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Electronic device including an array and process for forming the same

  • US 7,399,675 B2
  • Filed: 03/14/2005
  • Issued: 07/15/2008
  • Est. Priority Date: 10/08/2004
  • Status: Expired due to Fees
First Claim
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1. A process for forming an electronic device, the process comprising:

  • forming spaced-apart first insulating features over a substrate;

    forming a second insulating feature over the substrate and lying between the spaced-apart first insulating features, wherein a top surface of the second insulating feature lies at a lower elevation compared to a top surface of the spaced-apart first insulating features, wherein forming the second insulating feature comprises;

    depositing a first layer over the substrate including over and between the spaced-apart first insulating features;

    depositing a second layer over the first layer, wherein the second layer has a different composition compared to the first layer;

    removing portions of the second layer that overlie the spaced-apart first portions; and

    removing portions of the first layer to lower a top surface of the first layer below the top surface of the spaced-apart first insulating features;

    forming a charge storage stack overlying the second insulating feature and lying between the spaced-apart first insulating features; and

    forming a control gate electrode overlying the charge storage stack and the second insulating feature and lying between the spaced-apart first insulating features.

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