous bulk density of the hollow polymeric microspheres passing therethrough,

connecting a fluidizing gas source to the plenum through a gas inlet line;

fluidizing the hollow polymeric microspheres by feeding a fluidizing gas from the fluidizing gas source into the plenum through the porous membrane into the storage hopper and thereby reducing the bulk density of the hollow polymeric microspheres below the initial bulk density;

providing a delivery system for delivering the polymeric materials and the hollow polymeric microspheres having a bulk density below the initial bulk density to a mixer;

forming a mixture of the polymeric materials and the hollow polymeric microspheres;

pouring the mixture into a mold to a form a molded product; and

cutting the molded product into the polishing pad.

2. The method of claim 1 wherein the step of fluidizing the hollow polymeric microspheres reduces the bulk density of the hollow polymeric microspheres by at least 20 percent.

3. The method of claim 1 wherein the porous membrane achieves permeability with a pressure drop of 0.498 to 13.780 kPa at a 0.152 m/sec normal gas velocity.

4. The method of claim 1 further comprising the step of venting the mixer before pouring the mixture.

5. The method of claim 1 wherein the polymeric material comprises, polyurethanes, polycarbonates, polyesters, silicones, polyimides, polysulfone, polyvinyl chloride, polyacrylonitrile, polymethylmethacrylate, polyvinylidene fluoride, polyethylene terephthalate, polyetheretherketone, polyetherketone, polyetherimide, ethylvinyl acetate, polyvinyl butyrate, polyvinyl acetate, acrylonitrile butadiene styrene, fluorinated ethylene propylene and perfluoralkoxy polymers, and combinations thereof.

6. The method of claim 1, wherein the hollow polymeric microspheres comprise a copolymer of acrylonitrile and vinylidene chloride.