Systems and methods for facilitating wireless communication between various components of a distributed system

• US 7,398,127 B2
• Filed: 01/04/2005
• Issued: 07/08/2008
• Est. Priority Date: 01/04/2005
• Status: Active Grant

• Current Assignee: Air Liquide Electronics US LP (Air Liquide SA)
• Original Assignee: Edwards Vacuum, Inc.
• Inventors: Boger, Michael, Marini, Larry, Russell, Thomas
• Primary Examiner(s): Pham; Thomas K
• Application Number:
  US11/029,068
• Publication Number:
  US 20060148481A1
• Time in Patent Office: 1,281 Days
• Field of Search: 700/9, 700/65, 700/208, 455/3.03, 370/913, 709/208
• US Class Current: 700/9
• CPC Class Codes: G05B 19/4186 by protocol, e.g. MAP, TOP
• CPC Class Codes: G05B 2219/31162 Wireless lan
• CPC Class Codes: G05B 2219/45031 Manufacturing semiconductor wafers
• CPC Class Codes: H04W 84/00 Network topologies
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

The present invention provides systems and methods for facilitating communications between various components of distributed system. Specifically, the systems and methods of the present invention provide a wireless network for linking the various components of manufacturing equipment or manufacturing systems to one or more central control devices. Each component of the manufacturing equipment and the central control devices include a wireless module for handling communications between the components and the control devices. In some embodiments, one or more of the components may act as a server for other components in the network. In some embodiments, multiple data channels are used for communication between the components and the central control devices.

Claims

1. A system for facilitating communication between various components distributed within manufacturing equipment, said system comprising:

at least two components associated with the manufacturing equipment;

at least one central control module for controlling and monitoring operation of the at least two components;

wireless modules associated with each of said components and central control module capable of transmitting and receiving wireless signals,

wherein said central control module communicates wirelessly on a first data channel across a wireless network with said components via said wireless modules thereby controlling operation of the components, and

wherein said central control module communicates wirelessly on a second data channel across the wireless network with said components via said wireless modules thereby monitoring operation of the components.

2. A system according to claim 1, wherein said central control module controls communications on the wireless network with said components.

3. A system according to claim 1, wherein one of said components operates as a server.

4. A system according to claim 1, wherein said wireless modules use Ethernet protocol to format data for transmission.

5. A system according to claim 1, wherein said wireless modules use Transmission Control Protocol/Internet Protocol (TCP/IP) to format data for transmission.

6. A system according to claim 1, wherein said wireless modules transmit data using frequency signals.

7. A system according to claim 6, wherein said wireless modules use a protocol for transmitting signals wirelessly selected from the group consisting of IEEE802.11x wireless LAN, Bluetooth, ZigBee, WPAN (wireless personal area network), Wi-Fi, and UWB (ultra wide band).

8. A system according to claim 1, wherein the first data channel corresponds to a first frequency, and the second data channel corresponds to a second frequency different from the first frequency.

9. A system according to claim 1, wherein the components are selected from the group consisting of a flow controller, a pressure gauge, an actuator, a metrology device, an RF generator, a vacuum pump, and a temperature controller.

10. A system according to claim 9, wherein the components comprise at least one device selected from the group consisting of a processor, an application specific integrated circuit (ASIC), a storage device, a sensor and an actuator.

11. A system according to claim 1, wherein the wireless modules comprise:

an encoder/decoder,

a webserver, and

a transceiver.

12. A system for facilitating communication between various components distributed within semiconductor manufacturing equipment, said system comprising:

at least two components associated with the semiconductor manufacturing equipment;

at least one central control module for controlling and monitoring operation of the at least two components;

wireless modules associated with each of said components and central control module capable of transmitting and receiving wireless signals,

wherein said central control module communicates wirelessly on a first data channel with said components via said wireless modules thereby controlling operation of the components, and

wherein said central control module communicates wirelessly on a second data channel with said components via said wireless modules thereby monitoring operation of the components.

13. A system according to claim 12, wherein one of said components is a sensor and the other of said components is an actuator,

wherein said central control module transmits commands wirelessly to said sensor and actuator, and said sensor transmits signals wirelessly to said central control module.

14. A system according to claim 12, wherein one of said components operates as a server.

15. A system according to claim 12, wherein said wireless modules use Ethernet protocol to format data for transmission.

16. A system according to claim 12, wherein said wireless modules transmit data using frequency signals.

17. A system according to claim 12, wherein the first data channel corresponds to a first frequency, and the second data channel corresponds to a second frequency different from the first frequency.

18. A system according to claim 12, wherein the components are selected from the group consisting of a flow controller, a pressure gauge, an actuator, a metrology device, an RF generator, a vacuum pump, and a temperature controller.

19. A system according to claim 18, wherein the components comprise at least one device selected from the group consisting of a processor, an application specific integrated circuit (ASIC), a storage device, a sensor and an actuator.

20. A system according to claim 12, wherein the wireless modules comprise:

an encoder/decoders,

a webserver, and

a transceiver.