Piezoelectric resonator element, piezoelectric device and gyro sensor

• US 7,397,172 B2
• Filed: 10/18/2005
• Issued: 07/08/2008
• Est. Priority Date: 10/21/2004
• Status: Expired due to Fees

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: Kikushima, Masayuki
• Primary Examiner(s): Schuberg; Darren
• Assistant Examiner(s): Gordon; Bryan P
• Application Number:
  US11/252,704
• Publication Number:
  US 20060087205A1
• Time in Patent Office: 994 Days
• Field of Search: 310/370, 735/040.2
• US Class Current: 310/370
• CPC Class Codes: G01C 19/5607 using vibrating tuning forks double-ended tuning forks using planar vibrating masses suspended at opposite ends G01C19/5719
• CPC Class Codes: H03H 9/215 consisting of quartz

Abstract

A piezoelectric resonator element, comprises: a base made of a piezoelectric material; at least a pair of resonating arms provided in a unified manner with the base and extending in parallel with each other from the base; a portion defining a long groove provided to each of the resonating arms along a longitudinal direction; and a driving electrode provided to the long groove. Each of the resonating arms includes a structure to adjust hardness balance between right and left structures with respect to a virtual central line extending in the longitudinal direction.

Claims

1. A piezoelectric resonator element, comprising:

a base made of a piezoelectric material;

at least a pair of resonating arms provided in a unified manner with the base and extending in parallel with each other from the base;

a portion defining a long groove provided to each of the resonating arms along a longitudinal direction;

a driving electrode provided to the long groove;

wherein each of the resonating arms includes a structure to adjust hardness balance between right and left structures with respect to a virtual central line extending in the longitudinal direction; and

wherein a right constricted portion and a left constricted portion with respect to the virtual central line are provided to a base portion of each of the resonating arms so as to make a width of the resonating arms large on the base side and make the width sharply reduce toward each end portion, and the right constricted portion is made larger than the left constricted portion as the structure to adjust.

4. The piezoelectric resonator element of claim 1, wherein the piezoelectric resonator element is incorporated into a piezoelectric device and is housed in a container.

5. The piezoelectric element of claim 1, wherein the piezoelectric element is a base of a gyro sensor.

2. A piezoelectric resonator element, comprising:

a base made of a piezoelectric material;

at least a pair of resonating arms provided in a unified manner with the base and extending in parallel with each other from the base;

a portion defining a long groove provided to each of the resonating arms along a longitudinal direction;

a driving electrode provided to the long groove;

wherein each of the resonating arms includes a structure to adjust hardness balance between right and left structures with respect to a virtual central line extending in the longitudinal direction; and

wherein the structure to adjust is disposed proximate to a base portion of each of the resonating arms and the long groove includes a first width at the structure to adjust and a second width, different than the first width, between an end of the structure to adjust and an end of a respective resonating arm.

6. The piezoelectric resonator element of claim 2, wherein the piezoelectric resonator element is incorporated into a piezoelectric device and is housed in a container.

7. The piezoelectric element of claim 2, wherein the piezoelectric element is a base of a gyro sensor.

8. The piezoelectric element of claim 2, wherein the first width is less than the second width.

9. The piezoelectric element of claim 2, wherein the structure to adjust includes a wider part formed on a first wall of each of the resonating arms.

10. The piezoelectric element of claim 9, wherein the wider part extends into the long groove to define the first width between the wider part and a second wall of the respective resonating arm opposite to the first wall.

3. A piezoelectric resonator element, comprising:

a base made of a piezoelectric material;

at least a pair of resonating arms provided in a unified manner with the base and extending in parallel with each other from the base;

a portion defining a long groove provided to each of the resonating arms along a longitudinal direction;

a driving electrode provided to the long groove;

wherein each of the resonating arms includes a structure to adjust hardness balance between right and left structures with respect to a virtual central line extending in the longitudinal direction; and

wherein the structure to adjust is disposed at an end portion of each of the resonating arms and includes a first portion that is larger than a second portion with respect to the virtual central line, the first portion extending in the same direction from the virtual center line on each resonating arm.

11. The piezoelectric resonator element of claim 3, wherein the piezoelectric resonator element is incorporated into a piezoelectric device and is housed in a container.

12. The piezoelectric element of claim 3, wherein the piezoelectric element is a base of a gyro sensor.