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Method and system for providing a thin film with a controlled crystal orientation using pulsed laser induced melting and nucleation-initiated crystallization

  • US 7,399,359 B2
  • Filed: 09/29/2004
  • Issued: 07/15/2008
  • Est. Priority Date: 04/01/2002
  • Status: Expired due to Fees
First Claim
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1. A system for producing at least one section of a polycrystalline metal film with a substantially uniform orientation that inhibits electro-migration, comprising:

  • a logic arrangement which is operable to;

    (a) irradiate at least one portion of the at least one section of the metal thin film to completely melt the at least one portion of the metal thin film throughout its entire thickness, and(b) allow the at least one portion of the melted metal thin film to re-solidify after the at least one is melted, wherein the grains of the at least one portion have the substantially uniform orientation that inhibits electro-migration upon the re-solidification, and(c) irradiate at least one portion of the at least one section of the metal thin film using a sequential lateral solidification technique.

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