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Decoupled stacked bulk acoustic resonator band-pass filter with controllable pass bandwith

  • US 7,400,217 B2
  • Filed: 10/13/2004
  • Issued: 07/15/2008
  • Est. Priority Date: 10/30/2003
  • Status: Active Grant
First Claim
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1. A band-pass filter characterized by a center frequency, the band-pass filter comprising:

  • a lower film bulk acoustic resonator (FBAR), an upper FBAR stacked on the lower FBAR, each FBAR comprising opposed planar electrodes and a piezoelectric element between the electrodes; and

    between the FBARs, an acoustic decoupler comprising a single layer of acoustic decoupling material, the layer of acoustic decoupling material having a nominal thickness equal to an odd integral multiple of one quarter of the wavelength in the acoustic decoupling material of an acoustic signal equal in frequency to the center frequency, the acoustic decoupling material comprising at least one of polyimide, poly(para-xylylene) and a crosslinked polyphenylene polymer.

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